Osaka
Japan
4
2009-02-05
The entities that hold a legal rights for patent applications filed by inventor Kitamura Kimio:
Kimio Kitamura from Osaka, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure
#2 | 2009-01-15Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices
#3 | 2009-01-15Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator
#4 | 2009-01-15Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member
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