Veldhoven, NL
United States
2
2008-03-20
2
2008-03-25
These are the the leading inventors for applications assigned to ASML Netherlands B.V.:
ASML Netherlands B.V. based in Veldhoven, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Stage apparatus and lithographic apparatus
#2 | 2006-11-02 ✅ Patent 7,463,413 granted on 2008-12-09Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
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