Best
Netherlands
163
2026-06-18
The entities that hold a legal rights for patent applications filed by inventor Butler Hans:
Hans Butler from Best, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
ACTUATOR ARRAY, SUBSTRATE TABLE AND LITHOGRAPHIC TOOL
#2 | 2026-01-15CONTROL METHOD AND CONTROL SYSTEM FOR CONTROLLING A POSITION OF AN OBJECT WITH AN ELECTROMAGNETIC ACTUATOR
#3 | 2025-10-09METHOD OF SPATIALLY ALIGNING A PATTERNING DEVICE AND A SUBSTRATE
#4 | 2025-09-18METHOD OF DETERMINING A PARASITIC FORCE OF AN ACTUATOR OF AN OPTICAL COMPONENT, CONTROL METHOD FOR AN ACTUATOR, OPTICAL SYSTEM, PROJECTION SYSTEM AND LITHOGRAPHIC APPARATUS.
#5 | 2025-08-07METHOD OF SPATIALLY ALIGNING A PATTERNING DEVICE AND A SUBSTRATE
#6 | 2025-04-17ACTUATOR ASSEMBLIES COMPRISING PIEZO ACTUATORS OR ELECTROSTRICTIVE ACTUATORS
#7 | 2025-02-13METHOD OF REDUCING CYCLIC ERROR EFFECTS IN A LITHOGRAPHIC PROCESS, PROJECTION SYSTEM AND LITHOGRAPHIC APPARATUS COMPRISING A PROJECTION SYSTEM
#8 | 2025-01-23Imprint Apparatus with Movable Stages
#9 | 2024-09-19ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF DETERMINING A MOTOR-DEPENDENT COMMUTATION MODEL FOR AN ELECTROMAGNETIC MOTOR
#10 | 2024-09-19PLATFORM FOR CHARGED PARTICLE APPARATUS AND COMPONENTS WITHIN A CHARGED PARTICLE APPARATUS
#11 | 2024-06-06Metrology Apparatus
#12 | 2024-05-30A POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A DRIVING FORCE ATTENUATION METHOD, AND A DEVICE MANUFACTURING METHOD
#13 | 2024-05-02OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS
#14 | 2024-02-29DUAL FOCUS SOLUTON FOR SEM METROLOGY TOOLS
#15 | 2024-02-22A METROLOGY APPARATUS AND A METROLOGY METHOD
#16 | 2023-11-09Metrology tool with position control of projection system
#17 | 2023-08-24Lithographic apparatus
#18 | 2022-10-13Actuator assemblies comprising piezo actuators or electrostrictive actuators
#19 | 2022-06-23Object positioning system diagnostic and calibration methods positioning control method lithographic apparatus and device manufacturing method
#20 | 2022-06-23Object table, a stage apparatus and a lithographic apparatus
#21 | 2022-04-21Metrology apparatus
#22 | 2022-04-14Electronic system, accelerometer, calibration method, lithographic apparatus and device manufacturing method
#23 | 2021-10-14Piezoelectric actuator, actuator system, substrate support, and lithographic apparatus including the actuator
#24 | 2021-08-05Frame assembly, lithographic apparatus and device manufacturing method
#25 | 2021-07-22Lithographic apparatus
#26 | 2021-05-06Lithographic apparatus and method
#27 | 2021-03-18Pneumatic support device and lithographic apparatus with pneumatic support device
#28 | 2020-11-19Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method
#29 | 2020-09-10Projection system and mirror and radiation source for a lithographic apparatus
#30 | 2020-07-16Lithographic apparatus and device manufacturing method
#31 | 2020-07-02Lithographic Apparatus, Lithographic Projection Apparatus and Device Manufacturing Method
#32 | 2020-05-21Lithographic apparatus
#33 | 2020-04-23Support structure, method and lithographic apparatus
#34 | 2020-02-20Height sensor, lithographic apparatus and method for manufacturing devices
#35 | 2020-02-13Lithographic apparatus, lithographic projection apparatus and device manufacturing method
#36 | 2020-02-13Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness
#37 | 2019-12-19Metrology apparatus
#38 | 2019-12-12Lithographic apparatus
#39 | 2019-11-21Lithographic apparatus and device manufacturing method
#40 | 2019-10-03Lithographic apparatus and device manufacturing method
#41 | 2019-08-15Lithographic apparatus and device manufacturing method
#42 | 2019-07-11Lithographic apparatus and device manufacturing method
#43 | 2019-06-20Lithographic apparatus
#44 | 2019-06-13Positioning system, method to position, lithographic apparatus and device manufacturing method
#45 | 2019-06-06Lithographic apparatus
#46 | 2019-06-06Projection system and mirror and radiation source for a lithographic apparatus
#47 | 2019-03-14Actuator system and lithographic apparatus
#48 | 2019-02-14Vibration isolator, lithographic apparatus and device manufacturing method
#49 | 2019-01-10Lithographic apparatus and device manufacturing method
#50 | 2018-12-27Lithographic apparatus having an active base frame support
#51 | 2018-11-22Positioning device, lithographic apparatus and device manufacturing method
#52 | 2018-11-15Imprint apparatus with movable stages
#53 | 2018-08-09Lithographic apparatus
#54 | 2018-01-18Lithographic apparatus and device manufacturing method
#55 | 2017-11-30Lithographic apparatus and device manufacturing method
#56 | 2017-07-13Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuator
#57 | 2017-07-13Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method
#58 | 2017-04-13Lithographic apparatus and device manufacturing method
#59 | 2017-01-12Lithographic apparatus and device manufacturing method
#60 | 2016-12-29Multi-stage system, a control method therefor, and a lithographic apparatus
#61 | 2016-11-17Support device, lithographic apparatus and device manufacturing method
#62 | 2016-10-13Lithographic apparatus and device manufacturing method
#63 | 2016-09-29Lithographic apparatus and device manufacturing method
#64 | 2016-04-07Vibration isolator with displacement structure
#65 | 2016-03-17Positioning system, a lithographic apparatus and a method for positional control
#66 | 2016-01-07Lithographic apparatus and device manufacturing method
#67 | 2015-11-26Multi-stage system, a control method therefor, and a lithographic apparatus
#68 | 2015-11-12Projection system and minor and radiation source for a lithographic apparatus
#69 | 2015-09-17Lithographic apparatus and device manufacturing method
#70 | 2015-06-04Substrate table system, lithographic apparatus and substrate table swapping method
#71 | 2015-04-09Lithography apparatus and device manufacturing method
#72 | 2015-04-02Lithographic apparatus
#73 | 2015-03-05Multi-stage system, a control method therefor, and a lithographic apparatus
#74 | 2014-11-20Lithographic apparatus and device manufacturing method
#75 | 2014-10-02Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing Method
#76 | 2014-02-13Arrangement for actuating an element in a microlithographic projection exposure apparatus
#77 | 2012-12-27Lithographic apparatus, method of deforming a substrate table and device manufacturing method
#78 | 2012-11-29Lithographic apparatus comprising a substrate table and a surface substrate actuator
#79 | 2012-11-29Multi-stage system, a control method therefor, and a lithographic apparatus
#80 | 2012-11-01Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid
#81 | 2012-06-21Lithographic apparatus and device manufacturing method
#82 | 2012-06-14Positioning system, lithographic apparatus and device manufacturing method
#83 | 2012-05-24Positioning system, a lithographic apparatus and a method for positional control
#84 | 2012-05-24Controller, lithographic apparatus, method of controlling the position of an object and device manufacturing method
#85 | 2012-05-03Lithographic apparatus for transferring pattern from patterning device onto substrate, and damping method
#86 | 2011-12-29Lithographic apparatus
#87 | 2011-11-24Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap
#88 | 2011-11-17Lithographic apparatus and device manufacturing method involving a member and a fluid opening
#89 | 2011-09-08Lithographic apparatus and method for measuring a position
#90 | 2011-08-25Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus
#91 | 2011-08-11Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing Method
#92 | 2011-07-14Lithographic Apparatus and Device Manufacturing Method
#93 | 2011-07-14Projection system and lithographic apparatus
#94 | 2011-07-14Lithographic apparatus and device manufacturing method
#95 | 2011-07-07Imprint lithographic apparatus and imprint lithographic method
#96 | 2011-06-23Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program product
#97 | 2011-06-23Active mount, lithographic apparatus comprising such active mount and method for tuning such active mount
#98 | 2011-05-05Lithographic method and apparatus
#99 | 2011-04-28Lithographic apparatus and patterning device
#100 | 2011-01-13Imprint lithography apparatus
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