Cambridge
United Kingdom
6
2006-03-02
4
2006-03-28
These are the the leading inventors for applications assigned to Leica Microsystems Lithography Ltd.:
Leica Microsystems Lithography Ltd. based in Cambridge, GB has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Thermal compensation in magnetic field influencing of an electron beam
#2 | 2006-02-14 ✅ Patent 6,998,621 granted on 2006-02-14Cooling of a device for influencing an electron beam
#3 | 2005-04-26 ✅ Patent 6,885,009 granted on 2005-04-26Device for influencing an electron beam
#4 | 2005-04-07Stage for a workpiece
#5 | 2005-03-03 ✅ Patent 7,053,388 granted on 2006-05-30Dual-mode electron beam lithography machine
#6 | 2005-02-17Pattern writing equipment
289861 ⎘