Jena
Germany
5
2010-05-20
The entities that hold a legal rights for patent applications filed by inventor Schubert Gerhard:
Gerhard Schubert from Jena, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Aerostatically guided table system for vacuum application
#2 | 2010-03-11Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application
#3 | 2009-10-15Table guided by aerostatic bearing elements for vacuum application
#4 | 2006-08-31Electrostatic deflection system for corpuscular radiation
#5 | 2005-03-03Dual-mode electron beam lithography machine
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