Minato-ku
Japan
3
2009-03-26
3
2012-01-10
These are the the leading inventors for applications assigned to TOKYO ELECTRON LTD.:
TOKYO ELECTRON LTD. based in Minato-ku, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Substrate transfer apparatus and method for controlling down flow
#2 | 2007-05-17 ✅ Patent 8,063,652 granted on 2011-11-22Probing apparatus and method for adjusting probing apparatus
#3 | 2006-04-13 ✅ Patent 7,926,509 granted on 2011-04-19Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method
291033 ⎘