Osaka
Japan
8
2007-08-23
The entities that hold a legal rights for patent applications filed by inventor Uno Tomio:
Tomio Uno from Osaka, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Gas supply facility of a chamber and a method for an internal pressure control of the chamber for which the facility is employed
#2 | 2006-10-26Differential pressure type flowmeter and differential pressure type flow controller
#3 | 2006-09-21Internal pressure controller of chamber and internal pressure subject-to-control type chamber
#4 | 2006-08-01Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatus
#5 | 2006-04-13Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method
#6 | 2005-11-24Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method
#7 | 2005-11-15Pressure-type flow rate control apparatus
#8 | 2005-02-01Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
4473432 ⎘