Lund
Sweden
2
2022-05-05
2
2024-12-31
These are the the leading inventors for applications assigned to EPILUVAC AB:
EPILUVAC AB based in Lund, SE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Device and method for ensuring planarity of a semiconductor wafer during epitaxial growth
#2 | 2015-01-15 β Patent 10,017,877 granted on 2018-07-10Silicon carbide crystal growth in a CVD reactor using chlorinated chemistry
Also check out EPILUVAC AB's (Lund, Sweden) applicant profile with 2 patent applications submitted.
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