LUND
Sweden
3
2023-08-17
The entities that hold a legal rights for patent applications filed by inventor NILSSON Roger:
Roger NILSSON from LUND, SE has applied for patents for these inventions. The list has both pending applications and granted patents:
DEVICE AND METHOD TO ACHIEVE HOMOGENEOUS GROWTH AND DOPING OF SEMICONDUCTOR WAFERS WITH A DIAMETER GREATER THAN 100 MM
#2 | 2022-05-05Device and method for ensuring planarity of a semiconductor wafer during epitaxial growth
#3 | 2018-01-04CVD REACTOR WITH A MULTI-ZONE HEATED PROCESS CHAMBER
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