Shenyang
China
5
2020-12-03
5
2022-09-06
These are the the leading inventors for applications assigned to PIOTECH CO., LTD.:
PIOTECH CO., LTD. based in Shenyang, CN has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Wafer pedestal with contact array
#2 | 2020-06-04 ✅ Patent 11,562,891 granted on 2023-01-24Method of temperature measurement used in radio-frequency processing apparatus for semiconductor
#3 | 2019-03-28 ✅ Patent 10,410,909 granted on 2019-09-10Waffer pedestal and support structure thereof
#4 | 2018-02-22 ✅ Patent 10,643,882 granted on 2020-05-05Ceramic ring with a ladder structure
#5 | 2017-09-21 ✅ Patent 10,497,591 granted on 2019-12-03Load lock chamber and the cluster tool system using the same
Also check out PIOTECH CO., LTD.'s (Shenyang, China) applicant profile with 3 patent applications submitted.
356194 ⎘