Shenyang
China
4
2023-08-31
The entities that hold a legal rights for patent applications filed by inventor Lu Brian:
Brian Lu from Shenyang, CN has applied for patents for these inventions. The list has both pending applications and granted patents:
MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR
#2 | 2021-09-30DOUBLE-SIDED DEPOSITION APPARATUS AND METHOD
#3 | 2020-06-25MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR
#4 | 2017-09-21Load lock chamber and the cluster tool system using the same
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