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Assignee profile:

Lambda Physik AG

City:

Goettingen

Country:

Germany

Published Applications:

23

Last publication date:

2008-04-29

Patent Grants:

23

Last grant date:

2008-04-29

Top Inventors for applications by Lambda Physik AG

These are the the leading inventors for applications assigned to Lambda Physik AG:

Recent patent applications by Lambda Physik AG

Lambda Physik AG based in Goettingen, DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2008-04-29 ✅ Patent 7,366,213 granted on 2008-04-29
US10847071
-

MOPA excimer or molecular fluorine laser system with improved synchronization

 #2 | 2007-05-24 ✅ Patent 7,245,420 granted on 2007-07-17
US20070115535A1
Physics

Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime

 #3 | 2007-01-16 ✅ Patent 7,164,703 granted on 2007-01-16
US10777434
-

Temperature control systems for excimer lasers

 #4 | 2007-01-02 ✅ Patent 7,158,553 granted on 2007-01-02
US10776404
-

Master oscillator/power amplifier excimer laser system with pulse energy and pointing control

 #5 | 2006-08-03 ✅ Patent 7,227,881 granted on 2007-06-05
US20060171439A1
Electricity

Master oscillator—power amplifier excimer laser system

 #6 | 2006-07-18 ✅ Patent 7,079,565 granted on 2006-07-18
US10727718
-

Systems and methods utilizing laser discharge electrodes with ceramic spoilers

 #7 | 2006-07-11 ✅ Patent 7,075,963 granted on 2006-07-11
US9771366
-

Tunable laser with stabilized grating

 #8 | 2006-03-16 ✅ Patent 7,266,137 granted on 2007-09-04
US20060056478A1
Physics

Laser gas replenishment method

 #9 | 2006-02-28 ✅ Patent 7,006,541 granted on 2006-02-28
US10354945
-

Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp

 #10 | 2006-02-14 ✅ Patent 6,998,620 granted on 2006-02-14
US10218690
-

Stable energy detector for extreme ultraviolet radiation detection

 #11 | 2006-01-31 ✅ Patent 6,993,052 granted on 2006-01-31
US10441768
-

System and method for delay compensation for a pulsed laser

 #12 | 2006-01-17 ✅ Patent 6,987,790 granted on 2006-01-17
US10776137
-

Excimer or molecular fluorine laser with several discharge chambers

 #13 | 2005-11-29 ✅ Patent 6,970,492 granted on 2005-11-29
US10438240
-

DUV and VUV laser with on-line pulse energy monitor

 #14 | 2005-11-15 ✅ Patent 6,965,624 granted on 2005-11-15
US10338779
-

Laser gas replenishment method

 #15 | 2005-08-04 ✅ Patent 6,999,492 granted on 2006-02-14
US20050169341A1
Electricity

Reduced-maintenance excimer laser with oil-free solid state pulser

 #16 | 2005-06-14 ✅ Patent 6,907,058 granted on 2005-06-14
US9771013
-

Energy monitor for molecular fluorine laser

 #17 | 2005-05-24 ✅ Patent 6,898,216 granted on 2005-05-24
US9574921
-

Reduction of laser speckle in photolithography by controlled disruption of spatial coherence of laser beam

 #18 | 2005-03-15 ✅ Patent 6,868,106 granted on 2005-03-15
US10001954
-

Resonator optics for high power UV lasers

 #19 | 2005-03-01 ✅ Patent 6,862,307 granted on 2005-03-01
US9858147
-

Electrical excitation circuit for a pulsed gas laser

 #20 | 2005-02-15 ✅ Patent 6,856,638 granted on 2005-02-15
US10035351
-

Resonator arrangement for bandwidth control

 #21 | 2005-02-10 ✅ Patent 7,308,013 granted on 2007-12-11
US20050031004A1
Electricity

Excimer or molecular fluorine laser system with precision timing

 #22 | 2005-01-25 ✅ Patent 6,847,671 granted on 2005-01-25
US9823298
-

Blower for gas laser

 #23 | 2005-01-04 ✅ Patent 6,839,375 granted on 2005-01-04
US10236036
-

On-line quality control of the key optical components in lithography lasers using laser induced fluorescence
AssigneeID:

362564 ⎘