Austin, Texas
United States
18
2010-01-07
18
2010-02-16
These are the the leading inventors for applications assigned to MetroSol, Inc.:
MetroSol, Inc. based in Austin, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Contamination monitoring and control techniques for use with an optical metrology instrument
#2 | 2008-08-28 ✅ Patent 7,579,601 granted on 2009-08-25Spectrometer with moveable detector element
#3 | 2008-08-28 ✅ Patent 7,684,037 granted on 2010-03-23Spectrometer with collimated input light
#4 | 2008-08-28 ✅ Patent 7,485,869 granted on 2009-02-03Prism spectrometer
#5 | 2008-03-27 ✅ Patent 7,622,310 granted on 2009-11-24Contamination monitoring and control techniques for use with an optical metrology instrument
#6 | 2008-03-11 ✅ Patent 7,342,235 granted on 2008-03-11Contamination monitoring and control techniques for use with an optical metrology instrument
#7 | 2008-02-21 ✅ Patent 7,391,030 granted on 2008-06-24Broad band referencing reflectometer
#8 | 2007-09-20 ✅ Patent 7,663,097 granted on 2010-02-16Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
#9 | 2007-08-09 ✅ Patent 7,399,975 granted on 2008-07-15Method and apparatus for performing highly accurate thin film measurements
#10 | 2007-08-09 ✅ Patent 7,511,265 granted on 2009-03-31Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
#11 | 2007-08-09 ✅ Patent 7,282,703 granted on 2007-10-16Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
#12 | 2007-02-08 ✅ Patent 7,446,876 granted on 2008-11-04Vacuum ultra-violet reflectometer with stray light correction
#13 | 2006-09-21 ✅ Patent 7,189,973 granted on 2007-03-13Vacuum ultraviolet reflectometer integrated with processing system
#14 | 2006-08-31 ✅ Patent 7,271,394 granted on 2007-09-18Vacuum ultraviolet reflectometer having collimated beam
#15 | 2005-01-13 ✅ Patent 7,126,131 granted on 2006-10-24Broad band referencing reflectometer
#16 | 2005-01-06 ✅ Patent 7,394,551 granted on 2008-07-01Vacuum ultraviolet referencing reflectometer
#17 | 2005-01-06 ✅ Patent 7,026,626 granted on 2006-04-11Semiconductor processing techniques utilizing vacuum ultraviolet reflectometer
#18 | 2005-01-06 ✅ Patent 7,067,818 granted on 2006-06-27Vacuum ultraviolet reflectometer system and method
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