Phoeniz, Arizona
United States
2
2007-12-20
2
2009-12-01
These are the the leading inventors for applications assigned to ASM NuTool, Inc.:
ASM NuTool, Inc. based in Phoeniz, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Filling deep features with conductors in semiconductor manufacturing
#2 | 2006-03-23 ✅ Patent 7,097,538 granted on 2006-08-29Advanced chemical mechanical polishing system with smart endpoint detection
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