Japan
8
2014-04-17
8
2014-10-07
These are the the leading inventors for applications assigned to Sokudo Co., Ltd.:
Sokudo Co., Ltd. based in , JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Substrate processing method
#2 | 2012-08-23 ✅ Patent 8,781,308 granted on 2014-07-15Apparatus for and method of heat-treating film formed on surface of substrate
#3 | 2011-09-29 ✅ Patent 8,635,968 granted on 2014-01-28Substrate processing apparatus and substrate processing method
#4 | 2011-09-15 ✅ Patent 8,827,621 granted on 2014-09-09Substrate processing apparatus, storage device, and method of transporting substrate storing container
#5 | 2011-06-09 ✅ Patent 8,580,340 granted on 2013-11-12Substrate processing apparatus and substrate processing method
#6 | 2011-03-17 ✅ Patent 8,477,301 granted on 2013-07-02Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus
#7 | 2010-09-23 ✅ Patent 8,631,809 granted on 2014-01-21Substrate processing apparatus
#8 | 2006-06-22 ✅ Patent 7,371,022 granted on 2008-05-13Developer endpoint detection in a track lithography system
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