Kyoto
Japan
24
2016-07-14
The entities that hold a legal rights for patent applications filed by inventor Hamada Tetsuya:
Tetsuya Hamada from Kyoto, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE PROCESSING METHOD
#2 | 2015-03-26Substrate processing method
#3 | 2014-04-17Substrate processing method
#4 | 2010-09-23Substrate processing apparatus
#5 | 2010-08-12SUBSTRATE PROCESSING APPARATUS
#6 | 2010-05-27Apparatus for and method of processing substrate subjected to exposure process
#7 | 2010-03-25Substrate processing apparatus
#8 | 2009-05-14Temperature measurement in a substrate processing apparatus
#9 | 2008-06-19SUBSTRATE FOR TEMPERATURE MEASUREMENT AND TEMPERATURE MEASURING SYSTEM
#10 | 2007-12-20Managing apparatus for substrate processing system
#11 | 2007-12-20Substrate Processing System Managing Apparatus Information of Substrate Processing Apparatus
#12 | 2007-10-09Substrate processing system managing apparatus information of substrate processing apparatus
#13 | 2007-08-16SUBSTRATE PROCESSING APPARATUS
#14 | 2007-08-02SUBSTRATE PROCESSING SYSTEM CAPABLE OF MONITORING OPERATION OF SUBSTRATE PROCESSING APPARATUS
#15 | 2007-08-02Substrate processing apparatus
#16 | 2007-07-26Substrate processing apparatus
#17 | 2007-07-19Substrate processing apparatus
#18 | 2007-04-05Apparatus for and method of processing substrate subjected to exposure process
#19 | 2007-03-15APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE SUBJECTED TO EXPOSURE PROCESS
#20 | 2006-11-02Substrate processing apparatus
#21 | 2006-10-26Substrate processing system managing apparatus information of substrate processing apparatus
#22 | 2006-09-14Substrate processing system managing apparatus information of substrate processing apparatus
#23 | 2006-06-08Substrate processing apparatus
#24 | 2006-05-16Substrate processing system managing apparatus information of substrate processing apparatus
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