Japan
6
2019-11-14
6
2020-10-20
These are the the leading inventors for applications assigned to ULVAC, Inc.:
ULVAC, Inc. based in , JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Composition control of chemical vapor deposition nitrogen doped germanium antimony tellurium
#2 | 2019-05-02 ✅ Patent 10,529,815 granted on 2020-01-07Conformal replacement gate electrode for short channel devices
#3 | 2014-10-02 ✅ Patent 9,310,524 granted on 2016-04-12Film deposition apparatus and film deposition method
#4 | 2010-05-13 ✅ Patent 8,571,704 granted on 2013-10-29Substrate transfer apparatus
#5 | 2006-07-27 ✅ Patent 7,611,754 granted on 2009-11-03Industrial microdeposition system including masking to reduce the impact of droplet alignment and droplet volume tolerances and errors
#6 | 2005-07-07 ✅ Patent 7,392,760 granted on 2008-07-01Microwave-excited plasma processing apparatus
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