Japan
5
2013-08-29
5
2016-02-09
These are the the leading inventors for applications assigned to JSR Corporation:
JSR Corporation based in , JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Charged particle beam apparatus, thin film forming method, defect correction method and device forming method
#2 | 2011-02-24 ✅ Patent 8,168,109 granted on 2012-05-01Stabilizers for vinyl ether resist formulations for imprint lithography
#3 | 2010-08-12 ✅ Patent 8,168,691 granted on 2012-05-01Vinyl ether resist formulations for imprint lithography and processes of use
#4 | 2008-01-10 ✅ Patent 7,679,385 granted on 2010-03-16Probe card for inspecting electric properties of an object
#5 | 2007-05-29 ✅ Patent 7,223,802 granted on 2007-05-29High order silane composition, and method of forming silicon film using the composition
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