GIGAPHOTON INC

CHAMBER APPARATUS FOR LASER, LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#2 | 2026-06-18

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LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#3 | 2026-06-11

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TRAINING DATA CREATION METHOD, MACHINE LEARNING METHOD, CONSUMABLE MANAGEMENT DEVICE, AND COMPUTER READABLE MEDIUM

#4 | 2026-06-11

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LASER PROCESSING APPARATUS AND METHOD FOR PROCESSING WORKPIECE

#5 | 2026-05-28

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LASER CHAMBER, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#6 | 2026-05-21

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LASER APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

#7 | 2026-05-14

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PROCESSING METHOD OF TARGET SUPPLY DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#8 | 2026-05-07

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LASER PROCESSING APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#9 | 2026-05-07

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LASER PROCESSING APPARATUS, CONTROL METHOD OF LASER PROCESSING APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#10 | 2026-04-30

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EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#11 | 2026-04-30

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#12 | 2026-04-16

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EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#13 | 2026-04-16

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CHAMBER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#14 | 2026-03-12

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LASER SYSTEM AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

#15 | 2026-03-05

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GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#16 | 2026-02-26

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EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#17 | 2026-02-26

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LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#18 | 2026-02-12

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WAVELENGTH CONVERSION DEVICE

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SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE

#20 | 2026-02-05

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TARGET GENERATION DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#21 | 2026-01-22

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EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, CONTROL METHOD OF EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#22 | 2026-01-22

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EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#23 | 2026-01-15

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MAINTENANCE METHOD

#24 | 2026-01-08

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LASER CHAMBER, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#25 | 2026-01-01

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PULSE WIDTH EXTENSION SYSTEM, LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#26 | 2025-12-25

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LASER AMPLIFIER, LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#27 | 2025-12-25

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EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#28 | 2025-12-18

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LASER PROCESSING SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD

#29 | 2025-12-04

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LASER DEVICE, LASER CONTROL METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#30 | 2025-11-27

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GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#31 | 2025-11-27

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LASER CHAMBER APPARATUS, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#32 | 2025-11-27

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GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#33 | 2025-11-27

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#34 | 2025-11-20

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LASER SYSTEM, LASER PROCESSING METHOD, AND INTERPOSER MANUFACTURING METHOD

#35 | 2025-11-20

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GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#36 | 2025-11-20

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EDGE POSITION DETERMINATION METHOD, EDGE POSITION DETERMINATION APPARATUS, AND EDGE ANALYSIS METHOD

#37 | 2025-11-06

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PERFORMANCE ESTIMATION METHOD, AND TRAINING METHOD

#38 | 2025-11-06

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DETERIORATION ESTIMATION METHOD, LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#39 | 2025-10-30

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LASER CHAMBER, DISCHARGE ELECTRODE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#40 | 2025-10-30

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CHAMBER DEVICE OF GAS LASER APPARATUS, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#41 | 2025-10-30

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LASER CHAMBER DEVICE, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#42 | 2025-10-30

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DISPLAY METHOD AND DISPLAY APPARATUS

#43 | 2025-10-30

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PERFORMANCE ESTIMATION METHOD, AND TRAINING METHOD

#44 | 2025-10-23

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CHAMBER APPARATUS FOR LASER, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#45 | 2025-10-02

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#46 | 2025-10-02

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#47 | 2025-10-02

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GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#48 | 2025-10-02

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SPECTRUM MEASUREMENT INSTRUMENT, LASER DEVICE, AND METHOD OF IDENTIFYING PEAK POSITION OF REFERENCE LIGHT

#49 | 2025-09-25

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SOLID TARGET SUBSTANCE REPLENISHMENT DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#50 | 2025-09-25

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DISCHARGE CHAMBER FOR GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#51 | 2025-09-18

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CHAMBER APPARATUS FOR LASER, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#52 | 2025-09-18

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LASER MANAGEMENT SERVER AND LASER MANAGEMENT METHOD

#53 | 2025-09-11

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#54 | 2025-09-04

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LASER CHAMBER, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#55 | 2025-08-28

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SOLID TARGET SUBSTANCE REPLENISHMENT DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#56 | 2025-08-28

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CONTROLLER, LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#57 | 2025-08-28

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LASER PROCESSING APPARATUS, LASER PROCESSING APPARATUS CONTROL METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#58 | 2025-08-28

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LASER PROCESSING METHOD, LASER PROCESSING APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#59 | 2025-08-21

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GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#60 | 2025-08-21

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EXPOSURE SYSTEM AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

#61 | 2025-08-21

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LASER SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD

#62 | 2025-08-21

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OUTPUT MIRROR FOR ULTRAVIOLET LASER BEAM, ULTRAVIOLET LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#63 | 2025-08-14

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LASER PROCESSING SYSTEM, LASER PROCESSING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

#64 | 2025-07-31

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DOUBLE-ENDED EXCITATION LASER AMPLIFIER AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

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LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#66 | 2025-07-31

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LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#67 | 2025-07-24

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LASER PROCESSING APPARATUS, LASER PROCESSING SYSTEM, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES

#68 | 2025-07-17

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EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

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EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD

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LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#71 | 2025-07-17

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GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#72 | 2025-07-17

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DISCHARGE ELECTRODE, MANUFACTURING METHOD FOR DISCHARGE ELECTRODE, AND MANUFACTURING METHOD FOR ELECTRONIC DEVICE

#73 | 2025-07-17

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CHAMBER OF GAS LASER APPARATUS, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#74 | 2025-06-26

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LASER CHAMBER, GAS LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES

#75 | 2025-06-26

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METHOD FOR MANUFACTURING OPTICAL MODULE, METHOD FOR MANUFACTURING GAS LASER DEVICE, AND MANUFACTURING JIG FOR OPTICAL MODULE

#76 | 2025-06-26

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LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

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LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#78 | 2025-06-26

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WAVELENGTH CONVERSION SYSTEM, SOLID-STATE LASER SYSTEM, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#79 | 2025-06-19

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LASER PROCESSING SYSTEM AND LASER PROCESSING METHOD

#80 | 2025-06-19

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LASER PROCESSING METHOD AND LASER PROCESSING SYSTEM

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EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#82 | 2025-06-12

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LASER PROCESSING SYSTEM, LASER PROCESSING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#83 | 2025-06-05

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LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#84 | 2025-06-05

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GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

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LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

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PERFORMANCE RECOVERY METHOD FOR EUV LIGHT GENERATION SYSTEM, EUV LIGHT GENERATION SYSTEM, AND PROCESSOR

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LINE NARROWING LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

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EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#89 | 2025-05-22

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LASER PROCESSING METHOD, LASER PROCESSING APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#90 | 2025-05-15

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PROFILE DISPLAY DEVICE, LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

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LINE NARROWING DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

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LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#93 | 2025-05-01 ✅ Patent 12,656,695 granted on 2026-06-16

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ELECTRIC COMPONENT BOX AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

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CHAMBER, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND ELECTRONIC DEVICE MANUFACTURING METHOD

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EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

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OPTICAL PULSE STRETCHER, LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

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CHAMBER FOR GAS LASER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

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