Oyama
Japan
10
2024-04-18
The entities that hold a legal rights for patent applications filed by inventor Nishimura Yuichi:
Yuichi Nishimura from Oyama, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
#2 | 2024-01-18EUV LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD
#3 | 2022-07-21Extreme ultraviolet light generation system and electronic device manufacturing method
#4 | 2021-12-30Extreme ultraviolet light generation system and electronic device manufacturing method
#5 | 2020-12-17Extreme ultraviolet light generation system, laser beam size controlling method, and electronic device manufacturing method
#6 | 2019-11-28Extreme ultraviolet (EUV) light generating apparatus and control method for centroid of EUV light
#7 | 2018-12-06Extreme ultraviolet light generating apparatus
#8 | 2018-11-29Extreme ultraviolet light generating apparatus and control method for centroid of extreme ultraviolet light
#9 | 2018-10-04Extreme ultraviolet light generation device
#10 | 2018-08-16Extreme ultraviolet light generating apparatus
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