Tokyo Electron Limitetd

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2009-03-26

Patent Grants:

Last grant date:

2011-05-31

Top Inventors for applications by Tokyo Electron Limitetd

These are the the leading inventors for applications assigned to Tokyo Electron Limitetd:

Toshihiko Takahashi 1 Nirasaki, Japan
Tatsuya Yamaguchi 1 Nirasaki-Shi, Japan
Wenling Wang 1 Nirasaki-shi, Japan
Masato Yonezawa 1 Nirasaki, Japan

Wenling Wang 1 Nirasaki, Japan
Tatsuya Yamaguchi 1 Nirasaki, Japan
Toshihiko Takahashi 1 Nirasaki-shi, Japan
Yuichi Takenaga 1 Nirasaki, Japan

Masato Yonezawa 1 Nirasaki-shi, Japan
Yuichi Takenaga 1 Nirasaki-shi, Japan

Recent patent applications by Tokyo Electron Limitetd

Tokyo Electron Limitetd based in Tokyo, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2009-03-26 ✅ Patent 7,953,512 granted on 2011-05-31

US20090078197A1

Electricity

Substrate processing system, control method for substrate processing apparatus and program stored on medium

AssigneeID:

440010 ⎘