Nirasaki
Japan
6
2009-09-17
The entities that hold a legal rights for patent applications filed by inventor Wang Wenling:
Wenling Wang from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Thermal processing apparatus, method for regulating temperature of thermal processing apparatus, and program
#2 | 2009-05-07Processing system, processing method, and computer program
#3 | 2009-03-26Substrate processing system, control method for substrate processing apparatus and program stored on medium
#4 | 2008-10-16Heat processing apparatus, method of automatically tuning control constants, and storage medium
#5 | 2008-09-04Heat system, heat method, and program
#6 | 2007-12-06Information processing apparatus, semiconductor manufacturing system, information processing method, and storage medium
6208103 ⎘