Anaheim, California
United States
7
2010-12-23
7
2012-01-10
These are the the leading inventors for applications assigned to Advanced Thermal Sciences Corporation:
Advanced Thermal Sciences Corporation based in Anaheim, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes
#2 | 2007-05-03 ✅ Patent 8,034,180 granted on 2011-10-11Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor
#3 | 2007-04-26 ✅ Patent 8,021,521 granted on 2011-09-20Method for agile workpiece temperature control in a plasma reactor using a thermal model
#4 | 2007-04-26 ✅ Patent 8,012,304 granted on 2011-09-06Plasma reactor with a multiple zone thermal control feed forward control apparatus
#5 | 2007-04-12 ✅ Patent 7,988,872 granted on 2011-08-02Method of operating a capacitively coupled plasma reactor with dual temperature control loops
#6 | 2007-04-12 ✅ Patent 8,092,638 granted on 2012-01-10Capacitively coupled plasma reactor having a cooled/heated wafer support with uniform temperature distribution
#7 | 2007-04-12 ✅ Patent 8,157,951 granted on 2012-04-17Capacitively coupled plasma reactor having very agile wafer temperature control
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