Japan
30
2018-02-15
30
2018-08-14
These are the the leading inventors for applications assigned to SCREEN Semiconductor Solutions Co., Ltd.:
SCREEN Semiconductor Solutions Co., Ltd. based in , JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Substrate processing apparatus and substrate processing method
#2 | 2017-04-20 ✅ Patent 10,201,824 granted on 2019-02-12Substrate processing apparatus and substrate processing method
#3 | 2017-01-12 ✅ Patent 10,216,099 granted on 2019-02-26Substrate processing apparatus
#4 | 2016-10-06 ✅ Patent 9,828,676 granted on 2017-11-28Substrate processing apparatus and substrate processing method
#5 | 2015-10-01 ✅ Patent 10,181,417 granted on 2019-01-15Substrate treating apparatus and substrate transporting method
#6 | 2015-01-15 ✅ Patent 9,436,087 granted on 2016-09-06Substrate processing apparatus with a cleaning processing section for cleaning a chemical liquid processing section
#7 | 2014-11-20 ✅ Patent 9,728,434 granted on 2017-08-08Substrate processing apparatus, storage device, and method of transporting substrate storing container
#8 | 2014-09-25 ✅ Patent 10,109,513 granted on 2018-10-23Substrate treating apparatus
#9 | 2014-07-17 ✅ Patent 9,063,429 granted on 2015-06-23Negative developing method and negative developing apparatus
#10 | 2014-07-17 ✅ Patent 9,685,363 granted on 2017-06-20Alignment device and substrate processing apparatus
#11 | 2014-06-12 ✅ Patent 9,566,598 granted on 2017-02-14Substrate processing apparatus and substrate processing method
#12 | 2014-04-17 ✅ Patent 9,032,977 granted on 2015-05-19Substrate processing method
#13 | 2014-03-13 ✅ Patent 9,606,454 granted on 2017-03-28Substrate processing apparatus and substrate processing system
#14 | 2014-03-06 ✅ Patent 9,465,293 granted on 2016-10-11Substrate processing apparatus and substrate processing method
#15 | 2014-03-06 ✅ Patent 9,233,390 granted on 2016-01-12Processing cup and substrate processing apparatus
#16 | 2014-01-23 ✅ Patent 9,539,607 granted on 2017-01-10Substrate processing apparatus and substrate processing method
#17 | 2014-01-23 ✅ Patent 9,375,748 granted on 2016-06-28Substrate processing apparatus and substrate processing method
#18 | 2013-11-28 ✅ Patent 9,927,760 granted on 2018-03-27Development processing device
#19 | 2013-10-03 ✅ Patent 9,623,450 granted on 2017-04-18Substrate cleaning apparatus for cleaning a lower surface of a substrate
#20 | 2013-10-03 ✅ Patent 9,152,054 granted on 2015-10-06Exposure device, substrate processing apparatus, method for exposing substrate and substrate processing method
#21 | 2013-10-03 ✅ Patent 9,460,941 granted on 2016-10-04Substrate cleaning apparatus and substrate processing apparatus including the substrate cleaning apparatus
#22 | 2013-05-30 ✅ Patent 10,160,012 granted on 2018-12-25Cup and substrate processing apparatus
#23 | 2013-04-11 ✅ Patent 9,343,339 granted on 2016-05-17Coating method and coating apparatus
#24 | 2013-04-11 ✅ Patent 9,553,007 granted on 2017-01-24Coating method and coating apparatus
#25 | 2013-04-04 ✅ Patent 9,508,573 granted on 2016-11-29Substrate processing apparatus and substrate processing method
#26 | 2012-10-04 ✅ Patent 9,494,877 granted on 2016-11-15Substrate processing apparatus
#27 | 2012-04-19 ✅ Patent 9,064,914 granted on 2015-06-23Method of and apparatus for heat-treating exposed substrate
#28 | 2012-02-09 ✅ Patent 8,985,937 granted on 2015-03-24Stocker apparatus and substrate treating apparatus
#29 | 2012-01-12 ✅ Patent 9,028,621 granted on 2015-05-12Substrate cleaning method and substrate cleaning device
#30 | 2010-06-24 ✅ Patent 8,941,809 granted on 2015-01-27Substrate processing apparatus and substrate processing method
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