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Assignee profile:

NuFlare Technology, Inc.

City:

Yokohama

Country:

Japan

Published Applications:

270

Last publication date:

2025-02-18

Patent Grants:

265

Last grant date:

2025-02-18

Quarterly NuFlare Technology, Inc. Patent Applications

Top Inventors for applications by NuFlare Technology, Inc.

These are the the leading inventors for applications assigned to NuFlare Technology, Inc.:

Hiroshi MATSUMOTO 22 Yokohama, Japan
Riki OGAWA 18 Kanagawa, Japan
Hiroshi MATSUMOTO 15 Yokohama-shi, Japan
Hiroshi MATSUMOTO 12 Kanagawa, Japan

Munehiro OGASAWARA 11 Hiratsuka, Japan
Kenichi YASUI 11 Kawasaki, Japan
Riki Ogawa 10 Kawasaki, Japan
Hirofumi MORITA 10 Setagaya-ku, Japan

Haruyuki NOMURA 10 Yokohama, Japan
Yasuo KATO 10 Yokohama, Japan
Kazuhiko Inoue 10 Yokohama, Japan
Kazuhiko INOUE 10 Yokohama-shi, Japan

Riki OGAWA 9 Kawasaki-shi, Japan
Atsushi ANDO 9 Edogawa-ku, Japan
Munehiro Ogasawara 9 Kanagawa, Japan
Kenichi YASUI 8 Kawasaki-shi, Japan

Munehiro OGASAWARA 8 Hiratsuka-shi, Japan
Hideo Tsuchiya 8 Tokyo, Japan
Haruyuki NOMURA 8 Yokohama-shi, Japan
Yasuo KATO 7 Yokohama-shi, Japan

Takanao TOUYA 7 Kanagawa, Japan
Ikunao Isomura 7 Kanagawa, Japan
Ryoichi Yoshikawa 7 Kanagawa, Japan
Masataka Shiratsuchi 7 Kawasaki, Japan

Yasuo Kato 7 Kanagawa, Japan
Takahito NAKAYAMA 6 Chigasaki, Japan
Masataka Shiratsuchi 6 Kawasaki-shi, Japan
Noriaki NAKAYAMADA 6 Kamakura, Japan

Osamu IIZUKA 6 Yokohama, Japan
Nobutaka KIKUIRI 6 Kanagawa, Japan
Ryoichi HIRANO 6 Setagaya-ku, Japan
Hiromu INOUE 5 Yokohama-shi, Japan

Shinji SUGIHARA 5 Ota-ku, Japan
Hideaki HASHIMOTO 5 Yokohama, Japan
Hiromu Inoue 5 Yokohama, Japan
Noriaki Nakayamada 5 Kamakura-shi, Japan

Hiromu Inoue 5 Kanagawa, Japan
Hideo Inoue 5 Kanagawa, Japan
Takanao Touya 5 Kawasaki, Japan
Takanao Touya 5 Kawasaki-shi, Japan

Osamu IIZUKA 5 Yokohama-shi, Japan
Noriaki NAKAYAMADA 4 Yokohama-shi, Japan
Noriaki Nakayamada 4 Yokohama, Japan
Takahito NAKAYAMA 4 Chigasaki-shi, Japan

Kota Iwasaki 4 Atsugi, Japan
Chosaku Noda 4 Yokohama, Japan
Kota Iwasaki 4 Atsugi-shi, Japan
Taku YAMADA 4 Ayase-shi, Japan

Hiroshi YAMASHITA 4 Sagamihara, Japan
Kenichi YASUI 4 Yokohama, Japan
Hideaki HASHIMOTO 4 Yokohama-shi, Japan
Takahito NAKAYAMA 4 Shizuoka, Japan

Taku Yamada 4 Ayase, Japan
Mitsuhiro OKAZAWA 4 Yokohama, Japan
Hideaki HASHIMOTO 4 Kanagawa, Japan
Tomohiro Iijima 4 Shizuoka, Japan

Ryoh KAWANA 4 Yokohama, Japan
Nobuo MIYAMOTO 4 Yokohama, Japan
Kiminobu Akeno 3 Yokohama, Japan
Takumi YAMADA 3 Kanagawa, Japan

Hironobu MATSUMOTO 3 Kanagawa, Japan
Tomoo MOTOSUGI 3 Kanagawa, Japan
Yasuhiro Yamashita 3 Yokohama, Japan
Mitsuhiro Okazawa 3 Yokohama-shi, Japan

Koichi Ishii 3 Kawasaki, Japan
Hirofumi MORITA 3 Yokohama-shi, Japan
Tsubasa NANAO 3 Yokohama, Japan
Masaya TAKEDA 3 Yokohama, Japan

Kiminobu Akeno 3 Yokohama-shi, Japan
Yasuhiro YAMASHITA 3 Yokohama-shi, Japan
Masatoshi HIRONO 3 Kanagawa, Japan
Hideo TSUCHIYA 3 Setagaya-ku, Japan

Ryoh KAWANA 3 Yokohama-shi, Japan
Ryoichi HIRANO 3 Tokyo, Japan
Chosaku NODA 3 Yokohama-shi, Japan
Koichi Ishii 3 Kawasaki-Shi, Japan

Kenichi YASUI 3 Yokohama-shi, Japan
Kazuhiro NAKASHIMA 3 Kawasaki, Japan
Kazuhiro NAKASHIMA 3 Kawasaki-shi, Japan
Tsubasa NANAO 3 Yokohama-shi, Japan

Takafumi INOUE 3 Kanagawa, Japan
Hirofumi Morita 3 Yokohama, Japan
John HARTLEY 3 Stormville, NY United States
Hideki ITO 3 Yokohama, Japan

Jun Yashima 3 Kanagawa, Japan
Yuusuke Sato 3 Tokyo, Japan
Satoshi NAKAHASHI 2 Yokohama, Japan
Kenji OHTOSHI 2 Kanagawa, Japan

Hidekazu Takekoshi 2 Fujisawa-shi, Japan
TOSHIKATSU AKIBA 2 KISARAZU, Japan
Michihiro KAWAGUCHI 2 Mishima, Japan
Ryoichi KAKEHI 2 Yokohama, Japan

Yuji ABE 2 Yokohama-shi, Japan
Keisuke Goto 2 Kamakura-shi, Japan
Taku YAMADA 2 Yokohama-shi, Japan
Takahiro Murata 2 Zushi, Japan

Ryoichi YOSHIKAWA 2 Kawasaki, Japan
Yasutaka Sato 2 Hachioji, Japan
Kaoru TSURUTA 2 Kanagawa, Japan
Takayuki OHNISHI 2 Kanagawa, Japan

Recent patent applications by NuFlare Technology, Inc.

NuFlare Technology, Inc. based in Yokohama, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2025-02-18 ✅ Patent 12,230,472 granted on 2025-02-18

US18772999

Electricity

Effective temperature calculation method for multi-charged particle beam writing region, multi-charged particle beam writing apparatus, multi-charged particle beam writing method, and recording medium recording program

#2 | 2025-01-09 ✅ Patent 12,626,428 granted on 2026-05-12

US20250014239A1

Physics

DRAWING DATA EXAMINATION METHOD, DRAWING METHOD, DRAWING APPARATUS, AND NON-TRANSITORY STORAGE MEDIUM

#3 | 2024-08-22 ✅ Patent 12,613,195 granted on 2026-04-28

US20240280500A1

Physics

ADJUSTMENT METHOD OF INSPECTION APPARATUS FOCUS POSITION, AND PATTERN INSPECTION APPARATUS

#4 | 2024-08-08 ✅ Patent 12,373,939 granted on 2025-07-29

US20240265524A1

Physics

DEFECT INSPECTION METHOD

#5 | 2024-08-01 ✅ Patent 12,541,838 granted on 2026-02-03

US20240257300A1

Physics

INSPECTION APPARATUS AND REFERENCE IMAGE GENERATION METHOD

#6 | 2024-07-18 ✅ Patent 12,626,886 granted on 2026-05-12

US20240242933A1

Electricity

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

#7 | 2024-07-18 ✅ Patent 12,482,630 granted on 2025-11-25

US20240242931A1

Electricity

MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, MULTIPLE CHARGED PARTICLE BEAM WRITING METHOD, AND COMPUTER READABLE RECORDING MEDIA STORING PROGRAM

#8 | 2024-07-18 ✅ Patent 12,580,148 granted on 2026-03-17

US20240242922A1

Electricity

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

#9 | 2024-06-06 ✅ Patent 12,620,545 granted on 2026-05-05

US20240186100A1

Electricity

BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

#10 | 2024-03-21 ✅ Patent 12,573,585 granted on 2026-03-10

US20240096590A1

Electricity

CHARGED PARTICLE BEAM WRITING APPARATUS, CHARGED PARTICLE BEAM WRITING METHOD, AND PHASE DIFFERENCE PLATE ADJUSTMENT METHOD

#11 | 2024-02-29 ✅ Patent 12,537,160 granted on 2026-01-27

US20240071714A1

Electricity

BEAM DETECTOR, MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS, AND BEAM DETECTOR ADJUSTMENT METHOD

#12 | 2024-02-15 ✅ Patent 12,518,374 granted on 2026-01-06

US20240054633A1

Physics

DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD

#13 | 2024-01-11 ✅ Patent 12,640,331 granted on 2026-05-26

US20240013999A1

Electricity

MOUNTING SUBSTRATE, BLANKING APERTURE ARRAY CHIP, BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS

#14 | 2023-12-28 ✅ Patent 12,512,297 granted on 2025-12-30

US20230420217A1

Electricity

MULTIPLE CHARGED PARTICLE BEAM WRITING METHOD AND MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS

#15 | 2023-11-16 ✅ Patent 12,488,959 granted on 2025-12-02

US20230369015A1

Electricity

COVERAGE CALCULATING METHOD, CHARGED PARTICLE BEAM WRITING METHOD, COVERAGE CALCULATING DEVICE, CHARGED PARTICLE BEAM WRITING APPARATUS, AND COMPUTER-READABLE STORAGE MEDIUM

#16 | 2023-09-14 ✅ Patent 12,456,601 granted on 2025-10-28

US20230290608A1

Electricity

CHARGED PARTICLE BEAM WRITING METHOD, CHARGED PARTICLE BEAM WRITING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM

#17 | 2023-08-17 ✅ Patent 12,406,828 granted on 2025-09-02

US20230260749A1

Electricity

OPTICAL SYSTEM ADJUSTMENT METHOD FOR MULTI CHARGED PARTICLE BEAM APPARATUS AND COMPUTER READABLE RECORDING MEDIUM

#18 | 2023-08-17 ✅ Patent 12,417,896 granted on 2025-09-16

US20230260748A1

Electricity

MULTI-ELECTRON BEAM WRITING APPARATUS AND MULTI-ELECTRON BEAM WRITING METHOD

#19 | 2023-06-15 ✅ Patent 12,537,163 granted on 2026-01-27

US20230187172A1

Electricity

MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI-CHARGED PARTICLE BEAM WRITING METHOD

#20 | 2023-05-11 ✅ Patent 12,525,425 granted on 2026-01-13

US20230145411A1

Electricity

PATTERN INSPECTION APPARATUS, AND METHOD FOR ACQUIRING ALIGNMENT AMOUNT BETWEEN OUTLINES

#21 | 2023-05-04 ✅ Patent 12,135,295 granted on 2024-11-05

US20230137226A1

Physics

Inspection apparatus and focal position adjustment method

#22 | 2023-04-27 ✅ Patent 12,106,928 granted on 2024-10-01

US20230132046A1

Electricity

Cathode mechanism of electron emission source, and method for manufacturing cathode mechanism of electron emission source

#23 | 2023-04-13 ✅ Patent 12,261,015 granted on 2025-03-25

US20230113062A1

Electricity

Electron beam inspection apparatus

#24 | 2023-04-06 ✅ Patent 12,249,483 granted on 2025-03-11

US20230107036A1

Electricity

Charged particle beam writing method and charged particle beam writing apparatus

#25 | 2023-03-30 ✅ Patent 12,658,405 granted on 2026-06-16

US20230102923A1

Electricity

CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRITING APPARATUS

#26 | 2023-03-30 ✅ Patent 12,400,825 granted on 2025-08-26

US20230102715A1

Electricity

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, MULTI-ELECTRON BEAM INSPECTION APPARATUS, AND MULTI-ELECTRON BEAM IMAGE ACQUISITION METHOD

#27 | 2023-03-30 ✅ Patent 12,412,730 granted on 2025-09-09

US20230095091A1

Electricity

MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI-CHARGED PARTICLE BEAM WRITING METHOD

#28 | 2023-03-23 ✅ Patent 12,308,202 granted on 2025-05-20

US20230091222A1

Electricity

Multi-electron beam inspection apparatus, multipole array control method, and multi-electron beam inspection method

#29 | 2023-03-23 ✅ Patent 12,354,831 granted on 2025-07-08

US20230088951A1

Electricity

PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD

#30 | 2023-03-16 ✅ Patent 11,901,156 granted on 2024-02-13

US20230081240A1

Electricity

Multi-charged-particle-beam writing apparatus and multi-charged-particle-beam writing method

#31 | 2023-03-16 ✅ Patent 12,046,447 granted on 2024-07-23

US20230078311A1

Electricity

Multi-charged-particle-beam writing method, multi-charged-particle-beam writing apparatus, and computer-readable recording medium

#32 | 2023-02-23 ✅ Patent 12,087,543 granted on 2024-09-10

US20230056463A1

Electricity

Multi-charged particle beam writing apparatus, and multi-charged particle beam writing method

#33 | 2023-02-23 ✅ Patent 12,592,360 granted on 2026-03-31

US20230055778A1

Electricity

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

#34 | 2023-02-16 ✅ Patent 11,942,305 granted on 2024-03-26

US20230053272A1

Electricity

Data generation method, charged particle beam irradiation device, and computer-readable recording medium

#35 | 2023-02-02 ✅ Patent 12,640,341 granted on 2026-05-26

US20230029715A1

Electricity

CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRITING APPARATUS

#36 | 2023-01-26 ✅ Patent 12,288,669 granted on 2025-04-29

US20230028337A1

Electricity

Method and apparatus for detecting discharge site

#37 | 2023-01-19 ✅ Patent 12,579,635 granted on 2026-03-17

US20230018318A1

Physics

PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD

#38 | 2023-01-12 ✅ Patent 12,105,026 granted on 2024-10-01

US20230009656A1

Physics

Image acquisition method and image acquisition apparatus

#39 | 2023-01-05 ✅ Patent 11,804,360 granted on 2023-10-31

US20230005711A1

Electricity

Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatus

#40 | 2022-12-15 ✅ Patent 11,908,659 granted on 2024-02-20

US20220399181A1

Electricity

Multi charged particle beam writing apparatus

#41 | 2022-12-08 ✅ Patent 11,837,429 granted on 2023-12-05

US20220392731A1

Electricity

Blanking aperture array unit

#42 | 2022-12-01 ✅ Patent 11,804,361 granted on 2023-10-31

US20220384142A1

Electricity

Charged particle beam writing method, charged particle beam writing apparatus, and computer-readable recording medium

#43 | 2022-11-24 ✅ Patent 12,333,781 granted on 2025-06-17

US20220375195A1

Physics

METHOD FOR SEARCHING FOR HOLE PATTERN IN IMAGE, PATTERN INSPECTION METHOD, PATTERN INSPECTION APPARATUS, AND APPARATUS FOR SEARCHING HOLE PATTERN IN IMAGE

#44 | 2022-11-17 ✅ Patent 12,198,891 granted on 2025-01-14

US20220367143A1

Electricity

Charged particle beam writing apparatus, charged particle beam writing method and recording medium

#45 | 2022-11-17 ✅ Patent 12,339,241 granted on 2025-06-24

US20220365010A1

Physics

MULTIPLE SECONDARY ELECTRON BEAM ALIGNMENT METHOD, MULTIPLE SECONDARY ELECTRON BEAM ALIGNMENT APPARATUS, AND ELECTRON BEAM INSPECTION APPARATUS

#46 | 2022-11-10 ✅ Patent 12,609,278 granted on 2026-04-21

US20220359156A1

Electricity

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

#47 | 2022-10-20 ✅ Patent 12,288,666 granted on 2025-04-29

US20220336183A1

Electricity

Multiple electron beam image acquisition method, multiple electron beam image acquisition apparatus, and multiple electron beam inspection apparatus

#48 | 2022-10-13 ✅ Patent 12,009,175 granted on 2024-06-11

US20220328278A1

Electricity

Charged particle beam writing apparatus

#49 | 2022-10-06 ✅ Patent 11,756,766 granted on 2023-09-12

US20220319807A1

Electricity

Charged particle beam writing apparatus and charged particle beam writing method

#50 | 2022-09-22 ✅ Patent 11,854,764 granted on 2023-12-26

US20220301818A1

Electricity

Charged particle beam writing device and charged particle beam writing method

#51 | 2022-09-22 ✅ Patent 12,205,272 granted on 2025-01-21

US20220301138A1

Physics

Pattern inspection device and pattern inspection method

#52 | 2022-09-22 ✅ Patent 11,740,546 granted on 2023-08-29

US20220299861A1

Physics

Multi charged particle beam writing apparatus and method of adjusting same

#53 | 2022-09-22 ✅ Patent 12,265,043 granted on 2025-04-01

US20220299456A1

Physics

Inspection apparatus

#54 | 2022-09-01 ✅ Patent 11,915,902 granted on 2024-02-27

US20220277922A1

Electricity

Conduction inspection method for multipole aberration corrector, and conduction inspection apparatus for multipole aberration corrector

#55 | 2022-08-25 ✅ Patent 11,721,520 granted on 2023-08-08

US20220270850A1

Electricity

Semiconductor device, multi-charged-particle beam writing apparatus, and multi-charged-particle beam exposure apparatus

#56 | 2022-08-25 ✅ Patent 12,046,445 granted on 2024-07-23

US20220270845A1

Electricity

Electron beam inspection apparatus and electron beam inspection method

#57 | 2022-08-25 ✅ Patent 11,430,628 granted on 2022-08-30

US20220270842A1

Electricity

Cathode mechanism of electron gun, electron gun, and electron beam writing apparatus

#58 | 2022-08-04 ✅ Patent 11,837,436 granted on 2023-12-05

US20220246396A1

Electricity

Waveform generating device, waveform generating method, and charged particle beam irradiation apparatus

#59 | 2022-07-21 ✅ Patent 11,694,868 granted on 2023-07-04

US20220230837A1

Electricity

Multi-beam image acquisition apparatus and multi-beam image acquisition method

#60 | 2022-07-21 ✅ Patent 11,749,491 granted on 2023-09-05

US20220230834A1

Electricity

Electron beam writing apparatus and cathode life span prediction method

#61 | 2022-07-14 ✅ Patent 11,789,372 granted on 2023-10-17

US20220221800A1

Physics

Writing data generating method and multi charged particle beam writing apparatus

#62 | 2022-07-07 ✅ Patent 11,995,817 granted on 2024-05-28

US20220215524A1

Physics

Defect inspection method

#63 | 2022-06-16 ✅ Patent 11,664,191 granted on 2023-05-30

US20220189734A1

Electricity

Electron beam irradiation apparatus and electron beam irradiation method

#64 | 2022-06-16 ✅ Patent 11,791,125 granted on 2023-10-17

US20220189728A1

Electricity

Aberration corrector

#65 | 2022-06-02 ✅ Patent 12,142,512 granted on 2024-11-12

US20220172922A1

Electricity

Vacuum apparatus

#66 | 2022-06-02 ✅ Patent 12,009,174 granted on 2024-06-11

US20220172919A1

Electricity

Drawing apparatus and deflector

#67 | 2022-05-19 ✅ Patent 11,562,878 granted on 2023-01-24

US20220157553A1

Electricity

Method for controlling operation of electron emission source, electron beam writing method, and electron beam writing apparatus

#68 | 2022-05-05 ✅ Patent 12,179,223 granted on 2024-12-31

US20220134359A1

Performing operations; transporting

Rectifying plate, fluid-introducing apparatus, and film-forming apparatus

#69 | 2022-04-07 ✅ Patent 11,556,061 granted on 2023-01-17

US20220107569A1

Physics

Multiple charged particle beam writing apparatus and multiple charged particle beam writing method

#70 | 2022-03-31 ✅ Patent 11,574,797 granted on 2023-02-07

US20220102113A1

Electricity

Multiple-charged particle-beam irradiation apparatus and multiple-charged particle-beam irradiation method

#71 | 2022-03-31 ✅ Patent 11,774,860 granted on 2023-10-03

US20220100099A1

Physics

Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium

#72 | 2022-03-24 ✅ Patent 11,749,499 granted on 2023-09-05

US20220093360A1

Electricity

Data generation method and charged particle beam irradiation device

#73 | 2022-03-17 ✅ Patent 11,562,879 granted on 2023-01-24

US20220084778A1

Electricity

Low-blur electrostatic transfer lens for multi-beam electron gun

#74 | 2022-03-10 ✅ Patent 11,538,658 granted on 2022-12-27

US20220076916A1

Electricity

Theta stage mechanism and electron beam inspection apparatus

#75 | 2022-03-03 ✅ Patent 11,658,002 granted on 2023-05-23

US20220068591A1

Electricity

Charged particle beam adjustment method, charged particle beam drawing method, and charged particle beam irradiation apparatus

#76 | 2022-02-24 ✅ Patent 11,621,140 granted on 2023-04-04

US20220059310A1

Electricity

Multiple electron beam writing apparatus and multiple electron beam writing method

#77 | 2022-01-13 ✅ Patent 11,569,057 granted on 2023-01-31

US20220013327A1

Electricity

Pattern inspection apparatus and pattern outline position acquisition method

#78 | 2021-12-30 ✅ Patent 11,688,058 granted on 2023-06-27

US20210407061A1

Physics

Pattern inspection apparatus and pattern inspection method

#79 | 2021-10-14 ✅ Patent 11,417,495 granted on 2022-08-16

US20210319974A1

Electricity

Multi-charged particle beam irradiation apparatus and multi-charged particle beam inspection apparatus

#80 | 2021-09-30 ✅ Patent 11,251,012 granted on 2022-02-15

US20210305008A1

Electricity

Charged particle beam writing apparatus and charged particle beam writing method

#81 | 2021-09-23 ✅ Patent 11,355,302 granted on 2022-06-07

US20210296074A1

Electricity

Multi-beam blanking device and multi-charged-particle-beam writing apparatus

#82 | 2021-08-19 ✅ Patent 11,270,865 granted on 2022-03-08

US20210257185A1

Electricity

Multi-charged particle beam writing apparatus and multi-charged particle beam writing method

#83 | 2021-08-19 ✅ Patent 11,476,086 granted on 2022-10-18

US20210257184A1

Electricity

Multi-beam writing method and multi-beam writing apparatus

#84 | 2021-08-05 ✅ Patent 11,961,708 granted on 2024-04-16

US20210241995A1

Electricity

Charged particle beam writing apparatus, charged particle beam writing method, and a non-transitory computer-readable storage medium

#85 | 2021-07-01 ✅ Patent 11,342,157 granted on 2022-05-24

US20210202206A1

Electricity

Charged particle beam inspection apparatus and charged particle beam inspection method

#86 | 2021-06-24 ✅ Patent 11,244,807 granted on 2022-02-08

US20210193436A1

Electricity

Settling time determination method and multi charged particle beam writing method

#87 | 2021-05-13 ✅ Patent 11,270,866 granted on 2022-03-08

US20210142978A1

Electricity

Electron beam inspection apparatus and electron beam inspection method

#88 | 2021-05-13 ✅ Patent 11,461,889 granted on 2022-10-04

US20210142457A1

Physics

Pattern inspection apparatus and pattern inspection method

#89 | 2021-03-11 ✅ Patent 11,211,227 granted on 2021-12-28

US20210074510A1

Electricity

Multi charged particle beam evaluation method and multi charged particle beam writing device

#90 | 2021-01-28 ✅ Patent 11,869,746 granted on 2024-01-09

US20210027987A1

Electricity

Multi-beam writing method and multi-beam writing apparatus

#91 | 2021-01-28 ✅ Patent 11,170,976 granted on 2021-11-09

US20210027986A1

Electricity

Multi-beam writing method and multi-beam writing apparatus

#92 | 2021-01-14 ✅ Patent 11,227,744 granted on 2022-01-18

US20210013003A1

Electricity

Multi-beam writing method and multi-beam writing apparatus

#93 | 2021-01-14 ✅ Patent 11,183,366 granted on 2021-11-23

US20210013002A1

Electricity

Multi-beam writing method and multi-beam writing apparatus

#94 | 2021-01-14 ✅ Patent 11,385,192 granted on 2022-07-12

US20210010959A1

Physics

Inspection apparatus and inspection method

#95 | 2021-01-07 ✅ Patent 11,107,660 granted on 2021-08-31

US20210005422A1

Electricity

Multi-charged particle beam image acquisition apparatus and multi-charged particle beam image acquisition method

#96 | 2020-12-31 ✅ Patent 11,961,703 granted on 2024-04-16

US20200411280A1

Electricity

Multiple electron-beam image acquisition apparatus and multiple electron-beam image acquisition method using beam arrangement with omitted corners in a scan direction

#97 | 2020-12-17 ✅ Patent 11,189,459 granted on 2021-11-30