Kanagawa
Japan
25
2015-03-05
The entities that hold a legal rights for patent applications filed by inventor Yashima Jun:
Jun Yashima from Kanagawa, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Charged particle beam writing apparatus, and charged particle beam writing method
#2 | 2015-01-15Charged particle beam writing apparatus and charged particle beam writing method
#3 | 2014-08-21Charged particle beam writing apparatus, and buffer memory data storage method
#4 | 2014-01-16Charged particle beam writing apparatus and irradiation time apportionment method of charged particle beams for multiple writing
#5 | 2013-10-03Charged particle beam writing apparatus and charged particle beam writing method
#6 | 2013-04-25Charged particle beam writing apparatus and charged particle beam writing method
#7 | 2012-11-22Charged particle beam writing apparatus
#8 | 2012-11-22Charged particle beam writing apparatus and charged particle beam writing method using a generated frame that surrounds a first data processing block
#9 | 2012-05-24Charged particle beam writing apparatus and charged particle beam writing method
#10 | 2012-05-03Beam dose computing method and writing method and record carrier body and writing apparatus
#11 | 2012-05-03Method for resizing pattern to be written by lithography technique, and charged particle beam writing method
#12 | 2012-03-22Charged particle beam writing apparatus and charged particle beam writing method
#13 | 2012-02-09Method for resizing pattern to be written by lithography technique, and charged particle beam writing method
#14 | 2012-01-05Charged particle beam drawing apparatus and control method thereof
#15 | 2011-12-01Charged particle beam drawing apparatus and control method thereof
#16 | 2011-02-24Charged particle beam writing apparatus, charged particle beam writing method and apparatus of processing data for charged particle beam writing
#17 | 2011-01-20Charged particle beam drawing method and apparatus
#18 | 2010-09-23Charged particle beam drawing method and apparatus
#19 | 2010-07-08Method and apparatus for writing
#20 | 2010-03-25Charged particle beam writing apparatus and method
#21 | 2010-01-21Beam dose computing method and writing method and record carrier body and writing apparatus
#22 | 2009-08-13Charged particle beam writing apparatus, and apparatus and method for correcting dimension error of pattern
#23 | 2008-07-31Method for resizing pattern to be written by lithography technique, and charged particle beam writing method
#24 | 2007-06-21Charged particle beam writing method and apparatus
#25 | 2007-05-24Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam
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