Sunnyvale, California
United States
9
2007-02-27
9
2007-02-27
These are the the leading inventors for applications assigned to Genus, Inc.:
Genus, Inc. based in Sunnyvale, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Methods and procedures for engineering of composite conductive films by atomic layer deposition
#2 | 2007-01-16 ✅ Patent 7,164,203 granted on 2007-01-16Methods and procedures for engineering of composite conductive by atomic layer deposition
#3 | 2006-10-31 ✅ Patent 7,129,580 granted on 2006-10-31Methods and procedures for engineering of composite conductive films by atomic layer deposition
#4 | 2006-03-28 ✅ Patent 7,018,940 granted on 2006-03-28Method and apparatus for providing uniform gas delivery to substrates in CVD and PECVD processes
#5 | 2006-03-21 ✅ Patent 7,015,426 granted on 2006-03-21Purged heater-susceptor for an ALD/CVD reactor
#6 | 2005-06-14 ✅ Patent 6,905,547 granted on 2005-06-14Method and apparatus for flexible atomic layer deposition
#7 | 2005-06-07 ✅ Patent 6,902,624 granted on 2005-06-07Massively parallel atomic layer deposition/chemical vapor deposition system
#8 | 2005-05-24 ✅ Patent 6,897,119 granted on 2005-05-24Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition
#9 | 2005-03-08 ✅ Patent 6,863,021 granted on 2005-03-08Method and apparatus for providing and integrating a general metal delivery source (GMDS) with atomic layer deposition (ALD)
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