Sunnyvale, California
United States
14
2008-06-05
The entities that hold a legal rights for patent applications filed by inventor Seidel Thomas E.:
Thomas E. Seidel from Sunnyvale, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Transient enhanced atomic layer deposition
#2 | 2008-03-27SMALL VOLUME SYMMETRIC FLOW SINGLE WAFER ALD APPARATUS
#3 | 2007-02-27Methods and procedures for engineering of composite conductive films by atomic layer deposition
#4 | 2007-02-22Vaporizer for atomic layer deposition system
#5 | 2007-01-16Methods and procedures for engineering of composite conductive by atomic layer deposition
#6 | 2006-10-31Methods and procedures for engineering of composite conductive films by atomic layer deposition
#7 | 2006-06-29Multi-single wafer processing apparatus
#8 | 2005-12-22Massively parallel atomic layer deposition/chemical vapor deposition system
#9 | 2005-12-15Massively parallel atomic layer deposition/chemical vapor deposition system
#10 | 2005-06-14Method and apparatus for flexible atomic layer deposition
#11 | 2005-06-07Massively parallel atomic layer deposition/chemical vapor deposition system
#12 | 2005-05-24Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition
#13 | 2005-01-27Methods and apparatus for cycle time improvements for atomic layer deposition
#14 | 2005-01-27Collection of unused precursors in ALD
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