Germany
3
2006-05-09
3
2006-05-09
These are the the leading inventors for applications assigned to Steag RTP Systems GmbH:
Steag RTP Systems GmbH based in , DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Method and apparatus for the thermal treatment of substrates
#2 | 2005-10-11 ✅ Patent 6,953,338 granted on 2005-10-11Device for thermal treatment of substrates
#3 | 2005-01-25 ✅ Patent 6,847,012 granted on 2005-01-25Apparatus and method for measuring the temperature of substrates
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