Markus Hauf

City:

Ichenhausen

Country:

Germany

Published Applications:

Last publication date:

2011-08-02

Top Assignees for applications by Markus Hauf

The entities that hold a legal rights for patent applications filed by inventor Hauf Markus:

Markus Hauf from Ichenhausen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Projection objective of a microlithographic projection exposure apparatus

Projection objective of a microlithographic projection exposure apparatus

Method and apparatus for thermally treating substrates

Method and device for thermal treatment of substrates

Process for determining the temperature of a semiconductor wafer in a rapid heating unit

Method of producing a calibration wafer

Apparatus and method for measuring the temperature of substrates

Apparatus and method for measuring the temperature of substrates

InventorID:

4264359 ⎘