37618 ⎘
Details of cleaning machines or methods involving the use or presence of liquid or steam; Details of machines or methods for cleaning by the force of jets or sprays Ultra or megasonic jets
INTEGRATED CLEAN AND DRY MODULE FOR CLEANING A SUBSTRATE
#2INTEGRATED CLEAN AND DRY MODULE FOR CLEANING A SUBSTRATE
#3SUBSTRATE CLEANING DEVICE AND METHOD OF CLEANING SUBSTRATE
#4SUBSTRATE PROCESSING APPARATUS
#5Ultrasonically activated water ejector
#6Processing liquid nozzle and cleaning apparatus
#7WAFER CLEANING APPARATUS
#8Carousel for ultrasonic cleaning and method of using thereof
#9Non-contact clean module
#10Apparatus and method for prevention and treatment of marine biofouling
#11Substrate cleaning device and substrate cleaning method
#12Acoustic emitter device for regular cleaning of a downhole filter
#13Method for surface cleaning
#14Filter cleaning method and filter cleaning apparatus
#15SUBSTRATE PROCESSING APPARATUS
#16SUBSTRATE PROCESSING APPARATUS
#17SUBSTRATE PROCESSING APPARATUS
#18Non-contact clean module
#19System and method for surface cleaning
#20Substrate support device and substrate cleaning device including the same
#21Substrate processing apparatus
#22Megasonic cleaner
#23Substrate processing apparatus
#24Integrated fluidjet system for stripping, prepping and coating a part
#25Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus
#26Substrate cleaning method and substrate cleaning apparatus
#27Electrodischarge apparatus
#28Substrate processing apparatus
#29Ultrasonic cleaner
#30Integrated fluidjet system for stripping, prepping and coating a part
#31Integrated fluidjet system for stripping, prepping and coating a part
#32Substrate treating apparatus and treatment liquid nozzle
#33Substrate cleaning method and substrate cleaning apparatus
#34Substrate processing apparatus
#35Megasonic multifrequency apparatus with matched transducer
#36Ultrasonic cleaning apparatus and ultrasonic cleaning method
#37Integrated fluidjet system for stripping, prepping and coating a part
#38Ultrasonic apparatus, and associated holding device, for cleaning component surfaces
#39Ultrasonic cleaning apparatus
#40System and method for surface cleaning
#41System and method for surface cleaning
#42Pulse jet liquid gas cleaning system
#43Fluid jet cell harvester and cellular delivery system
#44FACILITATING STREAMING FLUID USING ACOUSTIC WAVES
#45Rolling mill roll-cleaning device and cleaning method
#46Megasonic precision cleaning of semiconductor process equipment components and parts
#47METHOD OF CLEANING A WAFER
#48Ultrasonic waterjet apparatus
#49CLEANING APPARATUS USING ULTRASONIC WAVES
#50CLEANING DEVICE AND A LITHOGRAPHIC APPARATUS CLEANING METHOD
#51Megasonic multifrequency apparatus with matched transducers and mounting plate
#52Ultrasonic waterjet apparatus
#53System and method for the sonic-assisted cleaning of substrates utilizing a sonic-treated liquid
#54METHOD FOR ULTRASONIC CLEANING OF CONTAMINATION ATTACHED TO A SURFACE OF AN OBJECT
#55METHOD AND APPARATUS FOR THE ULTRASONIC CLEANING OF BIOFILM COATED SURFACES
#56Method of cleaning steel sheet and continuous cleaning system of steel sheet
#57Ultrasonic waterjet apparatus
#58Substrate processing apparatus and substrate processing method
#59CLEANING APPARATUS USING ULTRASONIC WAVES
#60CLEANING APPARATUS, CLEANING TANK, CLEANING METHOD, AND METHOD FOR MANUFACTURING ARTICLE
#61Multilayer structural body and method for cleaning the same
#62APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
#63Process for decontaminating an organic solid substrate contaminated by solid radioactive particulate inorganic contaminants, using dense pressurized CO
#64Megasonic cleaning system
#65Apparatus and method for single substrate processing
#66ULTRASONIC CLEANING APPARATUS
#67METHOD AND APPARATUS FOR CLEANING A SUBSTRATE
#68Cleaning device and a lithographic apparatus cleaning method
#69Method and apparatus for wafer cleaning
#70Method and apparatus for controlled transient cavitation
#71Washing method, method of manufacturing semiconductor device and method of manufacturing active matrix-type display device
#72Megasonic precision cleaning of semiconductor process equipment components and parts
#73Method and apparatus for wafer cleaning
#74Method and apparatus for wafer cleaning
#75Method and apparatus for wafer cleaning
#76Substrate cleaning method and computer readable storage medium
#77SINGLE WAFER BACKSIDE WET CLEAN
#78Apparatus and method for delivering acoustic energy through a liquid stream to a target object for disruptive surface cleaning or treating effects
#79Laser nozzle methods and apparatus for surface cleaning
#80Spin cleaning apparatus and wafer cleaning method
#81Squirter jet ultrasonic cleaning
#82Ultrasonic waterjet apparatus
#83Method for cleaning disk-shape glass substrate and magnetic disk
#84Domestic injection type ultrasonic washing apparatus
#85Method and apparatus for wafer cleaning
#86Method and apparatus for wafer cleaning
#87Method and apparatus for wafer cleaning
#88Method and apparatus for wafer cleaning
#89Method and apparatus for wafer cleaning
#90Method and apparatus for wafer cleaning
#91Method and apparatus for wafer cleaning
#92Method and apparatus for wafer cleaning
#93Method and apparatus for wafer cleaning
#94Method and apparatus for wafer cleaning
#95Substrate processing apparatus, substrate processing method, and substrate holding apparatus
#96Ultrasonic washing device
#97Workpiece processing using ozone gas and solvents
#98Cleaning with electrically charged aerosols
#99Method and apparatus for controlled transient cavitation
#100Apparatus and method for delivering acoustic energy through a liquid stream to a target object for disruptive surface cleaning or treating effects
#101Substrate cleaning method
#102Method for processing a photomask for semiconductor devices
#103Scrubber with sonic nozzle
#104Washing method, method of manufacturing semiconductor device and method of manufacturing active matrix-type display device
#105Removing photoresist from a workpiece using water and ozone and a photoresist penetrating additive
#106Ultrasonic shower cleaning apparatus of double-side cleaning type
#107Method and apparatus for the ultrasonic cleaning of biofilm coated surfaces
#108Method and apparatus for the ultrasonic cleaning of biofilm coated surfaces