ClassID:

37618

B08B2203/0288 - CPC Classification

Classification description:

Details of cleaning machines or methods involving the use or presence of liquid or steam; Details of machines or methods for cleaning by the force of jets or sprays Ultra or megasonic jets

Recent Application in this class:
#1
20260114211
2026-04-23

INTEGRATED CLEAN AND DRY MODULE FOR CLEANING A SUBSTRATE

#2
20240222152
2024-07-04

INTEGRATED CLEAN AND DRY MODULE FOR CLEANING A SUBSTRATE

#3
20240082885
2024-03-14

SUBSTRATE CLEANING DEVICE AND METHOD OF CLEANING SUBSTRATE

#4
20230405762
2023-12-21

SUBSTRATE PROCESSING APPARATUS

#5
20230173552
2023-06-08

Ultrasonically activated water ejector

#6
20220371041
2022-11-24

Processing liquid nozzle and cleaning apparatus

#7
20220344195
2022-10-27

WAFER CLEANING APPARATUS

#8
20220152666
2022-05-19

Carousel for ultrasonic cleaning and method of using thereof

#9
20220044946
2022-02-10

Non-contact clean module

#10
20210139115
2021-05-13

Apparatus and method for prevention and treatment of marine biofouling

#11
20210129194
2021-05-06

Substrate cleaning device and substrate cleaning method

#12
20210039143
2021-02-11

Acoustic emitter device for regular cleaning of a downhole filter

#13
20200290096
2020-09-17

Method for surface cleaning

#14
20200215586
2020-07-09

Filter cleaning method and filter cleaning apparatus

#15
20200135505
2020-04-30

SUBSTRATE PROCESSING APPARATUS

#16
20200135504
2020-04-30

SUBSTRATE PROCESSING APPARATUS

#17
20200105547
2020-04-02

SUBSTRATE PROCESSING APPARATUS

#18
20200043756
2020-02-06

Non-contact clean module

#19
20190275566
2019-09-12

System and method for surface cleaning

#20
20190221451
2019-07-18

Substrate support device and substrate cleaning device including the same

#21
20190118338
2019-04-25

Substrate processing apparatus

#22
20190013218
2019-01-10

Megasonic cleaner

#23
20180076058
2018-03-15

Substrate processing apparatus

#24
20180043394
2018-02-15

Integrated fluidjet system for stripping, prepping and coating a part

#25
20180033654
2018-02-01

Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus

#26
20170309472
2017-10-26

Substrate cleaning method and substrate cleaning apparatus

#27
20170274394
2017-09-28

Electrodischarge apparatus

#28
20170252895
2017-09-07

Substrate processing apparatus

#29
20170036251
2017-02-09

Ultrasonic cleaner

#30
20170036239
2017-02-09

Integrated fluidjet system for stripping, prepping and coating a part

#31
20160339460
2016-11-24

Integrated fluidjet system for stripping, prepping and coating a part

#32
20160218022
2016-07-28

Substrate treating apparatus and treatment liquid nozzle

#33
20160074913
2016-03-17

Substrate cleaning method and substrate cleaning apparatus

#34
20160059380
2016-03-03

Substrate processing apparatus

#35
20150343499
2015-12-03

Megasonic multifrequency apparatus with matched transducer

#36
20150336138
2015-11-26

Ultrasonic cleaning apparatus and ultrasonic cleaning method

#37
20150315714
2015-11-05

Integrated fluidjet system for stripping, prepping and coating a part

#38
20150298177
2015-10-22

Ultrasonic apparatus, and associated holding device, for cleaning component surfaces

#39
20150283588
2015-10-08

Ultrasonic cleaning apparatus

#40
20150239021
2015-08-27

System and method for surface cleaning

#41
20150239020
2015-08-27

System and method for surface cleaning

#42
20140251381
2014-09-11

Pulse jet liquid gas cleaning system

#43
20140058361
2014-02-27

Fluid jet cell harvester and cellular delivery system

#44
20130340838
2013-12-26

FACILITATING STREAMING FLUID USING ACOUSTIC WAVES

#45
20130305799
2013-11-21

Rolling mill roll-cleaning device and cleaning method

#46
20130056041
2013-03-07

Megasonic precision cleaning of semiconductor process equipment components and parts

#47
20120285483
2012-11-15

METHOD OF CLEANING A WAFER

#48
20120061485
2012-03-15

Ultrasonic waterjet apparatus

#49
20120042913
2012-02-23

CLEANING APPARATUS USING ULTRASONIC WAVES

#50
20110292359
2011-12-01

CLEANING DEVICE AND A LITHOGRAPHIC APPARATUS CLEANING METHOD

#51
20110094548
2011-04-28

Megasonic multifrequency apparatus with matched transducers and mounting plate

#52
20110089251
2011-04-21

Ultrasonic waterjet apparatus

#53
20110041871
2011-02-24

System and method for the sonic-assisted cleaning of substrates utilizing a sonic-treated liquid

#54
20100192974
2010-08-05

METHOD FOR ULTRASONIC CLEANING OF CONTAMINATION ATTACHED TO A SURFACE OF AN OBJECT

#55
20100174226
2010-07-08

METHOD AND APPARATUS FOR THE ULTRASONIC CLEANING OF BIOFILM COATED SURFACES

#56
20100095980
2010-04-22

Method of cleaning steel sheet and continuous cleaning system of steel sheet

#57
20090308948
2009-12-17

Ultrasonic waterjet apparatus

#58
20090301518
2009-12-10

Substrate processing apparatus and substrate processing method

#59
20090223542
2009-09-10

CLEANING APPARATUS USING ULTRASONIC WAVES

#60
20090223536
2009-09-10

CLEANING APPARATUS, CLEANING TANK, CLEANING METHOD, AND METHOD FOR MANUFACTURING ARTICLE

#61
20090133713
2009-05-28

Multilayer structural body and method for cleaning the same

#62
20090070946
2009-03-19

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE

#63
20090056742
2009-03-05

Process for decontaminating an organic solid substrate contaminated by solid radioactive particulate inorganic contaminants, using dense pressurized CO

#64
20090038638
2009-02-12

Megasonic cleaning system

#65
20090029560
2009-01-29

Apparatus and method for single substrate processing

#66
20090025761
2009-01-29

ULTRASONIC CLEANING APPARATUS

#67
20090020144
2009-01-22

METHOD AND APPARATUS FOR CLEANING A SUBSTRATE

#68
20090015804
2009-01-15

Cleaning device and a lithographic apparatus cleaning method

#69
20080314424
2008-12-25

Method and apparatus for wafer cleaning

#70
20080276960
2008-11-13

Method and apparatus for controlled transient cavitation

#71
20080210257
2008-09-04

Washing method, method of manufacturing semiconductor device and method of manufacturing active matrix-type display device

#72
20080142055
2008-06-19

Megasonic precision cleaning of semiconductor process equipment components and parts

#73
20080083437
2008-04-10

Method and apparatus for wafer cleaning

#74
20080083436
2008-04-10

Method and apparatus for wafer cleaning

#75
20080047582
2008-02-28

Method and apparatus for wafer cleaning

#76
20080041420
2008-02-21

Substrate cleaning method and computer readable storage medium

#77
20070181149
2007-08-09

SINGLE WAFER BACKSIDE WET CLEAN

#78
20070175502
2007-08-02

Apparatus and method for delivering acoustic energy through a liquid stream to a target object for disruptive surface cleaning or treating effects

#79
20070163715
2007-07-19

Laser nozzle methods and apparatus for surface cleaning

#80
20070137672
2007-06-21

Spin cleaning apparatus and wafer cleaning method

#81
20070068551
2007-03-29

Squirter jet ultrasonic cleaning

#82
20070063066
2007-03-22

Ultrasonic waterjet apparatus

#83
20070017547
2007-01-25

Method for cleaning disk-shape glass substrate and magnetic disk

#84
20060283488
2006-12-21

Domestic injection type ultrasonic washing apparatus

#85
20060278253
2006-12-14

Method and apparatus for wafer cleaning

#86
20060266393
2006-11-30

Method and apparatus for wafer cleaning

#87
20060266392
2006-11-30

Method and apparatus for wafer cleaning

#88
20060266387
2006-11-30

Method and apparatus for wafer cleaning

#89
20060260661
2006-11-23

Method and apparatus for wafer cleaning

#90
20060260660
2006-11-23

Method and apparatus for wafer cleaning

#91
20060260659
2006-11-23

Method and apparatus for wafer cleaning

#92
20060260644
2006-11-23

Method and apparatus for wafer cleaning

#93
20060260643
2006-11-23

Method and apparatus for wafer cleaning

#94
20060260642
2006-11-23

Method and apparatus for wafer cleaning

#95
20060234503
2006-10-19

Substrate processing apparatus, substrate processing method, and substrate holding apparatus

#96
20060191562
2006-08-31

Ultrasonic washing device

#97
20060137723
2006-06-29

Workpiece processing using ozone gas and solvents

#98
20060118132
2006-06-08

Cleaning with electrically charged aerosols

#99
20060060991
2006-03-23

Method and apparatus for controlled transient cavitation

#100
20060021642
2006-02-02

Apparatus and method for delivering acoustic energy through a liquid stream to a target object for disruptive surface cleaning or treating effects

#101
20060016462
2006-01-26

Substrate cleaning method

#102
20050274397
2005-12-15

Method for processing a photomask for semiconductor devices

#103
20050268937
2005-12-08

Scrubber with sonic nozzle

#104
20050205109
2005-09-22

Washing method, method of manufacturing semiconductor device and method of manufacturing active matrix-type display device

#105
20050194356
2005-09-08

Removing photoresist from a workpiece using water and ozone and a photoresist penetrating additive

#106
20050087219
2005-04-28

Ultrasonic shower cleaning apparatus of double-side cleaning type

#107
20050080396
2005-04-14

Method and apparatus for the ultrasonic cleaning of biofilm coated surfaces

#108
20050075621
2005-04-07

Method and apparatus for the ultrasonic cleaning of biofilm coated surfaces