37488 ⎘
Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
METHOD FOR PROCESSING SUBSTRATE
#2SUPERHEATED STEAM DESICCATOR WITH DEPRESSURIZED FLOW FOR AGRICULTURAL, COMMERCIAL AND RESIDENTIAL APPLICATIONS
#3METHOD AND FACILITY FOR TREATING HUMAN OR ANIMAL TISSUE BY DYNAMICALLY CIRCULATING AN ADDITIVE-CONTAINING SUPERCRITICAL FLUID
#4SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#5APPARATUS FOR TREATING SUBSTRATE
#6SUBSTRATE PROCESSING APPARATUS
#7METHOD OF PROCESSING SUBSTRATE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES USING THE SAME
#8SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#9WASHING MACHINE
#10SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
#11Supercritical Fluid Cleaning for Components in Optical or Electron Beam Systems
#12MANUFACTURING METHOD, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS
#13APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
#14Sterilization Validation System
#15SUBSTRATE PROCESSING APPARATUS USING SUPERCRITICAL FLUID AND DRIVING METHOD THEREOF
#16Method for Cleaning Particulate Contaminant
#17SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
#18SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
#19SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#20SUBSTRATE TREATING METHOD, SUBSTRATE MANUFACTURING METHOD, AND SUBSTRATE TREATING APPARATUS
#21SUBSTRATE PROCESSING METHOD
#22NOZZLE FOR CONVERTING A LIQUID CO2 INTO A DRY ICE
#23SUBSTRATE DRYING DEVICE AND METHOD OF DRYING SUBSTRATE USING THE SAME
#24DRYING APPARATUS AND METHOD BASED ON SUPERCRITICAL FLUID
#25SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
#26METHOD FOR REMOVAL OF MICROSCOPIC CONTAMINANT PARTICULATES FROM SUPERCONDUCTING RADIO FREQUENCY CAVITIES AND CAVITY STRINGS
#27APPARATUS FOR PROCESSING SUBSTRATE
#28SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#29SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
#30SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
#31SUBSTRATE PROCESSING METHOD
#32PROCESSING CHAMBER CLEANING METHOD, CLEANING ATTACHMENT AND SUBSTRATE PROCESSING SYSTEM
#33SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#34Apparatuses for processing a substrate and methods of processing a substrate
#35APPARATUS AND METHOD OF ORIFICE INSPECTION AND CARBON DIOXIDE CLEANING THEREOF
#36METHOD AND INSTALLATION FOR CLEANING A FILTER MATERIAL
#37METHOD FOR COOLING AND/OR SEPARATING ADHESIVELY BONDED COMPONENTS AND/OR REMOVING ADHESIVE RESIDUES FROM SURFACES AND JET APPARATUS HEREFOR
#38Apparatus for treating substrate and method for treating a substrate preliminary class
#39Supercritical Fluid Cleaning for Components in Optical or Electron Beam Systems
#40Substrate drying device and method of drying substrate using the same preliminary class
#41Method and system for cleaning a process chamber
#42Raman sensor for supercritical fluids metrology
#43Substrate processing device comprising door unit having inclined surface
#44Apparatuses for processing a substrate and methods of processing a substrate
#45METHOD FOR SEPARATING ADHESIVES
#46Sterilization validation system and method
#47Sealing member and apparatus for treating substrate
#48Apparatus for treating substrate
#49DEVICE FOR GENERATING A CO2 SNOW JET
#50Substrate treating apparatus
#51Substrate treating apparatus and substrate treating method
#52Substrate treating apparatus and substrate treating method
#53Method and apparatus for removal of microscopic contaminant particulates from superconducting radio frequency cavities and cavity strings
#54Substrate processing apparatus
#55Substrate processing apparatus and apparatus for manufacturing integrated circuit device
#56Apparatus for treating substrate and method for treating substrate
#57Substrate processing apparatus and substrate processing method
#58Apparatus for treating substrate and method for treating substrate
#59Substrate processing method and substrate processing apparatus
#60Method of cleaning substrate processing apparatus, and substrate processing system
#61Method for treating substrate
#62Apparatus and method for treating substrate
#63Fluid supply unit and substrate treating apparatus having the same
#64Substrate processing apparatus
#65Substrate processing apparatus
#66SPRUE SPREADER SURFACE TREATMENT METHOD
#67Substrate processing apparatus and control method thereof
#68Wafer cleaning apparatus based on light irradiation and wafer cleaning system including the same
#69Substrate processing apparatus
#70Substrate processing apparatus and substrate processing system including the same
#71Method of cleaning a torch of a plasma-coating plant and a plasma-coating plant
#72Method and system for cleaning a process chamber
#73Method and apparatus for cleaning semiconductor wafers
#74Turbine blade internal hot corrosion oxide cleaning
#75METHOD FOR CLEANING CHAMBER, METHOD FOR TREATING SUBSTRATE, AND APPARATUS FOR TREATING SUBSTRATE
#76Substrate processing apparatus, substrate processing method, and storage medium
#77Method of directed fouling of a substance onto a selected surface
#78Substrate treating apparatus
#79Pulsing mixture of precursor and supercritical fluid to treat substrate surface
#80PROCESSING SYSTEM
#81SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#82DEVICE AND METHOD FOR REMOVING A LAYER FROM A SUBSTRATE
#83Substrate processing apparatus and substrate processing method
#84Supercritical-state cleaning system and methods
#85Soot blower and method of cleaning tubular heat exchanger by using the same
#86SUPERCRITICAL FLUID CLEANING OF BANKNOTES AND SECURE DOCUMENTS UTILIZING OZONE
#87Stiction-free drying process with contaminant removal for high-aspect ratio semiconductor device structures
#88Process for removing foulants from reactor internal spaces
#89Drying process for high aspect ratio features
#90Equipment cleaning apparatus and method
#91Substrate cleaning method, method for creating substrate cleaning recipe, and device for creating substrate cleaning recipe
#92Device for laminar flow fluid extraction
#93Method for processing substrate
#94Substrate processing apparatus and substrate processing method
#95Methods and systems for providing protection against harmful material
#96Method for cleaning a process chamber
#97SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
#98METHOD FOR CLEANING CHAMBER, METHOD FOR TREATING SUBSTRATE, AND APPARATUS FOR TREATING SUBSTRATE
#99METHOD AND APPARATUS FOR USING SUPERCRITICAL FLUIDS IN SEMICONDUCTOR APPLICATIONS
#100System for descaling an internal combustion engine
#101IN SITU CLEAN USING HIGH VAPOR PRESSURE AEROSOLS
#102Micro dry ice snow spray type cleaning device
#103Substrate processing apparatus and substrate processing system including the same
#104Supercritical-state cleaning system and methods
#105SUBSTRATE PROCESSING APPARATUS
#106Substrate processing apparatus
#107Substrate processing apparatus, substrate processing method, and recording medium
#108Dual phase extraction apparatus
#109Anhydrous substrate cleaning composition, substrate treating method, and substrate treating apparatus
#110APPARATUS AND METHOD FOR TREATING SUBSTRATE
#111Systems and Methods for Treating Substrates with Cryogenic Fluid Mixtures
#112Method of directed fouling of a substance onto a selected surface
#113Drying high aspect ratio features
#114Apparatus and method for treating substrate
#115APPARATUS AND METHOD FOR TREATING A SUBSTRATE
#116Apparatus for spraying cryogenic fluids
#117Method and apparatus for removing a fouling substance from a pressured vessel
#118Substrate processing apparatus having cooling member
#119Stiction-free drying process with contaminant removal for high-aspect ratio semiconductor device STR
#120Active surface cleaning for a sensor
#121Contamination removal apparatus and method
#122TREATMENT METHOD AND DEVICE USING A SUPERCRITICAL FLUID AND INJECTION OF ADDITIVE
#123TREATMENT METHOD AND DEVICE USING A SUPERCRITICAL FLUID AND A DISCHARGE STORAGE VOLUME
#124Dual medium filter for ion and particle filtering during semiconductor processing
#125TEMPLATE CLEANING METHOD, TEMPLATE CLEANING APPARATUS, AND IMPRINT METHOD
#126Small thermal mass pressurized chamber
#127Drying process for high aspect ratio features
#128Pressure release mechanism for capsule and method of use with supercritical fluids
#129Supercritical water method for treating internal passages
#130Method and apparatus for removing a fouling substance from a pressured vessel
#131ENERGY-EFFICIENT PROCESS FOR PURIFYING VOLATILE COMPOUNDS AND DEGREASING
#132Apparatus for treating substrates using supercritical fluids, substrate treatment system including the same and method of treating substrates using the same
#133FOREIGN MATTER REMOVAL METHOD AND APPARATUS FOR CONNECTOR
#134SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#135Method for producing a steel tube including cleaning of the outer tube wall
#136Mask cleaning apparatus and mask cleaning method
#137Method and system for flushing a pipe system using a fluid in a supercritical state
#138System and method for treating a substrate
#139SUBSTRATE TREATING APPARATUS
#140Method and system for supplying a cleaning gas into a process chamber
#141Systems and methods for supplying treatment liquids having nanobubbles
#142Apparatus and methods for substrate processing and manufacturing integrated circuit devices
#143Cleaning of chamber components with solid carbon dioxide particles
#144Processing system
#145Barrier densified fluid cleaning system
#146Particle removal system and method thereof
#147Supercritical fluid cleaning of banknotes and secure documents
#148Tooling for removing sand from a turbine engine
#149Supercritical fluid cleaning of banknotes and secure documents
#150SUBSTRATE TREATING APPARATUS AND METHOD
#151Plasma processing apparatus and method therefor
#152Methods of non-destructive post tungsten etch residue removal
#153Supply apparatus and supply method for supplying fluid carbon dioxide
#154METHOD OF CLEANING A TORCH OF A PLASMA-COATING PLANT AND A PLASMA-COATING PLANT
#155Hyperbaric Methods and Systems for Surface Treatment, Cleaning, and Drying: Thin Liquid H-CNX
#156Supercritical fluid cleaning of banknotes and secure documents
#157METHOD FOR CLEANING COMPONENTS OF NITRIDE SEMICONDUCTOR MANUFACTURING APPARATUS AND DEVICE FOR CLEANING COMPONENTS OF NITRIDE SEMICONDUCTOR MANUFACTURING APPARATUS
#158Recycling unit, substrate treating apparatus and recycling method using the recycling unit
#159System and method for cleaning optical surfaces of an extreme ultraviolet optical system
#160Method of wet cleaning aluminum chamber parts
#161Stiction-free drying process with contaminant removal for high-aspect ratio semiconductor device structures
#162Supercritical fluid cleaning of banknotes and secure documents
#163Shadow frame support
#164REMOVING RESIDUES FROM SUBSTRATE PROCESSING COMPONENTS
#165Method and system for supplying a cleaning gas into a process chamber
#166Cleaning method and cleaning apparatus
#167Method and hardware for cleaning UV chambers
#168Techniques for improving the performance and extending the lifetime of an ion source
#169Substrate processing method and storage medium
#170Textile cleaning composition comprising a supercritical noble gas
#171Substrate treating apparatus and substrate treating method
#172Contamination removal apparatus and method
#173Method for UV based silylation chamber clean
#174CHEMICAL VAPOR DEPOSITION CHAMBER CLEANING WITH MOLECULAR FLUORINE
#175SYSTEM AND METHOD FOR CLEANING SURFACES AND COMPONENTS OF MASK AND WAFER INSPECTION SYSTEMS BASED ON THE POSITIVE COLUMN OF A GLOW DISCHARGE PLASMA
#176Method and system for supplying a cleaning gas into a process chamber
#177Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid
#178Barrier densified fluid cleaning system
#179Cleaning of a turbo-machine stage
#180PROCESS FOR PICKLING OR DESCALING A CONCRETE SURFACE
#181Using supercritical carbon dioxide to remove residual EtO from sutures
#182Process for washing a polysaccharide-based material which has been subjected to an oxidation
#183Substrate processing method, substrate processing apparatus, and storage medium
#184System and method for washing articles employing a densified cleaning solution, and use of a fluid displacement device therein
#185Methods and systems for providing protection against harmful materials
#186METHOD FOR CLEANING AND DISINFECTING ARTICLES
#187Substrate processing method and substrate processing apparatus
#188Substrate processing method and substrate processing system for performing the same
#189Methods and apparatus for displacing fluids from substrates using supercritical CO2
#190Removing Residues from Substrate Processing Components
#191Methods and compositions for dislodging debris particles from a substrate
#192Supercritical noble gases and cleaning methods
#193Methods and compositions for eliminating allergens and allergen-producing organisms
#194METHOD AND APPARATUS FOR CLEANING PARTS IN DENSE PHASE CARBON DIOXIDE
#195PROCESS FOR CLEANING ENGRAVED CYLINDERS USED IN PRINTING AND PACKAGING INDUSTRY FROM ADHESIVE AND/OR INK RESIDUES
#196METHOD FOR COOLING AND LUBRICATING A TOOL AND FOR CLEANING THE MACHINED SURFACE
#197METHOD FOR TREATING ELECTROPHOTOGRAPHIC CARRIER, METHOD FOR PRODUCING ELECTROPHOTOGRAPHIC CARRIER, CORE MATERIAL AND CARRIER
#198Substrate treatment process
#199Method of removing contaminants from hard surfaces
#200Workpiece cleaning
#201CLEANING SYSTEM UTILIZING AN ORGANIC CLEANING SOLVENT AND A PRESSURIZED FLUID SOLVENT
#202High-pressure treatment apparatus
#203Thermal De-Scaling Surfaces With Cryogenic Liquids And Gases
#204METHOD AND APPARATUS FOR CLEANING SEMICONDUCTOR DEVICE FABRICATION EQUIPMENT USING SUPERCRITICAL FLUIDS
#205Substrate cleaning method, substrate cleaning apparatus, substrate processing system, substrate cleaning program and storage medium
#206USE OF IONIC LIQUIDS AS AN ADDITIVE FOR CLEANING PROCESSES IN LIQUEFIED AND/OR SUPERCRITICAL GAS
#207Method and System for Supplying a Cleaning Gas Into a Process Chamber
#208Method for Treating a Material Having Nanoscale Pores
#209Method and system for supplying a cleaning gas into a process chamber
#210ULTRASONIC CLEANING SYSTEM FOR REMOVING HIGH DOSE ION IMPLANTED PHOTORESIST IN SUPERCRITICAL CARBON DIOXIDE
#211CLEANING SYSTEM UTILIZING AN ORGANIC SOLVENT AND A PRESSURIZED FLUID SOLVENT
#212Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid
#213REMOVAL OF PARTICLE CONTAMINATION ON PATTERNED SILICON/SILICON DIOXIDE USING DENSE FLUID/CHEMICAL FORMULATIONS
#214Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent
#215Extraction process utilzing liquified carbon dioxide
#216Method and tool for cleaning cavities
#217Process for Cleaning Engraved Cylinders Used in Printing and Packaging Industry From Adhesive and/or Ink Residues
#218Process for decontaminating an organic solid substrate contaminated by solid radioactive particulate inorganic contaminants, using dense pressurized CO
#219Methods and Systems for Debonding an Undesirable Material from a Device Using Ultrasonic Energy and Liquid Nitrogen
#220Method and Apparatus for Mixing Fluids
#221METHOD OF MANUFACTURING OF SUBSTRATE
#222Method and Apparatus for Cleaning or Descaling of Thin Slabs and Strips in a Hot Strip Rolling Mill Train, Strip Treatment Installations or the Like
#223Apparatus and Method for Supercritical Fluid Removal or Deposition Processes
#224Apparatus and methods for increasing the rate of solute concentration evolution in a supercritical process chamber
#225Cleaning System Utilizing an Organic Cleaning Solvent and a Pressurized Fluid Solvent
#226Cooling/Heating System for Co2 Cleaning Machine
#227Chamber for wafer cleaning and method for making the same
#228Carbon Dioxide Cleaning Method
#229Cleaning process utilizing an organic solvent and a pressurized fluid solvent
#230REMOVING RESIDUES FROM SUBSTRATE PROCESSING COMPONENTS
#231PULSED-GAS AGITATION PROCESS FOR ENHANCING SOLID SURFACE BIOLOGICAL REMOVAL EFFICIENCY OF DENSE PHASE FLUIDS
#232SUPERCRITICAL FLUID CLEANING OF SEMICONDUCTOR SUBSTRATES
#233Cleaning method and cleaning apparatus
#234Processing of semiconductor components with dense processing fluids
#235Dense fluid cleaning centrifugal phase shifting separation process and apparatus
#236Multiple bath CO2 cleaning
#237METHOD OF TREATING A SUBSTRATE
#238Cleaning of contaminated articles by aqueous supercritical oxidation
#239Apparatus and method for removing solvent from carbon dioxide in resin recycling system
#240Method Of Producing A Silicone Rubber Item And The Product Obtainable By The Method
#241Automated non-contact cleaning
#242Cleaning process
#243Release agent, toner, and method for manufacturing same
#244Supercritical fluid washing method and system
#245Supercritical CO2 cleaning system and method
#246Method for removal of flux and other residue in dense fluid systems
#247Method of cleaning molds using super-cooled fluids
#248Method for manufacturing semiconductor silicon substrate and apparatus for manufacturing the same
#249Method and apparatus for semiconductor wafer cleaning using high-frequency acoustic energy with supercritical fluid
#250Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent
#251Method of cleaning semiconductor surfaces
#252Removal of post etch residues and copper contamination from low-K dielectrics using supercritical CO2 with diketone additives
#253HIGH-PRESSURE PROCESSING APPARATUS AND HIGH-PRESSURE PROCESSING METHOD
#254High-pressure device for closing a container in a clean room
#255Cleaning apparatus having multiple wash tanks for carbon dioxide dry cleaning and methods of using same
#256CLEANING SYSTEM UTILIZING AN ORGANIC AND A PRESSURIZED FLUID SOLVENT
#257SUPERCRITICAL FLUID DELIVERY SYSTEM FOR SEMICONDUCTOR WAFER PROCESSING
#258IN-LINE METROLOGY FOR SUPERCRITICAL FLUID PROCESSING
#259System and method for mid-pressure dense phase gas and ultrasonic cleaning
#260Removal of residues for low-k dielectric materials in wafer processing
#261Cleaning with liquid carbon dioxide
#262Method of cleaning semiconductor surfaces
#263Solvent cleaning system and method for removing contaminants from solvent used in resin recycling
#264System for removing contaminants from plastic resin
#265Method for removing contaminants from plastic resin
#266Method and apparatus for mixing fluids
#267Dense fluid delivery apparatus
#268Method and apparatus for treating a substrate with dense fluid and plasma
#269System and apparatus for supplying carbon dioxide to a semiconductor application
#270Polar fluid removal from surfaces using supercritical fluids
#271Pressurized apparatus for cleaning objects
#272Pressurized facility for cleaning objects
#273FLUSHING FOR REFRIGERATION SYSTEM COMPONENTS
#274Controlled pressure differential in a high-pressure processing chamber
#275Method for removing contaminants from plastic resin
#276Method of removing contaminants from plastic resins
#277Method of removing contaminants from plastic resins
#278Removal of contaminants from a fluid
#279Rinsing step in supercritical processing
#280Cleaning step in supercritical processing
#281Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
#282REMOVAL OF POST ETCH RESIDUE FOR A SUBSTRATE WITH OPEN METAL SURFACES
#283Method for removing impurities from porous materials
#284Method of cleaning optical tools for making contact lens molds using super-cooled fluids
#285METHOD FOR TREATING A SUBSTRATE WITH A HIGH PRESSURE FLUID USING A PREOXIDE-BASED PROCESS CHEMISTRY
#286System for removing a residue from a substrate using supercritical carbon dioxide processing
#287Substrate cleaning method, substrate cleaning apparatus, substrate processing system, substrate cleaning program and storage medium
#288Method for removing a residue from a substrate using supercritical carbon dioxide processing
#289Dense fluid compositions and processes using same for article treatment and residue removal
#290Method and system for injecting chemistry into a supercritical fluid
#291Supercritical fluid technology for cleaning processing chambers and systems
#292Method and system for controlling a velocity field of a supercritical fluid in a processing system
#293Processing electronic devices using a combination of supercritical fluid and sonic energy
#294Supercritical fluid processing system having a coating on internal members and a method of using
#295Method and system for homogenization of supercritical fluid in a high pressure processing system
#296High pressure processing method
#297Removal of particle contamination on a patterned silicon/silicon dioxide using dense fluid/chemical formulations
#298Method for removal of flux and other residue in dense fluid systems
#299System for use of land fills and recyclable materials
#300Method and apparatus for pretreatment of polymeric materials utilized in carbon dioxide purification, delivery and storage systems