ClassID:

44767

B24B37/044 - CPC Classification

Classification description:

Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent

Recent Application in this class:
#1
20260146190
2026-05-28

SLURRY COMPOSITION FOR CHEMICAL MECHANICAL POLISHING, POLISHING PAD FOR CHEMICAL MECHANICAL POLISHING, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME

#2
20260146180
2026-05-28

CERIA BASED COMPOSITIONS AND METHODS FOR HARD CARBON POLISHING

#3
20260139155
2026-05-21

POLISHING AGENT AND METHOD FOR PRODUCING THE SAME, METHOD FOR PRODUCING POLISHING AGENT ADDITIVE LIQUID, POLISHING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR COMPONENT

#4
20260139154
2026-05-21

CMP SLURRY COMPOSITION FOR POLISHING PATTERNED TUNGSTEN WAFER AND METHOD OF POLISHING PATTERNED TUNGSTEN WAFER USING THE SAME

#5
20260138230
2026-05-21

POLISHING COMPOSITION FOR SEMICONDUCTOR PROCESS AND SUBSTRATE POLISHING METHOD USING THE SAME

#6
20260107722
2026-04-16

TOOLS FOR CHEMICAL PLANARIZATION

#7
20260092198
2026-04-02

POLISHING COMPOSITION

#8
20260092196
2026-04-02

CMP COMPOSITION INCLUDING CERIA POLYMER COMPOSITE PARTICLES

#9
20260092195
2026-04-02

POLISHING COMPOSITION

#10
20260085221
2026-03-26

CMP COMPOSITION INCLUDING ALCOHOL AMINE MOLYBDENUM ETCH INHIBITOR

#11
20260071094
2026-03-12

GUANIDINIUM-BASED POLYIONIC LIQUIDS AND THEIR USE AS ADDITIVES FOR CHEMICAL MECHANICAL PLANARIZATION SLURRIES

#12
20260049231
2026-02-19

POLISHING AGENT, POLISHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR COMPONENT, AND ADDITIVE SOLUTION FOR POLISHING AGENT

#13
20260042946
2026-02-12

POLISHING SLURRY AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING THE SAME

#14
20260042934
2026-02-12

COMPOSITIONS AND METHODS FOR POLISHING SUBSTRATES

#15
20260035596
2026-02-05

COMPOSITIONS FOR POLISHING SUBSTRATES

#16
20260028507
2026-01-29

COMPOSITIONS FOR CHEMICAL MECHANICAL PLANARIZATION AND RELATED SYSTEMS AND RELATED METHODS

#17
20260002063
2026-01-01

CMP POLISHING LIQUID, CMP POLISHING LIQUID SET, AND POLISHING METHOD

#18
20250368860
2025-12-04

POLISHING AGENT, POLISHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR COMPONENT, AND ADDITIVE SOLUTION FOR POLISHING AGENT

#19
20250368859
2025-12-04

SILICA-BASED SLURRY FOR SELECTIVE POLISHING OF CARBON-BASED FILMS

#20
20250368858
2025-12-04

POLISHING MATERIAL SLURRY AND POLISHING METHOD OF SAME

#21
20250368857
2025-12-04

POLISHING MATERIAL SLURRY AND POLISHING METHOD OF SAME

#22
20250364257
2025-11-27

SUBSTRATE GRINDING TOOL AND METHODS OF OPERATION

#23
20250360596
2025-11-27

CHEMICAL MECHANICAL POLISHING METHOD USING FOAMED SLURRY AND APPARATUS FOR FOAMED SLURRY GENERATION

#24
20250357131
2025-11-20

Ionic Slurry for Electrochemical Mechanical Polishing

#25
20250354033
2025-11-20

HIGHLY MODIFIED COLLOIDAL SILICA TUNGSTEN CMP COMPOSITION

#26
20250349551
2025-11-13

POLISHING LIQUID FOR CMP, POLISHING LIQUID SET FOR CMP, AND POLISHING METHOD

#27
20250339931
2025-11-06

Methods of Forming an Abrasive Slurry and Methods for Chemical-Mechanical Polishing

#28
20250333622
2025-10-30

POLISHING COMPOSITIONS AND METHODS OF USE THEREOF

#29
20250297136
2025-09-25

SILICA PARTICLE, METHOD FOR PRODUCING SILICA PARTICLE, SILICA SOL, POLISHING COMPOSITION, POLISHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

#30
20250277135
2025-09-04

SILANE MODIFICATION OF CERIA NANOPARTICLES IN COLLOIDALLY STABLE SOLUTIONS

#31
20250269487
2025-08-28

CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD

#32
20250257242
2025-08-14

CMP POLISHING LIQUID AND POLISHING METHOD

#33
20250250464
2025-08-07

JANUS ABRASIVE PARTICLES AND SLURRY COMPOSITION COMPRISING THE SAME FOR CHEMICAL MECHANICAL POLISHING

#34
20250242465
2025-07-31

HYBRID ABRASIVE SYSTEM FOR RU CMP

#35
20250226230
2025-07-10

SILICON POLISHING METHOD AND COMPOSITION FOR SILICON POLISHING

#36
20250222558
2025-07-10

HIGH FREQUENCY POLISHING OF CERAMICS

#37
20250197676
2025-06-19

POLISHING AGENT, ADDITIVE SOLUTION FOR POLISHING AGENT, AND POLISHING METHOD

#38
20250187137
2025-06-12

POLISHING SOLUTION, POLISHING METHOD, COMPONENT MANUFACTURING METHOD, AND SEMICONDUCTOR COMPONENT MANUFACTURING METHOD

#39
20250178153
2025-06-05

APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM, AND FILTER DEVICE

#40
20250145858
2025-05-08

SLURRY COMPOSITION FOR POLISHING METAL FILM

#41
20250144609
2025-05-08

PHOTOELECTRIC FLUID FIELD CLUSTER CATALYTIC METHOD FOR ATOMIC-SCALE DETERMINISTIC PROCESSING

#42
20250136842
2025-05-01

POLISHING COMPOSITION FOR SEMICONDUCTOR PROCESS AND METHOD OF MANUFACTURING SUBSTRATE USING SAME

#43
20250118604
2025-04-10

SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

#44
20250115787
2025-04-10

POLISHING COMPOSITION FOR SEMICONDUCTOR PROCESS AND POLISHING METHOD OF SUBSTRATE USING THE SAME

#45
20250115785
2025-04-10

SLURRY COMPOSITION FOR CHEMICAL MECHANICAL METAL POLISHING AND POLISHING METHOD USING THE SAME

#46
20250109319
2025-04-03

POLISHING COMPOSITION, POLISHING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE

#47
20250092284
2025-03-20

POLISHING COMPOSITION AND SURFACE TREATMENT METHOD

#48
20250083282
2025-03-13

CHEMICAL MECHANICAL POLISHING PROCESS USING STEAM FOR POLISHING FLUID DELIVERY AND AN APPARATUS FOR IMPLEMENTING THE SAME

#49
20250019567
2025-01-16

CHEMICAL MECHANICAL POLISHING COMPOSITION AND METHOD FOR PREVENTING POLISHING PAD GROOVE CLOGGING

#50
20250017209
2025-01-16

COMPOSITION, MANUFACTURING METHOD FOR SEMICONDUCTOR ELEMENT, AND CLEANING METHOD FOR SEMICONDUCTOR SUBSTRATE

#51
20250001547
2025-01-02

FACE-UP WAFER ELECTROCHEMICAL PLANARIZATION APPARATUS

#52
20240400862
2024-12-05

POLISHING COMPOSITION

#53
20240392164
2024-11-28

POLISHING COMPOSITION

#54
20240392162
2024-11-28

POLISHING LIQUID, POLISHING METHOD, COMPONENT MANUFACTURING METHOD, AND SEMICONDUCTOR COMPONENT MANUFACTURING METHOD

#55
20240383100
2024-11-21

VACUUM ASSEMBLY FOR CHEMICAL MECHANICAL POLISHING

#56
20240383095
2024-11-21

MULTI-LAYERED WINDOWS FOR USE IN CHEMICAL-MECHANICAL PLANARIZATION SYSTEMS

#57
20240375238
2024-11-14

METHOD AND SYSTEM FOR SLURRY QUALITY MONITORING

#58
20240368428
2024-11-07

POLISHING LIQUID AND POLISHING METHOD

#59
20240367286
2024-11-07

PLATEN ROTATION DEVICE

#60
20240367202
2024-11-07

ELECTRICAL CLEANING TOOL FOR WAFER POLISHING TOOL SYSTEM

#61
20240342856
2024-10-17

Methods of Forming an Abrasive Slurry and Methods for Chemical-Mechanical Polishing

#62
20240336810
2024-10-10

POLISHING LIQUID FOR CMP, POLISHING LIQUID SET FOR CMP AND POLISHING METHOD

#63
20240336809
2024-10-10

POLISHING LIQUID FOR CMP, POLISHING LIQUID SET FOR CMP, AND POLISHING METHOD

#64
20240327677
2024-10-03

CHEMICAL MECHANICAL POLISHING SLURRY COMPOSITION AND METHOD OF POLISHING METAL LAYER

#65
20240304455
2024-09-12

CHEMICAL MECHANICAL POLISHING APPARATUS

#66
20240293912
2024-09-05

MANUFACTURING METHOD FOR MANUFACTURING SUBSTRATE OF NITRIDE CRYSTAL OF GROUP 13 ELEMENT IN PERIODIC TABLE

#67
20240290629
2024-08-29

METHODS FOR CHEMICAL MECHANICAL POLISHING AND FORMING INTERCONNECT STRUCTURE

#68
20240278383
2024-08-22

CHEMICAL MECHANICAL POLISHING APPARATUS AND CHEMICAL MECHANICAL POLISHING METHOD

#69
20240274440
2024-08-15

CMP System and Method of Use

#70
20240254366
2024-08-01

POLISHING COMPOSITION, POLISHING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR SUBSTRATE

#71
20240228830
2024-07-11

POLISHING LIQUID AND POLISHING METHOD

#72
20240218251
2024-07-04

POLISHING COMPOSITION FOR SEMICONDUCTOR PROCESSING AND METHOD OF POLISHING A SUBSTRATE

#73
20240199917
2024-06-20

NITRIDE INHIBITORS FOR HIGH SELECTIVITY OF TiN-SiN CMP APPLICATIONS

#74
20240199915
2024-06-20

POLISHING COMPOSITION

#75
20240174892
2024-05-30

POLISHING COMPOSITIONS AND METHODS OF USE THEREOF

#76
20240174891
2024-05-30

TITANIUM DIOXIDE CHEMICAL-MECHANICAL POLISHING COMPOSITION FOR POLISHING NICKEL SUBSTRATES

#77
20240174890
2024-05-30

CMP SLURRY COMPOSITION FOR POLISHING TUNGSTEN AND METHOD OF POLISHING TUNGSTEN USING THE SAME

#78
20240150614
2024-05-09

POSITIVELY CHARGED ABRASIVE WITH NEGATIVELY CHARGED IONIC OXIDIZER FOR POLISHING APPLICATION

#79
20240124744
2024-04-18

POLISHING COMPOSITION AND POLISHING METHOD USING THE SAME

#80
20240117219
2024-04-11

POLISHING COMPOSITION

#81
20240110080
2024-04-04

Polishing composition

#82
20240091900
2024-03-21

POLISHING APPARATUS AND POLISHING METHOD

#83
20240087963
2024-03-14

SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

#84
20240055264
2024-02-15

WAFER POLISHING METHOD AND WAFER PRODUCING METHOD

#85
20240052202
2024-02-15

POLISHING COMPOSITION AND METHOD OF POLISHING SILICON WAFER

#86
20240050995
2024-02-15

Electrical cleaning tool for wafer polishing tool system

#87
20240043721
2024-02-08

Ruthenium CMP chemistry based on halogenation

#88
20240017299
2024-01-18

METHODS FOR REMOVING DEPOSITS ON THE SURFACE OF A CHAMBER COMPONENT

#89
20230390887
2023-12-07

Face-up wafer electrochemical planarization apparatus

#90
20230373062
2023-11-23

CHEMICAL MECHANICAL POLISHING APPARATUS WITH INTEGRATED SLURRY MIXER-DISPENSER AND METHODS FOR OPERATING THE SAME

#91
20230364732
2023-11-16

POLISHING AND CLEANING METHOD, CLEANER AND POLISHING CLEANING SET

#92
20230357600
2023-11-09

SLURRY, POLISHING METHOD, AND METHOD FOR PRODUCING SEMICONDUCTOR COMPONENT

#93
20230332014
2023-10-19

POLISHING COMPOSTION FOR SEMICONDUCTOR PROCESS, MANUFACTURING METHOD OF POLISHING COMPOSITION AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE BY USING THE SAME

#94
20230323158
2023-10-12

DUAL ADDITIVE POLISHING COMPOSITION FOR GLASS SUBSTRATES

#95
20230312981
2023-10-05

METHOD FOR PRODUCING INORGANIC PARTICLE-CONTAINING SLURRY AND ZIRCONIA PARTICLE-CONTAINING SLURRY

#96
20230294241
2023-09-21

POLISHING METHOD AND POLISHING APPARATUS

#97
20230287243
2023-09-14

POLISHING COMPOSITION, POLISHING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR SUBSTRATE

#98
20230265313
2023-08-24

Polishing Compositions and Methods of Using Same

#99
20230249312
2023-08-10

LARGE AREA QUARTZ CRYSTAL WAFER LAPPING DEVICE AND A LAPPING METHOD THEREOF

#100
20230235194
2023-07-27

POLISHING METHOD AND POLISHING COMPOSITION SET

#101
20230220241
2023-07-13

CMP SLURRY COMPOSITION FOR POLISHING TUNGSTEN PATTERN WAFER AND METHOD OF POLISHING TUNGSTEN PATTERN WAFER USING THE SAME

#102
20230197455
2023-06-22

METHODS FOR POLISHING SEMICONDUCTOR SUBSTRATES

#103
20230193080
2023-06-22

SLURRY COMPOSITIONS FOR POLISHING METAL LAYERS, CHEMICAL MECHANICAL POLISHING APPARATUSES USING THE SAME, AND METHODS FOR FABRICATING SEMICONDUCTOR DEVICES USING THE SAME

#104
20230191555
2023-06-22

CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD USING THE SAME

#105
20230143013
2023-05-11

CHEMICAL PLANARIZATION

#106
20230137813
2023-05-04

METHOD AND APPARATUS FOR POLISHING WAFER

#107
20230128739
2023-04-27

CMP PROCESS APPLIED TO A THIN SIC WAFER FOR STRESS RELEASE AND DAMAGE RECOVERY

#108
20230128096
2023-04-27

POLISHING LIQUID AND POLISHING METHOD

#109
20230118455
2023-04-20

Ruthenium CMP chemistry based on halogenation

#110
20230104949
2023-04-06

Slurry composition for chemical mechanical polishing

#111
20230082084
2023-03-16

Methods for chemical mechanical polishing and forming interconnect structure

#112
20230077988
2023-03-16

TOOLS FOR CHEMICAL PLANARIZATION

#113
20230073290
2023-03-09

Polishing composition and method for producing same

#114
20230026568
2023-01-26

CHEMICAL MECHANICAL POLISHING SOLUTION

#115
20230020073
2023-01-19

High oxide film removal rate shallow trench (STI) chemical mechanical planarization (CMP) polishing

#116
20220406612
2022-12-22

Methods for polishing dielectric layer in forming semiconductor device

#117
20220396715
2022-12-15

GRINDING OF HARD SUBSTRATES

#118
20220332977
2022-10-20

CMP COMPOSITIONS FOR POLISHING DIELECTRIC MATERIALS

#119
20220298382
2022-09-22

CMP slurry composition for polishing tungsten pattern wafer and method of polishing tungsten pattern wafer using the same

#120
20220290009
2022-09-15

Polishing solution, polishing apparatus, and polishing method

#121
20220267643
2022-08-25

COMPOSITIONS FOR TUNGSTEN ETCHING INHIBITION

#122
20220220339
2022-07-14

POLISHING COMPOSITION, METHOD FOR MANUFACTURING POLISHING COMPOSITION, AND POLISHING METHOD

#123
20220199416
2022-06-23

Methods for polishing dielectric layer in forming semiconductor device

#124
20220195246
2022-06-23

Chemical mechanical polishing slurry composition and method of polishing metal layer

#125
20220157618
2022-05-19

SLURRY RECYCLING FOR CHEMICAL MECHANICAL POLISHING SYSTEM

#126
20220145130
2022-05-12

Polishing compositions and methods of using same

#127
20220134507
2022-05-05

CHEMICAL MECHANICAL POLISHING PAD HAVING PATTERN SUBSTRATE

#128
20220089910
2022-03-24

Calcium carbonate slurry

#129
20220088743
2022-03-24

Polishing jig assembly for a new or refurbished electrostatic chuck

#130
20220059401
2022-02-24

POLISHING PAD AND METHOD FOR PREPARING SEMICONDUCTOR DEVICE USING THE SAME

#131
20220055180
2022-02-24

Polishing composition, polishing method, and method for producing substrate

#132
20220033684
2022-02-03

POLISHING LIQUID

#133
20210391186
2021-12-16

Methods for chemical mechanical polishing and forming interconnect structure

#134
20210375613
2021-12-02

SiC WAFER MANUFACTURING METHOD

#135
20210362291
2021-11-25

Filter apparatus for semiconductor device fabrication process

#136
20210348030
2021-11-11

Polishing liquid

#137
20210343538
2021-11-04

CMP system and method of use

#138
20210332264
2021-10-28

NOVEL POLISHING VEHICLES AND COMPOSITIONS WITH TUNABLE VISCOSITY

#139
20210331286
2021-10-28

Platen rotation device

#140
20210324238
2021-10-21

Hard abrasive particle-free polishing of hard materials

#141
20210301173
2021-09-30

Polishing composition based on mixture of colloidal silica particles

#142
20210261825
2021-08-26

Chemical mechanical polishing composition, chemical mechanical polishing slurry and method for polishing substrate

#143
20210261824
2021-08-26

Polishing agent, polishing method, and liquid additive for polishing

#144
20210261822
2021-08-26

Barrier ruthenium chemical mechanical polishing slurry

#145
20210253904
2021-08-19

POLISHING COMPOSITIONS AND METHODS OF USE THEREOF

#146
20210246334
2021-08-12

POLISHING COMPOSITION, METHOD FOR PRODUCING POLISHING COMPOSITION, POLISHING METHOD, AND METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE

#147
20210220962
2021-07-22

Chemical Mechanical Polishing Apparatus and Method

#148
20210206920
2021-07-08

Derivatized polyamino acids

#149
20210189177
2021-06-24

Polishing composition and method for producing same

#150
20210189175
2021-06-24

POLISHING SYSTEMS AND METHOD OF MAKING AND USING SAME

#151
20210179890
2021-06-17

Low oxide trench dishing shallow trench isolation chemical mechanical planarization polishing

#152
20210166967
2021-06-03

SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

#153
20210163787
2021-06-03

Neutral to alkaline chemical mechanical polishing compositions and methods for tungsten

#154
20210130650
2021-05-06

Chemical mechanical polishing slurry composition and method of polishing metal layer

#155
20210115300
2021-04-22

COMPOSITION AND METHOD FOR SILICON OXIDE AND CARBON DOPED SILICON OXIDE CMP

#156
20210115299
2021-04-22

COMPOSITION AND METHOD FOR DIELECTRIC CMP

#157
20210115297
2021-04-22

Polishing composition and method with high selectivity for silicon nitride and polysilicon over silicon oxide

#158
20210108106
2021-04-15

Polishing compositions and methods of use thereof

#159
20210079263
2021-03-18

HIGH MOLECULAR WEIGHT POLYVINYL PYRROLIDONE FOR LOW-K REMOVAL RATE SUPPRESION

#160
20210071037
2021-03-11

Polishing liquid, polishing liquid set and polishing method

#161
20210071036
2021-03-11

Polishing composition

#162
20210071034
2021-03-11

Method of selective chemical mechanical polishing cobalt, zirconium oxide, poly-silicon and silicon dioxide films

#163
20210062043
2021-03-04

Composition and method for polysilicon CMP

#164
20210060728
2021-03-04

Vacuum Assembly for Chemical Mechanical Polishing

#165
20210054233
2021-02-25

Polishing liquid, polishing liquid set, and polishing method

#166
20210028024
2021-01-28

Metal structure and method of manufacturing the same and metal wire and semiconductor device and electronic device

#167
20210024780
2021-01-28

Polishing composition, manufacturing method of polishing composition, polishing method, and manufacturing method of semiconductor substrate

#168
20210017422
2021-01-21

Polishing liquid, polishing liquid set, and polishing method

#169
20200399504
2020-12-24

Polishing agent for synthetic quartz glass substrate and method for polishing synthetic quartz glass substrate

#170
20200392376
2020-12-17

POLISHING COMPOSITION AND POLISHING METHOD

#171
20200392375
2020-12-17

Slurry composition and method of manufacturing integrated circuit device by using the same

#172
20200388501
2020-12-10

Method of reducing semiconductor substrate surface unevenness

#173
20200384600
2020-12-10

Thin film fluoropolymer composite CMP polishing method

#174
20200381262
2020-12-03

Atmospheric plasma in wafer processing system optimization

#175
20200369919
2020-11-26

Polishing liquid composition for silicon oxide film

#176
20200369918
2020-11-26

POLISHING SOLUTION AND POLISHING METHOD

#177
20200369917
2020-11-26

Polishing solution and polishing method

#178
20200362198
2020-11-19

Chemical mechanical polishing composition and method of polishing silicon nitride over silicon dioxide and simultaneously inhibiting damage to silicon dioxide

#179
20200331115
2020-10-22

Polishing pad and method for producing the same, and method for producing polished product

#180
20200308446
2020-10-01

Compositions for polishing cobalt and low-K material surfaces

#181
20200308445
2020-10-01

Chemical mechanical polishing method for cobalt with high cobalt removal rates and reduced cobalt corrosion

#182
20200306922
2020-10-01

Method of polishing silicon wafer

#183
20200299543
2020-09-24

POLISHING COMPOSITION

#184
20200255690
2020-08-13

Chemical mechanical polishing of tungsten using a method and composition containing quaternary phosphonium compounds

#185
20200239734
2020-07-30

Acid polishing composition and method of polishing a substrate having enhanced defect inhibition

#186
20200231451
2020-07-23

Production method for dispersion liquid of silica particle

#187
20200198091
2020-06-25

Tools for polishing and refinishing concrete and methods for using the same

#188
20200194278
2020-06-18

Roughness reduction methods for materials using illuminated etch solutions

#189
20200181453
2020-06-11

Method of polishing substrate and polishing composition set

#190
20200176264
2020-06-04

Wafer polishing with separated chemical reaction and mechanical polishing

#191
20200164482
2020-05-28

Multi-layered windows for use in chemical-mechanical planarization systems

#192
20200161141
2020-05-21

Polishing slurry and method of manufacturing semiconductor device

#193
20200157381
2020-05-21

Polishing additive composition, polishing slurry composition and method for polishing insulating film of semiconductor element

#194
20200152471
2020-05-14

Polishing method

#195
20200147752
2020-05-14

Platen rotation method

#196
20200131415
2020-04-30

Method for manufacturing polishing particles and method for polishing synthetic quartz glass substrate

#197
20200131404
2020-04-30

Suppressing SiN removal rates and reducing oxide trench dishing for Shallow Trench Isolation (STI) process

#198
20200123413
2020-04-23

Polishing composition and polishing method

#199
20200102479
2020-04-02

HARD ABRASIVE PARTICLE-FREE POLISHING OF HARD MATERIALS METHOD

#200
20200102477
2020-04-02

Polishing composition, polishing method, and method of producing substrate

#201
20200101580
2020-04-02

Vacuum assembly for chemical mechanical polishing

#202
20200086452
2020-03-19

Chemical mechanical polishing apparatus and methods

#203
20200079975
2020-03-12

Slurry composition and method of selective silica polishing

#204
20200058482
2020-02-20

METHOD FOR POLISHING SILICON CARBIDE SUBSTATE

#205
20200056069
2020-02-20

Polishing composition and method utilizing abrasive particles treated with an aminosilane

#206
20200048551
2020-02-13

Chemical mechanical planarization composition for polishing oxide materials and method of use thereof

#207
20200043748
2020-02-06

Slurry recycling for chemical mechanical polishing system

#208
20200043746
2020-02-06

Chemical mechanical polishing apparatus

#209
20200032108
2020-01-30

Chemical mechanical planarization of films comprising elemental silicon

#210
20200032104
2020-01-30

Method for polishing glass substrate, method for manufacturing glass substrate, method for manufacturing magnetic-disk glass substrate, method for manufacturing magnetic disk, polishing liquid, and method for reducing cerium oxide

#211
20200017717
2020-01-16

CERIUM OXIDE ABRASIVE GRAINS

#212
20200010726
2020-01-09

Neutral to alkaline chemical mechanical polishing compositions and methods for tungsten

#213
20200002575
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Composite Particles, Method of Refining and Use Thereof

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POLISHING COMPOSITION, METHOD FOR PRODUCING SAME, AND MAGNETIC POLISHING METHOD

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Polishing of electrostatic substrate support geometries

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Chemical mechanical polishing apparatus and method

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Chemical mechanical polishing composition and method

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CHEMICAL MECHANICAL POLISHING SLURRY AND APPLICATION THEREOF

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Method for polishing silicon substrate and polishing composition set

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Method of chemical mechanical polishing a substrate

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POLISHING COMPOSITION AND METHOD FOR POLISHING SILICON SUBSTRATE

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