44767 ⎘
Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
Slurry, polishing liquid set, polishing liquid, method for polishing substrate, and substrate
#302Polishing agent for synthetic quartz glass substrate and method for polishing synthetic quartz glass substrate
#303Polishing composition for silicon wafer and polishing method
#304Polishing composition
#305Polishing agent, stock solution for polishing agent, and polishing method
#306METHOD FOR POLISHING SILICON WAFER AND SURFACE TREATMENT COMPOSITION
#307POLISHING COMPOSITION, POLISHING METHOD, AND METHOD FOR MANUFACTURING HARD BRITTLE MATERIAL SUBSTRATE
#308POLISHING COMPOSITION
#309Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates
#310Surface treatment in a chemical mechanical process
#311Additives for barrier chemical mechanical planarization
#312Composition and Method Used for Chemical Mechanical Planarization of Metals
#313Polishing composition comprising an amine-containing surfactant
#314Chemical mechanical polishing (CMP) of cobalt-containing substrate
#315Modified colloidal silica and method for producing the same, and polishing agent using the same
#316Chemical-mechanical processing slurry and methods for processing a nickel substrate surface
#317POLISHING COMPOSITION
#318Silicon carbide substrate, method for producing same, and method for manufacturing silicon carbide semiconductor device
#319CMP slurry composition for polishing copper and polishing method using the same
#320Semiconductor treatment composition and treatment method
#321Polishing composition
#322Polishing method and polishing composition
#323Polishing composition and polishing method
#324Chemical mechanical polishing apparatus and methods
#325POLISHING COMPOSITION, METHOD FOR MANUFACTURING SAME, AND POLISHING METHOD
#326Polishing composition for silicon oxide film
#327Composite particles, method of refining and use thereof
#328Cobalt polishing accelerators
#329Silicon wafer polishing composition
#330POLISHING COMPOSITION AND METHOD FOR PRODUCING POLISHING COMPOSITION
#331Concrete cutting, polishing, and coloring treatment solutions and methods
#332Lubricated mechanical polishing
#333POLISHING SOLUTIONS AND METHODS OF USING SAME
#334Polishing composition comprising cationic polymer additive
#335Polishing liquid for CMP, polishing liquid set for CMP, and polishing method
#336CMP polishing liquid and polishing method
#337Polishing composition and polishing method using the same
#338POLISHING LIQUID AND METHOD FOR POLISHING SUBSTRATE USING THE POLISHING LIQUID
#339Slurry composition for chemical mechanical polishing, method of preparing the same, and polishing method using the same
#340Method for polishing GaN single crystal material
#341Slurry composition for chemical mechanical polishing of GE-based materials and devices
#342Composition for polishing silicon wafers
#343POLISHING COMPOSITION
#344Selective nitride slurries with improved stability and improved polishing characteristics
#345Polishing composition and method utilizing abrasive particles treated with an aminosilane
#346Polishing composition containing ceria abrasive
#347CMP polishing agent, method for manufacturing thereof, and method for polishing substrate
#348POLISHING COMPOSITION FOR HARD MATERIALS
#349Polishing composition and method for polishing magnetic disk substrate
#350Polishing composition and method for polishing magnetic disk substrate
#351Methods and compositions for processing dielectric substrate
#352Polishing agent and method for polishing substrate using the polishing agent
#353Polishing composition
#354Chemical mechanical polishing pad and method of making same
#355Method of making composite polishing layer for chemical mechanical polishing pad
#356Substrate processing method
#357Chemical mechanical polishing pad composite polishing layer formulation
#358Composite polishing layer chemical mechanical polishing pad
#359Polishing abrasive particle, production method therefore, polishing method, polishing device, and slurry
#360Manufacturing method of semiconductor device
#361Metal oxide-polymer composite particles for chemical mechanical planarization
#362Abrasive, abrasive set, and method for polishing substrate
#363Low dishing copper chemical mechanical planarization
#364POLISHING COMPOSITION
#365Slurry, polishing solution set, polishing solution, and substrate polishing method
#366Cerium oxide abrasive, method for producing cerium oxide abrasive, and polishing method
#367CMP PAD DRESSER HAVING LEVELED TIPS AND ASSOCIATED METHODS
#368Polishing composition containing ceria abrasive
#369Polishing composition containing ceria particles and method of use
#370Composition and method for polishing memory hard disks exhibiting reduced edge roll-off
#371Multi-layered polishing pads
#372Composite ceramic abrasive polishing solution
#373Polishing composition and method for producing same
#374Polishing composition and method for producing same
#375Silica for CMP, aqueous dispersion, and process for producing silica for CMP
#376METHOD OF FINISHING PRE-POLISHED GLASS SUBSTRATE SURFACE
#377Kit for polishing sapphire surfaces
#378Polishing liquid for CMP, and polishing method
#379Concrete cutting, polishing and coloring treatment solutions and methods
#380Method for manufacturing glass substrate, method for manufacturing magnetic disk, and polishing liquid composition for glass substrate
#381Cobalt polishing accelerators
#382Slurry for chemical mechanical polishing of cobalt
#383Cobalt dishing control agents
#384CMP POLISHING SOLUTION AND POLISHING METHOD USING SAME
#385Use of a chemical-mechanical polishing (CMP) composition for polishing a substrate or layer containing at least one III-V material
#386Chemical mechanical planarization slurry composition comprising composite particles, process for removing material using said composition, CMP polishing pad and process for preparing said composition
#387Composition for tungsten CMP
#388Composition and method used for chemical mechanical planarization of metals
#389Slurry composition for chemical mechanical polishing of Ge-based materials and devices
#390Polishing of hard substrates with soft-core composite particles
#391Slurry for Selective Chemical Mechanical Polishing of Copper
#392Polishing composition
#393Polishing composition and method for producing polished article
#394Methods for fabricating a chemical-mechanical polishing composition
#395METHOD FOR POLISHING ALLOY MATERIAL AND METHOD FOR MANUFACTURING ALLOY MATERIAL
#396Planarization method and planarization apparatus
#397Polishing composition
#398Group III nitride wafers and fabrication method and testing method
#399Group III nitride wafers and fabrication method and testing method
#400POLISHING COMPOSITION
#401Polishing slurry including zirconia particles and a method of using the polishing slurry
#402Polishing composition for edge roll-off improvement
#403Polishing composition
#404Polishing slurry preventing agglomeration of charged colloids without loss of surface activity
#405Composition for tungsten buffing
#406Workpiece processing method
#407Polishing composition and method for producing substrate
#408Systems and methods for performing chemical mechanical planarization
#409Polishing composition and method utilizing abrasive particles treated with an aminosilane
#410Chemical mechanical planarization apparatus and methods
#411Polishing agent, polishing method, and manufacturing method of semiconductor integrated circuit device
#412MANUFACTURING METHOD OF POLISHING AGENT, POLISHING METHOD, AND MANUFACTURING METHOD OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
#413POLISHING COMPOSITION, MANUFACTURING PROCESS THEREFOR, UNDILUTED LIQUID, PROCESS FOR PRODUCING SILICON SUBSTRATE, AND SILICON SUBSTRATE
#414Composition and method for chemical mechanical polishing
#415MANUFACTURING METHOD OF GLASS SUBSTRATE FOR MAGNETIC DISK, MAGNETIC DISK, AND MAGNETIC DATA RECORDING/REPRODUCING DEVICE
#416Polishing composition
#417Slurry, polishing-solution set, polishing solution, substrate polishing method, and substrate
#418Systems and methods for chemical mechanical planarization with fluorescence detection
#419Slurry, polishing-solution set, polishing solution, substrate polishing method, and substrate
#420Polishing composition, polishing method using same, and method for producing substrate
#421Polishing liquid composition for wafers
#422Polishing composition and method for nickel-phosphorous coated memory disks
#423Slurry, polishing-solution set, polishing solution, substrate polishing method, and substrate
#424Abrasive composition and method for producing semiconductor substrate
#425Polishing composition, manufacturing process therefor, process for production of silicon substrate, and silicon substrate
#426Polishing composition and method using said polishing composition to manufacture compound semiconductor substrate
#427Method of polishing a new or a refurbished electrostatic chuck
#428Liquid suspensions and powders of cerium oxide particles and preparation and polishing applications thereof
#429POLISHING COMPOSITION AND METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE
#430Polishing liquid for metal and polishing method
#431CMP compositions selective for oxide and nitride with high removal rate and low defectivity
#432Polishing composition
#433Polishing composition
#434Polishing composition, and polishing method and substrate production method using same
#435Polishing composition
#436ADDITIVE FOR POLISHING AGENT, AND POLISHING METHOD
#437POLISHING COMPOSITION
#438Composition for polishing purposes, polishing method using same, and method for producing substrate
#439Colloidal silica polishing composition and method for manufacturing synthetic quartz glass substrates using the same
#440Methods of polishing sapphire surfaces
#441Composition and method for polishing glass
#442Polishing slurry and polishing method
#443Methods for grinding and polishing dried concrete using amorphous colloidal silica solution
#444Planarization method and planarization apparatus
#445Refurbished component, electronic device including the same, and method of refurbishing a component of an electronic device
#446Polishing composition, polishing method using same, and method for producing semiconductor device
#447Polypyrrolidone polishing composition and method
#448Methods of polishing sapphire surfaces
#449METHODS OF POLISHING SAPPHIRE SURFACES
#450METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
#451ABRASIVE AND POLISHING COMPOSITION
#452CMP polishing fluid, method for manufacturing same, method for manufacturing composite particle, and method for polishing base material
#453Polishing composition, method for fabricating thereof and method of chemical mechanical polishing using the same
#454Ceramic composite for light conversion and method for manufacture thereof
#455Polishing composition
#456METHOD FOR MANUFACTURING MAGNETIC DISC SUBSTRATE
#457Polishing composition and polishing method using the same
#458Polishing liquid and method for polishing substrate using the polishing liquid
#459Polishing agent and method for polishing substrate using the polishing agent
#460Manufacture of synthetic quartz glass substrate
#461Polishing composition and polishing method
#462PROCESS FOR PRODUCING POLISHING LIQUID COMPOSITION
#463Composition for polishing and composition for rinsing
#464Slurry, polishing liquid set, polishing liquid, method for polishing substrate, and substrate
#465POLISHING AGENT AND POLISHING METHOD
#466Method of preparing substrate
#467Method for chemical planarization and chemical planarization apparatus
#468SURFACE TREATMENT METHOD OF POLISHING PAD AND POLISHING METHOD OF WAFER USING THE SAME
#469Polishing method and polishing apparatus
#470Polishing liquid composition
#471Process for producing glass substrate for information recording medium
#472Manufacturing method of glass substrate for magnetic disk, magnetic disk, and magnetic recording / reproducing device
#473Polishing composition and polishing method
#474Method for polishing silicon wafer and polishing liquid therefor
#475POLISHING SLURRY, POLISHING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
#476Polishing solution for copper polishing, and polishing method using same
#477POLISHING SLURRY AND POLISHING METHOD THEREFOR
#478CHEMICAL MECHANICAL POLISHING AQUEOUS DISPERSION AND CHEMICAL MECHANICAL POLISHING METHOD USING SAME
#479COPPER ALLOY FOR ELECTRONIC MATERIAL AND METHOD OF MANUFACTURE FOR SAME
#480Slurry, polishing liquid set, polishing liquid, method for polishing substrate, and substrate
#481Slurry, polishing liquid set, polishing liquid, method for polishing substrate, and substrate
#482Slurry, polishing fluid set, polishing fluid, and substrate polishing method using same
#483Device and Method for Measuring Physical Parameters of Slurry and Chemical Mechanical Polishing Apparatus Comprising the Device
#484Polishing liquid for CMP and polishing method using the same
#485METHOD FOR RECLAIMING SEMICONDUCTOR WAFER AND POLISHING COMPOSITION
#486Compositions for polishing silicon-containing substrates
#487Method of manufacturing semiconductor device
#488Method of manufacturing a glass substrate for a magnetic disk and method of manufacturing a magnetic disk
#489POLISHING SLURRY FOR SILICON CARBIDE AND POLISHING METHOD THEREFOR
#490ABRASIVE MATERIAL
#491CMP polishing solution and polishing method
#492CHEMICAL-MECHANICAL POLISHING LIQUID, AND SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD AND POLISHING METHOD USING SAID POLISHING LIQUID
#493Polishing slurry including zirconia particles and a method of using the polishing slurry
#494Polishing agent for copper polishing and polishing method using same
#495Polishing liquid composition for magnetic disk substrate
#496POLISHING COMPOSITION AND POLISHING METHOD
#497Polishing agent, concentrated one-pack type polishing agent, two-pack type polishing agent and method for polishing substrate
#498Polishing composition for silicon wafers
#499COMPOSITIONS AND METHODS FOR MODIFYING A SURFACE SUITED FOR SEMICONDUCTOR FABRICATION
#500Method of polishing a silicon wafer
#501Polishing liquid composition
#502Method for chemical mechanical planarization of a tungsten-containing substrate
#503Polishing agent for copper polishing and polishing method using same
#504SYNTHETIC QUARTZ GLASS SUBSTRATE POLISHING SLURRY AND MANUFACTURE OF SYNTHETIC QUARTZ GLASS SUBSTRATE USING THE SAME
#505Method of manufacturing perpendicular magnetic recording medium substrate and perpendicular magnetic recording medium substrate manufactured by the same
#506Chemical planarization of copper wafer polishing
#507TWO STEP CHEMICAL-MECHANICAL POLISHING PROCESS
#508Method for the double-side polishing of a semiconductor wafer
#509Liquid suspensions and powders of cerium oxide particles and preparation and polishing applications thereof
#510SLURRY MANUFACTURING METHOD, SLURRY AND POLISHING METHOD AND APPARATUS USING SLURRY
#511POLISHING LIQUID COMPOSITION FOR MAGNETIC DISK SUBSTRATE
#512Polishing composition and polishing method using the same
#513Polishing solution for CMP, and method for polishing substrate using the polishing solution for CMP
#514Polishing liquid and polishing method
#515Forming conductive features of electronic devices
#516METHOD FOR MANUFACTURING GLASS SUBSTRATE FOR MAGNETIC DISK
#517Germanium layer polishing
#518Polishing agent and method for polishing substrate using the polishing agent
#519POLISHING LIQUID FOR CMP AND POLISHING METHOD
#520POLISHING COMPOSITION AND POLISHING METHOD
#521POLISHING OIL SLURRY FOR POLISHING HARD CRYSTAL SUBSTRATE
#522Methods for producing and processing semiconductor wafers
#523Polishing composition and polishing method
#524Method for chemical mechanical polishing a substrate
#525COMPOSITION, METHOD AND PROCESS FOR POLISHING A WAFER
#526GLASS POWDERS, METHODS FOR PRODUCING GLASS POWDERS AND DEVICES FABRICATED FROM SAME
#527AEROSOL METHOD AND APPARATUS, PARTICULATE PRODUCTS, AND ELECTRONIC DEVICES MADE THEREFROM
#528CMP POLISHING LIQUID AND METHOD FOR POLISHING SUBSTRATE USING THE SAME
#529POLISHING COMPOSITION
#530COMPOSITIONS AND METHODS FOR CHEMICAL-MECHANICAL POLISHING OF PHASE CHANGE MATERIALS
#531Method for fabricating semiconductor device
#532Polymer particles having improved mechanical properties and applications of same
#533POLISHING COMPOSITION AND METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
#534WATER-BASED POLISHING SLURRY FOR POLISHING SILICON CARBIDE SINGLE CRYSTAL SUBSTRATE, AND POLISHING METHOD FOR THE SAME
#535Metal polishing slurry and chemical mechanical polishing method
#536Polishing liquid composition
#537Methods and compositions for polishing silicon-containing substrates
#538CMP POLISHING SLURRY, ADDITIVE LIQUID FOR CMP POLISHING SLURRY, AND SUBSTRATE-POLISHING PROCESSES USING THE SAME
#539Cerium oxide powder, method for preparing the same, and CMP slurry comprising the same
#540METHODS OF POLISHING AN OBJECT USING SLURRY COMPOSITIONS
#541AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING, PRODUCTION METHOD THEREOF, AND CHEMICAL MECHANICAL POLISHING METHOD
#542AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING, CHEMICAL MECHANICAL POLISHING METHOD, AND KIT FOR PREPARING AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING
#543Polishing composition containing polyether amine
#544SEMICONDUCTOR DEVICE MANUFACTURING METHOD
#545PROCESS FOR PRODUCING GLASS SUBSTRATE FOR MAGNETIC DISKS
#546Compositions for polishing aluminum/copper and titanium in damascene structures
#547Polishing fluid composition
#548Polishing Composition and Polishing Method Using The Same
#549POLISHING AGENT FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, POLISHING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
#550POLISHING AGENT FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, POLISHING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
#551Polishing Composition and Polishing Method Using The Same
#552Polishing Composition and Polishing Method
#553System, method and apparatus for lapping workpieces with soluble abrasives
#554CHEMICAL MECHANICAL POLISHING AND WAFER CLEANING COMPOSITION COMPRISING AMIDOXIME COMPOUNDS AND ASSOCIATED METHOD FOR USE
#555COMPOSITIONS AND METHODS FOR RUTHENIUM AND TANTALUM BARRIER CMP
#556Polishing slurry for metal, and polishing method
#557CMP Polishing Liquid and Polishing Method
#558POLISHING COMPOSITION
#559Polishing composition and method utilizing abrasive particles treated with an aminosilane
#560Low pH barrier slurry based on titanium dioxide
#561Reverse Shallow Trench Isolation Process
#562Ruthenium CMP compositions and methods
#563Free radical-forming activator attached to solid and used to enhance CMP formulations
#564Method for polishing a substrate composed of semiconductor material
#565Method of producing a glass substrate for a mask blank by polishing with an alkaline polishing liquid that contains colloidal silica abrasive grains
#566Polishing composition for semiconductor wafer and polishing method
#567Alumina-film-polishing composition and chemical mechanical polishing method using the same
#568Compositions, methods and systems for polishing aluminum oxide and aluminum oxynitride substrates
#569Composition and method used for chemical mechanical planarization of metals
#570High throughput chemical mechanical polishing composition for metal film planarization
#571Coated nickel-containing powders
#572CHEMICAL MECHANICAL POLISHING METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
#573Polishing slurry for aluminum and aluminum alloys
#574POLISHING COMPOUND, METHOD FOR POLISHING SURFACE TO BE POLISHED, AND PROCESS FOR PRODUCING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
#575Planarization polishing method and method for manufacturing semiconductor device
#576Method for immobilizing ligands and organometallic compounds on silica surface, and their application in chemical mechanical planarization
#577Methods for machine ceramics
#578Chemical mechanical polishing process and method of fabricating semiconductor device using the same
#579Method of polishing hard crystal substrate
#580Method for Producing Polishing Agent, Polishing Agent Produced Thereby and Method for Producing Silicon Wafer
#581Composition and method for damascene CMP
#582MEMBRANE ELECTRODE ASSEMBLIES FOR USE IN FUEL CELLS
#583Polishing compound for semiconductor integrated circuit device, polishing method and method for producing semiconductor integrated circuit device
#584Polishing compound for semiconductor integrated circuit device, polishing method and method for producing semiconductor integrated circuit device
#585Polishing composition and polishing method
#586DUAL REDUCED AGENTS FOR BARRIER REMOVAL IN CHEMICAL MECHANICAL POLISHING
#587COMPOSITION FOR POLISHING A SUBSTRATE
#588METHOD FOR CONTROLLING THE DISHING PROBLEM ASSOCIATED WITH CHEMICAL-MECHANICAL PLANARIZATION (CMP) DURING MANUFACTURE OF COPPER MULTILAYER INTERCONNECTION STRUCTURES IN ULTRA LARGE-SCALE INTEGRATED CIRCUITS (ULSI)
#589Compositions and methods for modifying a surface suited for semiconductor fabrication
#590Rate-enhanced CMP compositions for dielectric films
#591Polishing slurry and polishing method
#592Polishing slurry and polishing method
#593Method for polishing a substrate surface
#594Palladium-containing particles, method and apparatus of manufacturing palladium-containing devices made therefrom
#595Aerosol method and apparatus, particulate products, and electronic devices made therefrom
#596Aerosol method and apparatus, particulate products, and electronic devices made therefrom
#597Pre-coated particles for chemical mechanical polishing
#598Polishing composition containing polyether amine
#599Lapping Composition and Method Using Same
#600CMP method for copper-containing substrates