44778 ⎘
Lapping machines or devices; Accessories; Lapping tools; Lapping plates for working plane surfaces characterised by the composition or properties of the plate materials
SUBSTRATE POLISHING APPARATUS
#2SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL METHOD, AND PROGRAM
#3POLISHING SYSTEM WITH PLATEN FOR SUBSTRATE EDGE CONTROL
#4POLISHING APPARATUS AND POLISHING METHOD
#5GRINDING DISC AND SUBSTRATE CLEANING DEVICE
#6PAD CONDITIONER WITH POLYMER BACKING PLATE
#7FLUORINATED POLYUREA COPOLYMER PAD
#8MULTIPLE POLISHING HEADS WITH CROSS-ZONE PRESSURE ELEMENT DISTRIBUTIONS FOR CMP
#9Process for making anti-reflective optical glass and product thereof
#10SURFACE PLATE FOR POLISHING DEVICE, AND POLISHING DEVICE AND POLISHING METHOD
#11Substrate transporter and substrate processing apparatus including substrate transporter
#12APPARATUS FOR COATING A LAPPING PLATE PLATEN, AND RELATED METHODS OF USING
#13TOOL FOR MODIFYING A SUPPORT SURFACE
#14Planarization methods for packaging substrates
#15Polishing system with platen for substrate edge control
#16Apparatus for coating a lapping plate platen, and related methods of using
#17Substrate processing control system, substrate processing control method, and program
#18One or more charging members used in the manufacture of a lapping plate, and related apparatuses and methods of making
#19Polishing of electrostatic substrate support geometries
#20SURFACE PLATE FOR FINISH POLISHING, FINISH POLISHING DEVICE, AND POLISHING METHOD
#21Wafer pin chuck fabrication and repair
#22Wafer chuck featuring reduced friction support surface
#23Grinding wheel
#24Abrasive Articles with Removable Abrasive Member and Methods of Separating and Replacing Thereof
#25Lapping plate and method of making
#26Lapping plate and method of making
#27Disc containing copper for sapphire polishing, and method for preparing discs containing copper facing each other
#28Polyurethane CMP pads having a high modulus ratio
#29Wafer pin chuck fabrication and repair
#30Chemical Mechanical Polishing Slurry for Reducing Corrosion and Method of Use Therefor
#31Resin lapping plate and lapping method using the same
#32ULTRA FINE LAPPING SUBSTRATE THROUGH USE OF HARD COATED MATERIAL ON LAPPING KINEMATICS
#33Polishing systems
#34SYSTEM, METHOD AND APPARATUS FOR ELASTOMER PAD FOR FABRICATING MAGNETIC RECORDING DISKS
#35ABRASIVE ARTICLE WITH ARRAY OF GIMBALLED ABRASIVE MEMBERS AND METHOD OF USE
#36DRESSING BAR FOR EMBEDDING ABRASIVE PARTICLES INTO SUBSTRATES
#37High speed flat lapping platen
#38Polishing systems
#39Apparatus and method for reducing removal forces for CMP pads
#40Expandable polishing platen device
#41Conductive Polishing Article for Electrochemical Mechanical Polishing
#42Surface plate protecting device in CMP apparatus
#43Apparatus and method for reducing removal forces for CMP pads
#44Table of wafer polishing apparatus, method for polishing semiconductor wafer, and method for manufacturing semiconductor wafer
#45Conductive polishing article for electrochemical mechanical polishing
#46System and apparatus for achieving very high crown-to-camber ratios on magnetic sliders
#47Polishing apparatus and method
#48Method for reducing removal forces for CMP pads