83823 ⎘
Specific applications of microelectromechanical systems; Sensors Variable capacitors
MEMS DEVICE WITH RECESSED COMBS
#2FULLY SYMMETRICAL STRUCTURES FOR MICROELECTROMECHANICAL DEVICES
#3CONSTANT CHARGE OR CAPACITANCE FOR CAPACITIVE MICRO-ELECTRICAL-MECHANICAL SYSTEM SENSORS
#4MICROELECTROMECHANICAL MOTION SENSOR DEVICE HAVING A SINGLE PROOF MASS
#5METHOD FOR SENSOR STATE DETECTION, ENVIRONMENTAL SENSOR SYSTEM AND MOBILE CONSUMER DEVICE
#6REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE
#7INERTIAL SENSOR AND METHOD FOR FORMING THE SAME
#8MEMS DEVICE
#9Microelectromechanical Systems Sensor with Frequency Dependent Input Attenuator
#10Dual diaphragm dielectric sensor
#11Semiconductor Device
#12MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR OR MICROPHONE DEVICE
#13Constant charge or capacitance for capacitive micro-electrical-mechanical system sensors
#14ACOUSTIC IMAGING PROBE WITH A TRANSDUCER ELEMENT
#15PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A SINGLE SEMICONDUCTOR WAFER AND RELATED MEMS DEVICE
#16Reduction of ringing and intermodulation distortion in a MEMS device
#17QUADRATURE BIAS ERROR REDUCTION FOR VIBRATING STRUCTURE GYROSCOPES
#18Sensor package including a substrate with an inductor layer
#19Device and method for monitoring surface condition of contact surface of detected object
#20MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUSES AND RELATED METHODS
#21Waterproof MEMS button device, input device comprising the MEMS button device and electronic apparatus
#22Sensor
#23MEMS tunable capacitor comprising amplified piezo actuator and a method for making the same
#24MEMS device
#25Microelectromechanical system cavity packaging
#26Capacitive micro structure
#27Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
#28Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device
#29Microelectromechanical system cavity packaging
#30Actuator plate partitioning and control devices and methods
#31Continuous-time sensing apparatus
#32MEMS device
#33Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device
#34Impact element for a sensor device and a manufacturing method
#35Environmental sensor and manufacturing method thereof
#36Method for assembling conductive particles into conductive pathways and sensors thus formed
#37Selective conductive coating for MEMS sensors
#38Controllable integrated capacitive device
#39Antenna having MEMS-tuned RF resonators
#40RF RESONATORS WITH TUNABLE CAPACITOR AND METHODS FOR FABRICATING THE SAME
#41Semiconductor device
#42Electronic device using MEMS technology
#43MEMS DEVICE WITH A STABILIZED MINIMUM CAPACITANCE
#44MEMS device
#45Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
#46MEMS electrostatic actuator device for RF varactor applications
#47Variable capacitance device
#48Integration of active devices with passive components and MEMS devices
#49Microelectromechanical structure and device
#50Curved RF electrode for improved Cmax
#51RF MEMS electrodes with limited grain growth
#52ELECTROSTATIC DAMPING OF MEMS DEVICES
#53MEMS electrostatic actuator device for RF varactor applications
#54Reducing MEMS stiction by deposition of nanoclusters
#55Non-symmetric arrays of MEMS digital variable capacitor with uniform operating characteristics
#56CMOS integrated moving-gate transducer with silicon as a functional layer
#57Method and technique to control MEMS DVC control waveform for lifetime enhancement
#58MEMS digital variable capacitor design with high linearity
#59Micro-electro-mechanical system (MEMS) structures and design structures
#60Controllable integrated capacitive device
#61Sensor having particle barrier
#62MEMS sensor with dynamically variable reference capacitance
#63MEMS device
#64MEMS device with a stress-isolation structure
#65MEMS electrostatic actuator
#66MEMS device with sealed cavity and release chamber and related double release method
#67Microphone element and device for detecting acoustic and ultrasound signals
#68Electrostatic actuator, variable capacitance capacitor, electric switch, and method for driving electrostatic actuator
#69Reducing MEMS stiction by introduction of a carbon barrier
#70Method and apparatus for fabricating electrostatic capacitance-type acceleration sensor and electrostatic capacitance-type acceleration sensor
#71Micro-electro-mechanical system (MEMS) structures and design structures
#72Electrical device including a functional element in a cavity
#73Varactor and varactor system
#74Actuator plate partitioning and control devices and methods
#75Integrated structure with bidirectional vertical actuation
#76Variable capacitance device
#77Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
#78MEMS device with multiple electrodes and fabricating method thereof
#79CMOS integrated moving-gate transducer with silicon as a functional layer
#80Reducing MEMS stiction by deposition of nanoclusters
#81Reducing MEMS stiction by introduction of a carbon barrier
#82Microphone system with mechanically-coupled diaphragms
#83Thin film device and method for manufacturing thin film device
#84MEMS electrostatic actuator
#85Variable capacitor
#86Electronic device
#87MEMS element and method of manufacturing the same
#88Electrostatic force generator and force measurement system and accelerometer having the same
#89Micro-electro-mechanical system (MEMS) structures and design structures
#90Micro-electro-mechanical structure (MEMS) capacitor devices, capacitor trimming thereof and design structures
#91MEMS structures and methods for forming the same
#92Method of manufacturing an electromechanical transducer
#93Electrical device including a functional element in a cavity
#94METAL THIN SHIELD ON ELECTRICAL DEVICE
#95CMOS compatible MEMS microphone and method for manufacturing the same
#96MEMS and method of manufacturing the same
#97SEMICONDUCTOR DEVICE
#98MEMS ELEMENT
#99Electrostatic actuator and driving method thereof
#100MEMS structure and method for making the same
#101Capacitive sensor and actuator
#102TURNABLE CAPACITOR AND SWITCH USING MEMS WITH PHASE CHANGE MATERIAL
#103MEMS SENSOR AND ELECTRONIC APPARATUS
#104Multi-sacrificial layer and method
#105MEMS capacitive device and method of forming same
#106Microelectromechanical systems structures and self-aligned high aspect-ratio combined poly and single-crystal silicon fabrication processes for producing same
#107Micromechanical sensor having a variable capacitor and method for detecting electromagnetic radiation using same
#108Device containing plurality of smaller MEMS devices in place of a larger MEMS device
#109Electrical device including a functional element in a cavity
#110MEMS tunable capacitor based on angular vertical comb drives