83814 ⎘
Specific applications of microelectromechanical systems
Sub-classes:MEMS PROCESS AND DEVICE
#2MEMS die with sensing structures
#3MEMS process and device
#4Anti-counterfeiting methods
#5MEMS process and device
#6Integrated micro-electromechanical switches and a related method thereof
#7Nanoscale electromechanical parametric amplifier
#8Magnetometer using magnetic materials on accelerometer
#9MEMS process and device
#10Wireless power transmission system
#11MEMS process and device