83832 ⎘
Specific applications of microelectromechanical systems; Sensors Vibration sensors
Method and Device for Measuring a Voltage
#2MEMS TRANSDUCER WITH MULTILAYER DEFLECTABLE MEMBRANE
#3METHOD FOR MANUFACTURING A VIBRATORY MECHANICAL INERTIAL SENSOR, SENSOR OBTAINED BY SUCH A METHOD AND INERTIAL UNIT INCLUDING SUCH A SENSOR
#4VIBRATION SENSOR, ELECTRONIC DEVICE AND VIBRATION DETECTION METHOD
#5VIBRATION SENSOR
#6METHOD FOR SENSOR STATE DETECTION, ENVIRONMENTAL SENSOR SYSTEM AND MOBILE CONSUMER DEVICE
#7ELECTRONIC TARGET WITH MEMS SENSOR
#8ACOUSTIC DETECTION SYSTEM AND METHOD AND ASSOCIATED KINETIC ENERGY HARVESTER
#9MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VIBRATION SENSOR AND FABRICATING METHOD THEREOF
#10Micro-Electromechanical System
#11INTEGRATED DEVICE PACKAGE
#12Semiconductor Device
#13Semiconductor Device
#14MEMS DIE AND MEMS-BASED VIBRATION SENSOR
#15PIEZOELECTRIC SINGLE-CRYSTAL ELEMENT, MEMS DEVICE USING SAME, AND METHOD FOR MANUFACTURING SAME
#16Sensing module and manufacturing method thereof
#17Bone-conduction sensor assembly
#18Microelectromechanical system (MEMS) vibration sensor having a segmented backplate
#19Device, method and computer-readable recording medium for detecting earthquake in mems-based auxiliary seismic observation network
#20Vibration sensor
#21Acoustic transducer assembly
#22Overload recovery optimization in microelectromechanical system application specific integrated circuit
#23MEMS PIEZOELECTRIC TRANSDUCER HAVING OPTIMIZED CAPACITOR SHAPE
#24Method for producing damper structures on a micromechanical wafer
#25Computation devices and artificial neurons based on nanoelectromechanical systems
#26MEMS vibrator and MEMS oscillator
#27MEMS sensor structure comprising mechanically preloaded suspension springs
#28Vibration sensor with monitoring function and vibration signal monitoring method thereof
#29Vibration energy harvester
#30COMPUTATION DEVICES AND ARTIFICIAL NEURONS BASED ON NANOELECTROMECHANICAL SYSTEMS
#31Computation devices and artificial neurons based on nanoelectromechanical systems
#32Integration scheme for microelectromechanical systems (MEMS) devices and complementary metal-oxide-semiconductor (CMOS) devices
#33Segmented electrode structure for quadrature reduction in an integrated device
#34SEMICONDUCTOR SENSOR DEVICE
#35MEMS structure and method of fabricating the same
#36MEMS structure and method of fabricating the same
#37MEMS sensor structure comprising mechanically preloaded suspension springs
#38Very low power microelectromechanical devices for the internet of everything
#39Electromechanical transducer and method for manufacturing the same which suppresses lowering of sensitivity while a protective layer is formed
#40Physical quantity detection device, electronic apparatus, and moving object
#41Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure
#42Microphone element and device for detecting acoustic and ultrasound signals
#43Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer
#44Functional element, electronic apparatus, and moving object
#45Computation devices and artificial neurons based on nanoelectromechanical systems
#46Electronic device, method of manufacturing the same, and oscillator
#47Physical quantity sensor and method of making the same
#48Electromechanical transducer and method for manufacturing the same which suppresses lowering of sensitivity while a protective layer is formed
#49Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure
#50Micro-electromechanical systems (MEMS) microphone and method of manufacturing the same
#51Vibration transducer and its manufacturing method
#52Physical quantity sensor
#53VANADIUM DIOXIDE NANOWIRE, FABRICATION PROCESS THEREOF, AND NANOWIRE DEVICE USING VANADIUM DIOXIDE NANOWIRE
#54Semiconductor dynamic quantity sensor and method of manufacturing the same
#55Micro-electromechanical systems (MEMS) microphone and method of manufacturing the same
#56Electromechanical transducer and method for manufacturing the same which suppresses lowering of sensitivity while a protective layer is formed
#57Vibration sensor and method for manufacturing the vibration sensor
#58Method of making a physical quantity sensor
#59Quantum tunnelling transducer device
#60Vibrating gyrosensor and vibrating element
#61Seismic acquisition system and sensor based on MEMS sensor with low power consumption
#62Overload recovery optimization in microelectromechanical system application specific integrated circuit