Forming Antirelaxation Coatings on Interior Surfaces of Vapor Cells

Forming a Bonded Interface Using Plasma-Activated Surfaces

METHODS AND SYSTEMS FOR STACKED MICROELECTROMECHANICAL SYSTEM DEVICES

SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING THE SAME

PACKAGED MEMS DEVICE HAVING A HUMIDITY SENSOR

SEMICONDUCTOR DIE WITH SENSOR SECTION LOCATED AT THE EDGE

PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF

Force detection foil sensor with direct force transducer

MEMS SENSOR DEVICE AND SENSING METHOD

METHOD OF MANUFACTURE AND ASSEMBLY OF XY FLEXURE MECHANISM ASSEMBLY

WAFER-LEVEL PACKAGING STRUCTURE, MANUFACTURING METHOD THEREFOR, AND SENSOR

MICROELECTROMECHANICAL DEVICE FOR IMAGE SENSOR STABILIZATION PURPOSES

MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND METHODS OF MANUFACTURING THE SAME

THERMAL EMITTER, METHOD FOR OPERATING A THERMAL EMITTER AND MEMS GAS/FLUID SENSOR

MEMS PACKAGING ENABLING VERTICAL DISPLACEMENT OF SENSOR AND ACTUATOR ROTOR

MICROSCALE FLEXIBLE STRAIN SENSOR

AIRFLOW SENSOR AND AIRFLOW SENSOR PACKAGING STRUCTURE

SENSOR

MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SENSOR

DIFFERENTIAL MEASUREMENT OF IR ABSORPTION IN PLASMONIC MEMS SENSORS

SENSING ELEMENT AND RELATED METHODS

ENVIRONMENTAL SENSOR AND METHOD FOR OPERATING AN ENVIRONMENTAL SENSOR

ELECTROCHEMISTRY MICROSCOPY BIPOLAR REFERENCE ELECTRODE ASSEMBLY

WAFER LEVEL PROXIMITY SENSOR AND METHOD OF MAKING SAME

STRAIN SENSOR SWITCH FOR TIMING BASED SENSING

HYDROGEN SENSOR, HYDROGEN DETECTING METHOD, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM

MEMS DEVICE HAVING AN IMPROVED CAP AND MANUFACTURING PROCESS THEREOF

ELECTRICAL VOLTAGE MEASURING DEVICE USING AN MICROELECTROMECHANICAL SYSTEM AND OPTICAL INTERFEROMETER INTERACTION

MEMS SENSOR, MEMS MICROPHONE, ELECTRONIC CIGARETTE

Reduced light reflection package

MEMS GAS SENSOR AND ARRAY THEREOF, AND GAS DETECTION AND PREPARATION METHOD

METHODS OF MANUFACTURING PLASMA GENERATING CELLS FOR A PLASMA SOURCE

PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF

PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF

PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF

SENSING ELEMENT AND RELATED METHODS

HYDROGEN SENSOR, HYDROGEN DETECTING METHOD, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM

ENVIRONMENTAL SYSTEM-IN-PACKAGE FOR HARSH ENVIRONMENTS

PHOTOACOUSTIC SENSORS AND MEMS DEVICES

Sensing module and manufacturing method thereof

Sensor Device with Cover Layer

Force-measuring device assembly for a portable electronic apparatus, a portable electronic apparatus, and a method of modifying a span of a sense region in a force-measuring device assembly

Passive micromechanical counter

MICROELECTROMECHANICAL HEATING DEVICE

Diagnosis of electrical failures in capacitive sensors

Capacitance gap measurement

MULTIPLY ENCAPSULATED MICRO ELECTRICAL MECHANICAL SYSTEMS DEVICE

Reduced light reflection package

MICROMECHANICAL DEVICE FOR TRANSDUCING ACOUSTIC WAVES IN A PROPAGATION MEDIUM

Detachable MEMS package top cover

INTEGRATED MEMS-CMOS ULTRASONIC SENSOR

Semiconductor structure and manufacturing method thereof

Mass flow control based on micro-electromechanical devices

Micro-electromechanical device for use in a flow control apparatus

Packaged device with die wrapped by a substrate

SEMICONDUCTOR DIE WITH SENSOR SECTION LOCATED AT THE EDGE

MICRON-RESOLUTION SOFT STRETCHABLE STRAIN AND PRESSURE SENSOR

DIFFERENTIAL MEASUREMENT OF IR ABORPTION IN PLASMONIC MEMS SENSORS

Analysis method of a device, performed through a MEMS sensor, and system thereof including the device and the MEMS sensor

Photoacoustic sensors and MEMS devices

Packaged environmental sensor

MEMS device with particle filter and method of manufacture

Waterproof MEMS button device, input device comprising the MEMS button device and electronic apparatus

Semiconductor sensor and method of manufacturing the same

Package level thermal gradient sensing

Semiconductor device

Packaged device with die wrapped by a substrate

MEMS apparatus with anti-stiction layer

Aircraft air contaminant analyzer and method of use

Integrated sensor apparatus with pressure sensing element and flow sensing element

MEMS gas sensor

3D-structured sensors having stretchable multi-functional tactile electronic hairs

MEMS gas sensor

Force sensor having first and second circuit board arrangements

System and method for mems sensor system synchronization

Method of fabricating a micro machined channel

Semiconductor sensor and method of manufacturing the same

Inclination sensor system

Coating monitoring system of wind turbines and operating method thereof

Molded lead frame sensor package

SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THE SAME

Microelectronic sensor device with an out-of-plane detection having a controlled cross sensitivity

Device for suppressing stray radiation

High-range semiconductor load sensor device

Micro Devices Formed by Flex Circuit Substrates

Hydrogen sensor, hydrogen detecting method, and non-transitory computer-readable storage medium

Semiconductor device and method of producing a semiconductor device

MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS

Method of stiction prevention by patterned anti-stiction layer

Deformable membrane and a compensating structure thereof

Semiconductor package with multiple compartments

Micro-structured organic sensor device and method for manufacturing same

System and method for MEMS sensor system synchronization

Device comprising a micro-electro-mechanical system substrate with protrusions of different heights that has been integrated with a complementary metal-oxide-semiconductor substrate

Semiconductor package with air cavity

Sensing devices, sensors, and methods for monitoring environmental conditions

Self-cleaning liquid level sensor

Sensor assembly and arrangement and method for manufacturing a sensor assembly

Microfluidic device with manifold

Micro devices formed by flex circuit substrates

Test structure and manufacturing method therefor

Multi-device transducer module, apparatus including the transducer module and method of manufacturing the transducer module

Method of stiction prevention by patterned anti-stiction layer

Acoustic sensor integrated MEMS microphone structure and fabrication method thereof

MEMS strain gauge sensor and manufacturing method

Method for protecting a MEMS unit against infrared investigations and MEMS unit

MEMS DEVICE PACKAGE AND METHOD FOR PACKAGING MEMS DEVICE

Flexible electronics for wearable healthcare sensors

PRESSURE SENSOR, PRESSURE SENSOR MODULE, ELECTRONIC APPARATUS, AND VEHICLE

MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS

Multi-device transducer modulus, electronic apparatus including the transducer modulus and method for manufacturing the transducer modulus

MULTIPLE DEGREE OF FREEDOM MEMS SENSOR CHIP AND METHOD FOR FABRICATING THE SAME

Semiconductor device package including cover including tilted inner sidewall

Semiconductor sensor and method of manufacturing the same

MEMS sensor with high voltage switch

Low cost small force sensor

MEMS sensor device package housing with an embedded controllable device

Structure to reduce backside silicon damage

Multi-device transducer module, apparatus including the transducer module and method of manufacturing the transducer module

Deformable apparatus and method

Atomic Layer Deposition Layer for a Microelectromechanical system (MEMS) Device

PRESSURE SENSOR, PRODUCTION METHOD FOR PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT

Multiple MEMS device and methods

Anodically bonded vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT)

Method for forming a multielectrode conformal penetrating array

Integrated package containing MEMS acoustic sensor and environmental sensor and methodology for fabricating same

Tiled CMUT dies with pitch uniformity

Very low power microelectromechanical devices for the internet of everything

MICROFABRICATED OPTICAL APPARATUS WITH INTEGRATED TURNING SURFACE

Sensor component having two sensor functions

Semiconductor device package for reducing parasitic light and method of manufacturing the same

Trench based capacitive humidity sensor

MEMS device and fabrication method thereof

Open cavity package using chip-embedding technology

Microstructure plating systems

Packaged sensor assembly

MEMS sensor with high voltage switch

GYROSCOPE AND IMAGE SENSOR SYNCHRONIZATION

Miniaturized and ruggedized wafer level MEMs force sensors

Integrated MEMS system

Structure to reduce backside silicon damage

SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING DEVICE

Electromechanical device including a suspended structure and method of fabricating the same

Actuator, shutter device, fluid control device, switch, and two-dimensional scanning sensor device

System and method for MEMS sensor system synchronization

MEMS DEVICE

Method to package multiple mems sensors and actuators at different gases and cavity pressures

Method to package multiple MEMS sensors and actuators at different gases and cavity pressures

Nanowire structural element

SOI substrate, physical quantity sensor, SOI substrate manufacturing method, and physical quantity sensor manufacturing method

MICROELECTROMECHANICAL SYSTEMS HAVING CONTAMINANT CONTROL FEATURES

Microelectronic packages having stacked accelerometer and magnetometer die and methods for the production thereof

Integrated package containing MEMS acoustic sensor and environmental sensor and methodology for fabricating same

Sensor package having stacked die

Microelectronic packages having stacked accelerometer and magnetometer die and methods for the production thereof

MEMS DEVICE, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT

Semiconductor device and fabrication method

Method and structure of MEMS WLCSP fabrication

Optical-microwave-quantum transducer

Method for producing a functional unit and corresponding functional unit

Nanowires and method for the production thereof

Device comprising a fluid channel fitted with at least one microelectronic or nanoelectronic system, and method for manufacturing such a device

Integrated circuit provided with a device for detecting its spatial orientation and/or a modification of this orientation

Sensor device

Tilt structure

MEMS/MOEMS sensor design

Microstructure plating systems and methods

Miniaturized sensor comprising a heating element, and associated production method

Micromechanical sensor apparatus with a movable gate, and corresponding production process

Sensor device and method

MEMS-based micro and nano grippers with two axis force sensors

Laser rangefinder

Method for microfabrication of a capacitive micromachined ultrasonic transducer comprising a diamond membrane and a transducer thereof

SENSOR PACKAGE HAVING INTEGRATED ACCELEROMETER AND MAGNETOMETER

Capacitance type MEMS sensor

Self-aligned nano-scale device with parallel plate electrodes

MEMS/MOEMS SENSOR DESIGN

MEMS SENSOR

Fabrication method of carbon nanotube film and sensor based on carbon nanotube film

MICRO DEVICE PACKAGING

Tilt structure

Nanowire structural element

Nanowire structural element

ULTRA THIN FLIP-CHIP BACKSIDE DEVICE SENSOR PACKAGE

Force, pressure, or stiffness measurement or calibration using graphene or other sheet membrane

Nanowires and method for the production there of

Acoustic device with low acoustic loss packaging

Structure and fabrication method of a sensing device

Three-dimensional structure and its manufacturing method

Etching cavity structures in silicon under dielectric membrane

Self-aligned nano-scale device with parallel plate electrodes

VANADIUM DIOXIDE NANOWIRE, FABRICATION PROCESS THEREOF, AND NANOWIRE DEVICE USING VANADIUM DIOXIDE NANOWIRE

Integrated micro-electro-mechanical systems (MEMS) sensor device

MEMS-based micro and nano grippers with two-axis force sensors

Patterning methods for stretchable structures

Thermal fluid flow sensor having stacked insulating films above and below heater and temperature-measuring resistive elements

NANO-DEVICES AND METHODS OF MANUFACTURE THEREOF

CMOS-compatible movable microstructure based devices

INTEGRATED CIRCUIT DISTRIBUTED OVER AT LEAST TWO NON-PARALLEL PLANES AND ITS METHOD OF PRODUCTION

STANDING WAVE FLUIDIC AND BIOLOGICAL TOOLS

Integrated single-crystal MEMS device

Micromechanical sensor, sensor array and method

Micromechanical sensor for measuring the mass flow rate in accordance with the Coriolis principle

CMOS integrated process for fabricating monocrystalline silicon micromechanical elements by porous silicon micromachining

Wafer level sensing package and manufacturing process thereof

Wafer level sensing package and manufacturing process thereof

Membrane Structure and Method for Manufacturing the Same

Nanowire sensor with self-aligned electrode support

SENSOR CHIP AND SUBSTRATE ASSEMBLY FOR MEMS DEVICE

Integrated capacitive microfluidic sensors method and apparatus

MEMS sensor suite on a chip

Microelectronic flow sensor packaging method and system

Micromachined artificial haircell

Photo-sensitive MEMS structure

Apparatus and method for microfabricated multi-dimensional sensors and sensing systems

Micromechanical Component With Active Elements and Method Producing a Component of This Type

Method for manufacturing physical quantity sensor

Piezo-TFT cantilever MEMS fabrication

Micromechanical sensor

MEMS structure with anodically bonded silicon-on-insulator substrate

System and method for implementing a high-sensitivity sensor with improved stability

Photo-sensitive MEMS structure

Effecting dynamic measurement of low mass devices

Method of enhancing connection strength for suspended membrane leads and substrate contacts

Method for manufacturing semiconductor physical quantity sensor

Physical quantity sensor

Magnetic MEMS sensor device

Integrated capacitive microfluidic sensors method and apparatus

Piezoelectric/electrostrictive film-type device

Piezo-TFT cantilever MEMS

Micromechanical sensor

Method of manufacture and assembly of XY flexure mechanism assembly

Systems and methods for micromechanical displacement-based logic circuits

Flexible electronics for wearable healthcare sensors

Flexible electronics for wearable healthcare sensors