83845 ⎘
Specific applications of microelectromechanical systems; Optical MEMS Optical switches
DEVICES, SYSTEMS, AND METHODS INCLUDING MICRO- OR NANO- CANTILEVER STRUCTURES
#2ACTUATOR DEVICE
#3Reliable and Robust Zero Power Micro-Mechanical Switch
#4MICRO-ELECTROMECHANICAL SYSTEM (MEMS) MIRROR COMB DRIVE
#5INTEGRATED MEMS OPTICAL SWITCH WITH PIEZOELECTRIC MEMS ACTUATORS
#6MEMS OPTICAL CIRCUIT SWITCH
#7MEMS DIES EMBEDDED IN GLASS CORES
#8Actuator device
#9Actuator device
#10MEMS OPTICAL SWITCH HAVING LOW INSERTION SWITCH LOSS
#11ELECTROSTATIC MEMS MICROMIRROR
#12MONOLITHIC INTEGRATION OF FOCAL PLANE SWITCH ARRAY LIDARS WITH CMOS ELECTRONICS
#13Actuator device
#14VERTICAL MECHANICAL STOPS TO PREVENT LARGE OUT-OF-PLANE DISPLACEMENTS OF A MICRO-MIRROR AND METHODS OF MANUFACTURE
#15Actuator device
#16Actuator device
#17Optical phased array chip using MEMS switch and manufacturing method thereof
#18Image projection device
#19MEMS optical switch with stop control
#20In-plane MEMS optical switch
#21Method for controlling a drive apparatus of a micro-oscillation mirror, control device and deflector mirror apparatus
#22MEMS micromirror and MEMS optical switch
#23Actuator device with first and second movabale parts and connection portions having a depression portion and a protrusion portion
#24Chip packages and methods for forming the same
#25Chip packages and methods for forming the same
#26MEMS chip structure
#27MEMS optical circuit switch
#28Actuator device
#29Integrated MEMS switches for selectively coupling light in and out of a waveguide
#30TACTILE COMPUTING DEVICE
#31Active MEMS damping
#32Chip packages and methods for forming the same
#33Displacement increasing mechanism and shutter device
#34Actuator device
#35Microelectromechanical device with multiple hinges
#36MEMS device
#37Integrated MEMS switches for selectively coupling light in and out of a waveguide
#38All-solid state optical transmit/receive terminal
#39Physical quantity sensor
#40Microelectromechanical displacement structure and method for controlling displacement
#41Microelectromechanical displacement structure and method for controlling displacement
#42ELECTROMAGNETICALLY ACTUATED MICROSHUTTER
#43RESONANCE-ACTUATION OF MICROSHUTTER ARRAYS
#44MEMS based photonic devices and methods for forming
#45Device and method for micro-electro-mechanical-system photonic switch
#46Microelectromechanical system device having a hinge layer
#47DISPLAY DEVICE
#48MICRO-MIRROR DEVICE AND METHOD FOR DRIVING MIRROR THEREOF
#49Mirror drive device and driving method thereof
#50Electrostatically driven MEMS device
#51Electromagnetically actuated microshutter
#52Display apparatus incorporating dual-level shutters
#53Low-voltage MEMS shutter assemblies
#54Preventing glass particle injection during the oil fill process
#55Micro optical switch device, image display apparatus including the same, and method of manufacturing the micro optical switch device
#56Electromagnetically actuated microshutter
#57Display device and manufacturing method of the display device
#58Display device and method of manufacturing the display device
#59Display device
#60Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained
#61Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#62Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#63Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#64METHOD AND SYSTEM FOR PACKAGING A DISPLAY
#65Micromirror unit and method of making the same
#66Via structure and method thereof
#67Microstructural body and production method therefor
#68Manufacturing method for stress compensated X-Y gimbaled MEMS mirror array
#69Electrostatic actuator including a plurality of urging units with varying rigities
#70Capacitive MEMS device with programmable offset voltage control
#71MEMS device with integrated via and spacer
#72MEMS device and a MEMS device array
#73Micro-electromechanical microshutter array
#74Actuator having deflected fixed comb electrodes and movable comb electrodes
#75Spring, mirror device, mirror array, and optical switch
#76Optical interference display panel and manufacturing method thereof
#77Method of making microminiature moving device
#78Microminiature moving device
#79MICRO-DEVICE AND METHOD FOR MANUFACTURING THE SAME
#80Capacitive MEMS device with programmable offset voltage control
#81Micro-electromechanical microshutter array
#82Integrated electrical cross-talk walls for electrostatic MEMS
#83Method of manufacturing micro-optic device
#84Micro electro mechanical systems device
#85MEMS actuator with discretely controlled multiple motions
#86Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained
#87Micro-electro-mechanical systems device
#88Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore
#89Micromirror device with a hybrid actuator
#90Manufacturing method for stress compensated X-Y gimbaled MEMS mirror array
#91Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#92Energy storage structures using electromechanically active materials for micro electromechanical systems
#93Process for fabricating a micro-electro-mechanical system with movable components
#94Micromirror unit and method of making the same
#95MEMS module package using sealing cap having heat releasing capability and manufacturing method thereof
#96MEMS actuator
#97Micro mirror unit and its manufacturing process, and optical switch with the micro mirror unit employed therein
#98Micro mirror unit and method of making the same
#99Micro-mechanical device, micro-switch, variable capacitor high frequency circuit and optical switch
#100Actuator having fixed and movable comb electrodes
#101Actuator and systems and methods
#102Optical microelectromechantical structure
#103Method of making microminiature moving device
#104Mems element and method of producing the same, and diffraction type mems element
#105Switch structures or the like based on a thermoresponsive polymer
#106System and method for protecting micro-structure of display array using spacers in gap within display device
#107Apparatus and method for arranging devices into an interconnected array
#108Method and system for packaging a display
#109Buckling actuator
#110Micromachine and manufacturing method
#111Method for fabricating vertical offset structure
#112Conductive etch stop for etching a sacrificial layer
#113Micro-actuator utilizing electrostatic and lorentz forces, and micro-actuator device, optical switch and optical switch array using the same
#114Microminiature moving device and method of making the same
#115Electrode design and positioning for controlled movement of a moveable electrode and associated support structure
#116Method for removing a sacrificial material with a compressed fluid
#117Micromirror unit and method of making the same
#118Method for supplying multiple voltages to a movable part of a MEMS device
#119Linear to angular movement converter
#120Micro-optic device and method of manufacturing same
#121Electrostatic comb drive actuator, and optical controller using the electrostatic comb drive actuator
#122Micro mirror unit and method of making the same
#123Optical interference display panel and manufacturing method thereof
#124Microfabricated torsional drive utilizing lateral electrostatic force
#125Multi-chip photonics transceiver