83856 ⎘
Specific applications of microelectromechanical systems Microfilters, e.g. for gas or fluids
Micro-electro-mechanical system fluid control
#2MULTIPLY ENCAPSULATED MICRO ELECTRICAL MECHANICAL SYSTEMS DEVICE
#3MEMS PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREFOR
#4Semiconductor package structure and method for manufacturing the same
#5MEMS type semiconductor gas detection element
#6Plurality of filters
#7MEMS device package and method for manufacturing the same
#8MEMS package
#9Microelectromechanical system (MEMS) on application specific integrated circuit (ASIC)
#10Method of forming micro-pipes on a substrate and a structure formed thereof
#11Microelectromechanical system (MEMS) on application specific integrated circuit (ASIC)
#12Microelectromechanical system (MEMS) on application specific integrated circuit (ASIC)
#13Method for simultaneous structuring and chip singulation
#14Process for manufacturing a micromechanical structure having a buried area provided with a filter
#15Method for producing a component, in particular a micromechanical and/or microfluidic and/or microelectronic component, and component
#16Component comprising submicron hollow spaces
#17Method For Manufacturing A Membrane In A (111) Surface Of A (100) Silicon Wafer
#18Method for filtering particles from a fluid
#19Component comprising submicron hollow spaces