DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR MANUFACTURING SAID DEVICE

ELECTROSTATICALLY-EXCITED HERMETIC MULTI-CELL MICROELECTROMECHANICAL ACTUATOR AND PRODUCTION METHOD THEREOF

MEMS PROBE MODULE STRUCTURE

Method of manufacturing a micro-fluid probe

FLEXIBLE, INSERTABLE, TRANSPARENT MICROELECTRODE ARRAY FOR DETECTING INTERACTIONS BETWEEN DIFFERENT BRAIN REGIONS

Method of providing a MEMS device comprising a pyramidal protrusion, and a mold

Multilayer MEMS cantilevers

Micromechanical structure and method for manufacturing the same

Method of manufacturing a plurality of through-holes in a layer of first material

Method of manufacturing a plurality of through-holes in a layer of first material

Process for manufacturing a microelectromechanical interaction system for a storage medium

Method for manufacturing microcantilever

Method of fabricating nano-scale structures and nano-scale structures fabricated using the method

Micro-nano tools with changeable tips for micro-NANO manipulation

Stress relieved microfabricated cantilever

Carbon nanotube based micro-tip structure and method for making the same

Transferable probe tips

Microstructure and Process for its Assembly

Forming a cantilever assembly for vertical and lateral movement

Deformation method of nanometer scale material using particle beam and nano tool thereby

Process for manufacturing a microelectromechanical interaction system for a storage medium

Method For Manufacturing A Membrane In A (111) Surface Of A (100) Silicon Wafer

Manufacturing of micro-objects such as miniature diamond tool tips

Liquid-based gravity-driven etching-stop technique for controlling structure dimension

Method and micromechanical component

Fabrication of silicon micro-mechanical structures