83867 ⎘
Basic microelectromechanical structures; Suspended structures, i.e. structures allowing a movement; Flexible holders Torsion bars
MICROELECTROMECHANICAL ARRAY
#2MICROELECTROMECHANICAL DEVICE
#3High-Frequency BIAXIAL Bi-Resonant Microelectromechanical Mirror Structure
#4LIGHT DEFLECTOR
#5MICROELECTROMECHANICAL STRUCTURE WITH IMPROVED MECHANICAL ROBUSTNESS
#6MEMS DEVICE WITH MOTION LIMITER
#7MEMS DEVICE HAVING A TILTABLE STRUCTURE AND QUASI-STATIC PIEZOELECTRIC ACTUATION, IN PARTICULAR MICROMIRROR, WITH IMPROVED EFFICIENCY
#8ELECTROMECHANICAL SYSTEM COMPRISING A MOVABLE ELEMENT PROVIDED WITH AN OPENING
#9DRIVE ELEMENT AND OPTICAL DEFLECTION ELEMENT
#10ELECTROSTATIC ACTUATOR
#11MEMBRANE AND ELECTRO-ACOUSTIC TRANSDUCER
#12MEMS DEVICE AND ELECTRO-ACOUSTIC TRANSDUCER
#13MICROSCANNER HAVING A DEFLECTING ELEMENT AND HAVING SPRING ELEMENTS CURVED TOWARDS SAME FOR SUSPENSION OF THE DEFLECTING ELEMENT IN A MANNER CAPABLE OF OSCILLATION
#14MICROELECTROMECHANICAL SYSTEM DEVICE WITH OFFSET MIRROR
#15ACTUATOR DEVICE
#16HIGH-Q MICROMECHANICAL TORSION RESONATOR BASED ON SUSPENDING A TEST MASS FROM A NANORIBBON
#17MEMS DEVICE
#18MEMS Device
#19MEMS MICROMIRROR FOR ALLEVIATING OPTICAL PATH BLOCKAGE, AND PREPARATION METHOD THEREFOR
#20MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND METHODS OF MANUFACTURING THE SAME
#21MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS
#22SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS
#23MIRROR UNIT AND OPTICAL MODULE
#24Inertial Sensor
#25MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL PRESSURE SENSOR, MICROELECTROMECHANICAL MICROPHONE AND MICROELECTROMECHANICAL COMBINATION SENSOR ELEMENT.
#26OPTICAL REFLECTIVE DEVICE
#27IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
#28MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE
#29Actuator device
#30Fabrication of MEMS device with automated dispensing of damping fluid and viscosity control
#31MEMS device with damping fluid vertically sandwiched between moving and non-moving structures
#32Mirror unit and optical module
#33MEMS MIRROR ARRAYS WITH REDUCED COUPLING BETWEEN MIRRORS
#34SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE
#35MEMS device with improved dynamic mechanical performance through damping by localized viscoelastic medium
#36Accelerometer Contact Microphones And Methods Thereof
#37LOW-IMPACT OUT-OF-PLANE MOTION LIMITER MEMS DEVICE
#38Optical device
#39MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE
#40MICROMECHANICAL DEVICE
#41OPTICAL SCANNING DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND DISTANCE MEASURING DEVICE
#42Mirror unit and optical module
#43MEMS device with improved dynamic mechanical performance through damping by localized viscoelastic medium
#44Actuator device
#45ARRAY OF HEATING RESISTORS FOR MEMS MIRRORS
#46Batch fabrication of MEMS scanning mirror
#47MEMS device with a dual hinge structure
#48Micromechanical structure and method of providing the same
#49Micromechanical structure, micromechanical system and method of providing a micromechanical structure
#50Optical module
#51Mirror device
#52MEMS device
#53Mechanical microsystem and associated manufacturing method
#54Optical device
#55Optical device
#56Optical device
#57Mirror unit and optical module
#58Optical device and method for manufacturing same
#59Accelerometer contact microphones and methods thereof
#60Hinged microelectromechanical and/or nanoelectromechanical device with out-of-plane movement
#61Waterproof MEMS button device, input device comprising the MEMS button device and electronic apparatus
#62Hinge offering a reduced sensitivity to internal stresses
#63Out-of-plane hinge for micro and nanoelectromechanical systems with reduced non-linearity
#64MEMS device having a tiltable suspended structure controlled by electromagnetic actuation
#65Actuator device
#66Optical device
#67MICRO-MECHANICAL DEVICE WITH LOCAL ELECTROMAGNETIC ACTUATION
#68Optical module having high-accuracy spectral analysis
#69Mirror unit and optical module
#70Optical device
#71MMS, MMS array, MEMS actuator and method for providing an MMS
#72Micromechanical component for a pressure sensor device
#73STABILE MICROMECHANICAL DEVICES
#74Actuator device
#75Actuator device
#76Anchoring structure for a sensor insensitive to anchor movement
#77Microelectromechanical device with multiple hinges
#78Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof
#79Micromechanical spring for a sensor element
#80Optical scanning apparatus having pivoting reflector and piezoelectric element
#81ELECTROOPTICAL DEVICE, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING ELECTROOPTICAL DEVICE
#82Actuator device and mirror drive device
#83Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof
#84Sensor for detecting angular velocity
#85MEMS device
#86MEMS device
#87MEMS sensor and a semiconductor package
#88Micro-electromechanical device comprising a mobile mass that can move out-of-plane
#89Microelectromechanical and/or nanoelectromechanical differential pressure measurement sensor
#90Actuator with plurality of torsion bars having varying spring constant
#91Optical scanner, image display apparatus, and head-mount display
#92Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof
#93MEMS device
#94Actuator, optical scanner, and image forming apparatus
#95Light deflector with plate-like mirror forming a base of a recess in a movable member and a mass body on a non-deflecting surface of the mirror to adjust a resonent frequency of the movable member
#96Mechanical connection forming a pivot for MEMS and NEMS mechanical structures
#97MEMS scanning micromirror
#98Metal elastic member, miniature machine, method of manufacturing miniature machine, swing control device and swing control method
#99Mounting flexure contacts
#100Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly
#101Microelectromechanical system device with electrical interconnections and method for fabricating the same
#102MEMS multi-axis gyroscope Z-axis electrode structure
#103MEMS multi-axis gyroscope with central suspension and gimbal structure
#104Pressure measurement device having an optimized sensitivity
#105Laser rangefinder
#106Actuator, optical scanner, and image forming apparatus
#107Mounting flexure contacts
#108Actuator, protective cover for actuator, actuator manufacturing method, and optical deflector incorporating actuator, and two dimensional optical scanner and image projector incorporating optical scanner
#109MEMS DEVICE AND COMPOSITE SUBSTRATE FOR AN MEMS DEVICE
#110Inertial sensor and method for manufacturing an inertial sensor
#111Connecting structure for micromechanical oscillating devices
#112Method for manufacturing micro movable element
#113Apparatus, method and system for providing enhanced mechanical protection of thin beams
#114Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending action
#115Torsional hinged MEMS device
#116Micromechanical actuator with multiple-plane comb electrodes and methods of making
#117Micromechanical actuator with multiple-plane comb electrodes and methods of making
#118Micro-oscillating element provided with torsion bar
#119MEMS mirror device and optical disk apparatus