83866 ⎘
Basic microelectromechanical structures; Suspended structures, i.e. structures allowing a movement Flexible holders
Sub-classes:THREE-AXIS GYROSCOPE
#2MEMS DEVICE
#3Three-axis Gyroscope
#4Rotatable micromirror with improved shock and vibration performance
#5Multidirectional translating and tilting platform using bending actuators as active entity
#6Micromirror with improved shock and vibration performance having differing hinge portions
#7MEMS actuation systems and methods
#8MEMS actuation systems and methods
#9Translating Z axis accelerometer
#10MEMS devices utilizing a thick metal layer of an interconnect metal film stack
#11MEMS devices utilizing a thick metal layer of an interconnect metal film stack
#12Detection of force applied by pick-up tool for transferring semiconductor devices
#13Micro electro mechanical system and layered hinge for use in MEMS micromirror having first and second serpentine shapes