83869 ⎘
Basic microelectromechanical structures; Suspended structures, i.e. structures allowing a movement; Flexible holders Flexible holders not provided for in -
MEMS ELECTROSTATIC ACTUATOR BLADE CONFIGURATIONS AND METHODS OF MANUFACTURE
#2MEMS MICROPHONE CHIP
#3Force detection foil sensor with direct force transducer
#4MICRO-ELECTROMECHANICAL GYROSCOPE WITH IN-PLANE ACTUATION AND PITCH/ROLL SENSING
#5Monolithic Microelectromechanical Systems Based Spatial Light Modulators with Two-dimensional Modulators
#6MEMS TRANSDUCER
#7Controllable Reflective Optical Unit With MEMS Tip-Tilt Actuator
#8Piezoelectric Motion Limiters for MEMS Autofocus Actuator
#9MICROELECTROMECHANICAL MOTION SENSOR DEVICE HAVING A SINGLE PROOF MASS
#10MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SENSOR
#11MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS
#12MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER
#13MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION
#14MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP
#15MEMS DEVICE
#16METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM
#17MEMS MIRROR DEVICE AND DISTANCE MEASURING APPARATUS
#18FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION
#19MEMS transducer
#20No-gel pressure sensor package
#21Micro-electromechanical system package having movable platform
#22MEMS transducer
#23Flexible electrode and preparation method thereof
#24No-gel pressure sensor package
#25MEMS device comprising a membrane and an actuator
#26Sensor package having a movable sensor
#27Fused quartz dual shell resonator and method of fabrication
#28Post-processing techniques on mems foundry fabricated devices for large angle beamsteering
#29Sensor package having a movable sensor
#30MEMS device comprising a membrane and an actuator
#31Sensor package having a movable sensor
#32Manufacturing method of sensor package
#33Microelectromechanical and/or nanoelectromechanical device offering improved robustness
#34MEMS device comprising a membrane and an actuator
#35MEMS pressure sensing element
#36Micromechanical component and production method for a micromechanical component
#37MICROMECHANICAL SYSTEM HAVING A STOP ELEMENT
#38Merged legs and semi-flexible anchoring having cantilevers for MEMS device
#39MEMS autofocus actuator
#40Electrostatic actuator including a plurality of urging units with varying rigities
#41Apparatus and method using patterned array with separated islands