MICROELECTROMECHANICAL ARRAY

MICROELECTROMECHANICAL DEVICE

High-Frequency BIAXIAL Bi-Resonant Microelectromechanical Mirror Structure

MEMS DEVICE

MEMS APPARATUS FOR FORMING PHYSICAL UNCLONABLE FUNCTION KEY AND OPERATION METHOD OF MEMS APPARATUS

CRASH MITIGATION IN ACTIVE MEMS COOLING SYSTEMS

CAPACITIVE MICROELECTROMECHANICAL PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS

PIEZOELECTRIC MICROELECTROMECHANICAL DEVICE WITH ANCHOR REINFORCEMENT

PRESSURE SENSOR HAVING HIGH DETECTION PERFORMANCE AND OPTIMIZED MANUFACTURING

MICROELECTROMECHANICAL COMPONENT AND MICROELECTROMECHANICAL INERTIAL SENSOR

MULTI-CELL PISTON MOTION MEMBRANE MICROELECTROMECHANICAL SYSTEMS (MEMS) APPARATUS AND PROCESS

MEMS DEVICE

ELECTROACOUSTIC TRANSDUCER WITH ELECTRICAL CONNECTIONS ON A MEMBRANE

MEMS VIBRATOR

SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF

TRIAXIAL MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED PERFORMANCES

MEMS MICROPHONE AND METHOD FOR PREPARING MEMS MICROPHONE

FORMING METHODS OF PACKAGE STRUCTURE AND APPARATUS

Electronic Structure, Inertial Measurement Unit, Electronic Apparatus, And Moving Object

MEMS MICROPHONE CHIP

MICROELECTROMECHANICAL ACCELERATION SENSOR

MEMS Resonator with Co-packaged Thermistor

MEMS SENSOR ARRANGEMENT AND METHOD FOR MANUFACTURING A MEMS SENSOR ARRANGEMENT

MICROELECTROMECHANICAL STRUCTURE WITH IMPROVED MECHANICAL ROBUSTNESS

Gamepad Microphone

3-AXIS ANGULAR ACCELEROMETER

THREE-AXIS GYROSCOPE

MEMS DEVICE

MICRO-ELECTROMECHANICAL GYROSCOPE WITH IN-PLANE ACTUATION AND PITCH/ROLL SENSING

Processing Methods for Wafer-Level Encapsulated MEMS Devices with Stable Cavity Pressure Over Temperature

MEMS MICROPHONE

MEMS DEVICE HAVING A TILTABLE STRUCTURE AND QUASI-STATIC PIEZOELECTRIC ACTUATION, IN PARTICULAR MICROMIRROR, WITH IMPROVED EFFICIENCY

DEVICES, SYSTEMS, AND METHODS INCLUDING MICRO- OR NANO- CANTILEVER STRUCTURES

MICROELECTROMECHANICAL SYSTEMS (MEMS) INTEGRATION FOR ANALOG TUNABILITY IN RECONFIGURABLE INTELLIGENT SURFACES

MICRO-DEVICE STRUCTURES WITH ETCH HOLES

CRASH MITIGATION IN ACTIVE MEMS COOLING SYSTEMS

MICROMECHANICAL ARM ARRAY FOR MEMS ACTUATORS

MEMBRANE CONNECTED TO PILLAR WITH SPRING CHARACTERISTICS

ELECTROSTATIC ACTUATOR

FULLY SYMMETRICAL STRUCTURES FOR MICROELECTROMECHANICAL DEVICES

MEMS STRUCTURE WITH A STRUCTURED TAPER LAYER

MICROELECTROMECHANICAL SYSTEMS DEVICE AND METHOD FOR FORMING THE SAME

MICROSCANNER HAVING A DEFLECTING ELEMENT AND HAVING SPRING ELEMENTS CURVED TOWARDS SAME FOR SUSPENSION OF THE DEFLECTING ELEMENT IN A MANNER CAPABLE OF OSCILLATION

Electrostatic MEMS Transducer with Vertical Actuator Cells

DIRECTIONAL MICROPHONE

MEMS SENSOR HAVING A HIGH ROBUSTNESS AGAINST THE STICTION PHENOMENON

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

ACCELERATION SENSOR

MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS

MICROELECTROMECHANICAL ACTUATOR ON INSULATING SUBSTRATE

ACOUSTIC SENSOR DEVICES WITH MULTIPLE SENSING ELEMENTS

NANO ELECTROMECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF

MEMS Device

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) HAVING VERTICAL STOPS AND ANCHOR STRUCTURES

MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPING STRUCTURE HAVING IMPROVED MECHANICAL ROBUSTNESS

MICROELECTROMECHANICAL COMPONENT WITH GAP-CONTROL STRUCTURE AND A METHOD FOR MANUFACTURING IT

EXTREMAL MICROSTRUCTURED SURFACES

CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR

MICRO-DEVICE STRUCTURES WITH ETCH HOLES

MICROMECHANICAL INERTIAL SENSOR, AND METHOD FOR OPERATING A MICROMECHANICAL INERTIAL SENSOR

ANCHOR STRUCTURE

MEMS DEVICE

MEMS Array Structures for Gyroscopes with High Resonant Frequencies

MEMS DEVICE

ACCELERATION SENSOR

COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES

MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME

Inertial Sensor

Three-axis Gyroscope

METHODS OF MANUFACTURE OF MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK

System And Method For Generating Fluid Flow

MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE

MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE

MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP

MEMS SENSOR AND METHOD FOR FORMING THE SAME

MEMS DEVICE

SOUND PRODUCING PACKAGE AND COVERING STRUCTURE

ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS

DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE

MICRO-ELECTRO-MECHANICAL SYSTEM MICROPHONE, MICROPHONE UNIT AND ELECTRONIC DEVICE

ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR

MEMS DEVICE AND MANUFACTURING METHOD FOR MEMS DEVICE

MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRENCHES

MEMS DIAPHRAGM AND MEMS SENSOR

Microelectromechanical Devices For Higher Order Passive Temperature Compensation and Methods of Designing Thereof

MEMS MICROPHONE

DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

Anchor and cavity configuration for MEMS-based cooling systems

CANTILEVER STRUCTURE WITH INTERMEDIATE SUBSTRATE CONNECTION

Curved cantilever design to reduce stress in MEMS actuator

FAILURE DETECTION METHOD, FAILURE DETECTION SYSTEM, AND ELECTROSPRAY ION SOURCE

CARTRIDGE INTERFERENCE

Spring Supported and Sealed MEMS Diaphragm Assembly

MEMS OPTICAL MICROPHONE

CAPACITIVE SENSOR

MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER

Sound producing cell

PACKAGE STRUCTURE, APPARATUS AND FORMING METHODS THEREOF

Anchor Structure

DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFORMANCES AND MANUFACTURING PROCESS THEREOF

MEMS DEVICE COMPRISING A DEFORMABLE STRUCTURE AND MANUFACTURING PROCESS OF THE MEMS DEVICE

MICRO-ACOUSTIC RESONATOR SPRINGY ANCHOR BASED ON OFFSET ACOUSTIC REFLECTOR TRENCHES

MICROMECHANICAL COMPONENT FOR A SENSOR AND/OR MICROPHONE DEVICE

WIRE-BOND DAMPER FOR SHOCK ABSORPTION

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

ANCHOR DESIGN WITH REJECTION OF EXTERNAL SHEAR FORCE

PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE

MEMS Device

COMPACT MICROELECTROMECHANICAL ANGULAR RATE SENSOR

MEMS SENSOR WITH TWO COMPLIANCES

MEMS SENSOR WITH A THIN REGION

Mems structure

Methods and devices for microelectromechanical resonators

MICROMECHANICAL COMPONENT

MECHANICALLY COUPLED PIEZOELECTRIC MEMS MICROPHONE

MICRO-ELECTROMECHANICAL SYSTEM (MEMS) INCLUDING TANTALUM AS A STRUCTURAL MATERIAL

Ultra-High Frequency MEMS Resonators with First and Second Order Temperature-Induced Frequency Drift Compensation

METHOD OF MAKING MEMS MICROPHONE WITH AN ANCHOR

MEMS MICROPHONE WITH AN ANCHOR

Curved cantilever design to reduce stress in MEMS actuator

TORSION SPRING ELEMENT

COMPACT ENHANCED SENSITIVITY TEMPERATURE SENSOR USING AN ENCAPSULATED CLAMPED-CLAMPED MEMS BEAM RESONATOR

EARLY-IMPACT OUT-OF-PLANE MOTION LIMITER FOR MEMS DEVICE

Sound producing cell and manufacturing method thereof

MICROELECTROMECHANICAL SYSTEM DEVICE

MEMS DIE AND MEMS-BASED VIBRATION SENSOR

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

Microelectromechanical Devices For Higher Order Passive Temperature Compensation and Methods of Designing Thereof

METHOD OF MAKING A PIEZOELECTRIC SENSOR WITH INCREASED SENSITIVITY AND DEVICES HAVING THE SAME

PIEZOELECTRIC SENSOR WITH INCREASED SENSITIVITY AND DEVICES HAVING THE SAME

Microelectromechanical actuator on insulating substrate

Electronic acoustic devices, MEMS microphones, and equalization methods

PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM DIFFERENT MATERIAL THICKNESSES

PIEZOELECTRIC MEMS MICROPHONE WITH SPRING REGION

PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM DIFFERENT MATERIAL PROPERTIES

PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM ONE OR MORE COMPENSATION LAYERS

Sound producing cell and manufacturing method thereof

Methods and devices for microelectromechanical resonators

MEMS PRESSURE SENSOR BUILT USING THE BEOL METAL LAYERS OF A SOLID-STATE SEMICONDUCTOR PROCESS

Anchor and cavity configuration for MEMS-based cooling systems

CANTILEVERED PIEZOELECTRIC MICROELECTROMECHANICAL SYSTEMS MICROPHONE

PIEZOELECTRIC MICROPHONE WITH ENHANCED ANCHOR

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

Microelectromechanical systems (MEMS) switch and related methods

Sound producing cell and manufacturing method thereof

MEMS SWITCH INCLUDING A CAP CONTACT

Anti-stiction enhancement of ruthenium contact

Anchor structure for reducing temperature-based error

MEMS mirror arrays with reduced crosstalk

MEMS acoustic sensor

Dual micro-electro mechanical system and manufacturing method thereof

Wire-bond damper for shock absorption

3-axis angular accelerometer

MEMS devices and methods of forming thereof

MEMS device and manufacturing method thereof

Micro-device structures with etch holes

Electrode configuration for tilting micro-electro-mechanical systems mirror

Capacitive microphone with well-controlled undercut structure

Microelectromechanical sensor device with improved stability to stress

Piezoelectric micromachined ultrasonic transducer and method of fabricating the same

SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE

MEMS device with a dual hinge structure

Microelectromechanical membrane transducer with active damper

Micromechanical component and method for manufacturing a micromechanical component

MICROMECHANICAL COMPONENT FOR A SENSOR OR MICROPHONE DEVICE

Micro-opto-mechanical system sensor, arrangement and manufacturing method

Sensor device and method of fabrication

Micromechanical pressure sensor device including a diaphragm system and corresponding manufacturing method

MEMS capacitive microphone

MICRO-ELECTROMECHANICAL ACTUATING DEVICE PROVIDING A MOVEMENT HAVING MULTIPLE DEGREES OF FREEDOM

Dual micro-electro mechanical system and manufacturing method thereof

MEMS devices and methods of forming thereof

Extremal microstructured surfaces

Waterproof MEMS button device, input device comprising the MEMS button device and electronic apparatus

Method for forming semiconductor device

MEMS acoustic sensor

Methods and devices for microelectromechanical resonators

Methods for packaging a microelectromechanical systems device

3-axis angular accelerometer

MEMS structure for offset minimization of out-of-plane sensing accelerometers

MEMS device with movable stage

Microelectromechanical systems packages and methods for packaging a microelectromechanical systems device

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF MANUFACTURING THE SAME

Silicon carbide microelectromechanical structure, device, and method

MEMS bridge devices and methods of manufacture thereof

MEMS device and method for forming the same

OFFSET REJECTION ELECTRODES

Micromechanical sensor that includes a stress decoupling structure

MEMS microphone and method of manufacturing the same

MEMS microphone and method of manufacturing the same

MEMS microphone, method of manufacturing the same and MEMS microphone package including the same

MEMS devices with an element having varying widths

Methods and devices for microelectromechanical resonators

Micromechanical component and method for producing a micromechanical component

Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof

MEMS microphone and method of manufacturing the same

MEMS microphone and method of manufacturing the same

MEMS microphone and method of manufacturing the same

MEMS microphone and method of manufacturing the same

DIFFERENTIAL Z-AXIS RESONANT MEMS ACCELEROMETERS AND RELATED METHODS

Micromechanical spring for an inertial sensor

MEMS pressure sensing element

Current handling in legs and anchors of RF-switch

Device arrangement

Flexible MEMS printed circuit board unit and sound transducer assembly

MEMS microphone and method for manufacturing the same

Anchoring structure for a sensor insensitive to anchor movement

Anchor tracking for MEMS accelerometers

Offset rejection electrodes

Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof

Integrated electroacoustic MEMS transducer with improved sensitivity and manufacturing process thereof

Silicon carbide microelectromechanical structure, device, and method

High displacement ultrasonic transducer

MEMS sensor with high voltage switch

Support pillar

CMOS-MEMS structures with out-of-plane MEMS sensing gap

3-axis angular accelerometer

MEMS microphone and method of manufacturing the same

PIEZOELECTRIC PACKAGE-INTEGRATED SWITCHING DEVICES

Electronic device using MEMS technology

Electromechanical device including connector formed of dielectric material

MICRO-ELECTROMECHANICAL APPARATUS HAVING CENTRAL ANCHOR

System with an increased surface density of microelectromechanical or nanoelectromechanical devices

System and method for a differential comb drive MEMS

MEMS device with isolation sub-frame structure

MICROMECHANICAL COMPONENT HAVING TWO AXES OF OSCILLATION AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT

Multi-faced component-based electromechanical device

Multi-faced component-based electromechanical device

Physical quantity sensor having a frame-shaped movable mass, electronic device, and mobile body

MEMS devices and fabrication methods thereof

MEMS sensor with high voltage switch

System and method for a MEMS transducer

Offset rejection electrodes

Semiconductor pressure sensor and method of fabricating same

Method of fabricating MEMS devices using plasma etching and device therefor

MEMS device with over-travel stop structure and method of fabrication

Manufacture of a multi-level timepiece component

Resonance Frequency Adjustment Module

Photolithography Structures and Methods

Microvalve having a reduced size and improved electrical performance

MEMS structure with improved shielding and method

Methods of forming micro-electro-mechanical devices including a conductive feature extending through an escort ring

Method for manufacturing a microelectromechanical systems (MEMS) device with different electrical potentials and an etch stop

MICROELECTROMECHANICAL MICROPHONE

High displacement ultrasonic transducer

Capacitive sensor, acoustic sensor and microphone

Methods and devices for microelectromechanical resonators

Methods and devices for microelectromechanical pressure sensors

Micromechanical component having a diaphragm structure

Scalable self-supported MEMS structure and related method

MEMS sensor with dynamically variable reference capacitance

Glass wafer assembly

Fabrication of tungsten MEMS structures

Transducer structure and method for MEMS devices

Dual layer microelectromechanical systems device and method of manufacturing same

Mechanisms for forming micro-electro mechanical device

Vibration device including support portion

MEMS devices and methods of forming the same

MEMS structure with improved shielding and method

MEMS device anchoring

Method for producing a device comprising cavities formed between a suspended element resting on insulating pads semi-buried in a substrate and this substrate

Merged legs and semi-flexible anchoring having cantilevers for MEMS device

Wafer with recessed plug

MEMS anchors

MEMS devices and fabrication methods thereof

Method for MEMS device fabrication and device formed

MEMS devices and methods of forming the same

Atomic layer deposition strengthening members and method of manufacture

Electromechanical system structures with ribs having gaps

MEMS devices and methods of forming same

Pressure measurement device having an optimized sensitivity

Display device

ELECTROMECHANICAL DEVICE CONFIGURED TO MINIMIZE STRESS-RELATED DEFORMATION AND METHODS FOR FABRICATING SAME

Nanoelectromechanical Structures Exhibiting Tensile Stress And Techniques For Fabrication Thereof

MEMS device with central anchor for stress isolation

MEMS device etch stop

Wafer with recessed plug

MEMS anchors

Three-dimensional microstructures having a re-entrant shape aperture and methods of formation

Method for MEMS device fabrication and device formed

Methods for reduced stress anchors

Microstructure with an enhanced anchor

Microstructure device with an improved anchor

Micromechanical system

Semiconductor physical quantity sensor

Electromechanical devices having support structures

Micromechanical component having an inclined structure and corresponding manufacturing method

Capacitive vibration sensor

MEMS devices having overlying support structures

METHODS FOR FORMING LAYERS WITHIN A MEMS DEVICE USING LIFTOFF PROCESSES

Membrane, especially for an optical device having a deformable membrane

MEMS device and interposer and method for integrating MEMS device and interposer

MEMS device and method of fabricating the same

Electromechanical device configured to minimize stress-related deformation and methods for fabricating same

Manufacturing a MEMS element having cantilever and cavity on a substrate

Performance-enhancing two-sided MEMS anchor design for vertically integrated micromachined devices

MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same

Methods for forming layers within a MEMS device using liftoff processes

Micro-passage chip

Support structure for MEMS device and methods therefor