83882 ⎘
Basic microelectromechanical structures; Static structures characterized by their profile rounded profile
MEMS MICROPHONE AND METHOD FOR PREPARING MEMS MICROPHONE
#2METHOD FOR FORMING SEMICONDUCTOR STRUCTURE
#3MEMS BUMP STOPPER SURFACE FEATURES
#4Semiconductor structure and method for forming the same
#5Force sensor with MEMS-based device and force touching member
#6MICROSTRUCTURED SURFACE HAVING DISCRETE TOUCH AESTHETICS
#7MEMS devices and processes
#8Micromechanical component and method for producing a micromechanical component
#9MICROMECHANICAL SYSTEM HAVING A STOP ELEMENT
#10Method for creating patterns
#11DUAL BAND MEMS ACOUSTIC DEVICE
#12Microfluidic structures for biomedical applications
#13microfluidic structures for biomedical applications
#14Multi-zone microstructure spring
#15Display device
#16Method of forming non-planar membranes using CMP
#17Forming curved features using a shadow mask
#18Microfluidic device and method of manufacturing the microfluidic device
#19Extruded structure with equilibrium shape
#20Methods for Manufacturing a Microstructure
#21Fluid cartridge, pump and fluid valve arrangement
#22Apparatus and method for converting energy
#23CELL CULTURE APPARATUS HAVING DIFFERENT MICRO-WELL TOPOGRAPHY
#24Method of fabricating microfluidic structures for biomedical applications
#25Microfabrication
#26Fabrication of ultra-shallow channels for microfluidic devices and systems
#27Method for preparing a cover for protecting a component on a substrate
#28Extruded structure with equilibrium shape
#29Microfabricated structures and processes for manufacturing same