MEMS MICROPHONE

METHOD FOR FORMING SEMICONDUCTOR STRUCTURE

Electromechanical Microsystem for Moving a Mechanical Part in Two Opposite Directions

Microelectromechanical System for Moving a Mechanical Part in Two Opposite Directions

Membrane support for dual backplate transducers

Dual membrane transducer

PIEZOELECTRIC ACTUATOR STACK WITH TAPERED SIDEWALL

Semiconductor structure and method for forming the same

Production method for a micromechanical device having inclined optical windows, and micromechanical device having inclined optical windows

Membrane support for dual backplate transducers

Bionic SERS substrate with metal-based compound eye bowl structure and its construction method and application

Membrane support for dual backplate transducers

Interposer substrate, MEMS device and corresponding manufacturing method

Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure

Protective wafer including inclined optical windows and device

Method for forming a cavity and a component having a cavity

Method for producing optical components using functional elements

Manufacturing method for semiconductor structure

Semiconductor structure and manufacturing method for the same

Method of fabricating a MEMS and/or NEMS structure comprising at least two elements suspended from a support at different distances from said support

MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND CORRESPONDING MICROMECHANICAL WINDOW STRUCTURE

Method for manufacturing a protective wafer including inclined optical windows and device

Method of forming micro-pipes on a substrate and a structure formed thereof

Microelectromechanical displacement structure and method for controlling displacement

Microelectromechanical displacement structure and method for controlling displacement

Method for forming a cavity and a component having a cavity

Silicon-based component with at least one chamfer and its fabrication method

Micromechanical component with a reduced contact surface and its fabrication method

Mechanism for MEMS bump side wall angle improvement

Process for fabricating MEMS device

Method for manufacturing micro-structure and optically patternable sacrificial film-forming composition

Sloped structure, method for manufacturing sloped structure, and spectrum sensor

Method for producing an optical window device for a MEMS device

Fluidic structure with nanopore array

Mechanism for MEMS bump side wall angle improvement

Sloped structure, method for manufacturing sloped structure, and spectrum sensor

Method for manufacturing micro-structure and optically patternable sacrificial film-forming composition

PROTUBERANT STRUCTURE AND METHOD FOR MAKING THE SAME

Micromechanical sound transducer having a membrane support with tapered surface

COMPOSITIONS AND METHODS OF GENERATING REPROGRAMMED ADIPOCYTE CELLS AND METHODS OF USE THEREFORE

METHOD FOR MANUFACTURING STRUCTURE

Cover device for a micro-optomechanical component, and manufacturing method for such a cover device

Method for producing oblique surfaces in a substrate and wafer having an oblique surface

Laser processing method

Sealed cavity and method for producing such a sealed cavity

Structure and method to form nanopore

Method for producing micromechanical patterns having a relief-like sidewall outline shape or an adjustable angle of inclination

Method of manufacturing semiconductor device

Method of forming an undercut microstructure

Polymers, methods of use thereof, and methods of decomposition thereof

Microchip and process for producing microchip

Microchip and Method of Manufacturing Same

Cover for microsystems and method for producing a cover

Metal-ceramic multilayer structure

Method for forming non-aligned microcavities of different depths

Mitigation of high stress areas in vertically offset structures

Polymers, Methods Of Use Thereof, And Methods Of Decomposition Thereof

Production method for a micromechanical component, and a micromechanical component

Micro-posts having improved uniformity and a method of manufacture thereof

MICROMECHANICAL SENSOR- OR ACTUATOR COMPONENT AND METHOD FOR THE PRODUCTION OF MICROMECHANICAL SENSOR- OR ACTUATOR COMPONENTS

Polymers, Methods Of Use Thereof, And Methods Of Decomposition Thereof

MICROSTRUCTURE AND MANUFACTURING METHOD THEREOF

Micro electro mechanical systems device

Hermetic packaging and method of manufacture and use therefore

Microfabrication

Orientation-dependent etching of deposited AlN for structural use and sacrificial layers in MEMS

Method for generating a micromechanical structure

HERMETIC SEALING OF MICRO DEVICES

Cap Wafer for Wafer Bonded Packaging and Method for Manufacturing the Same

Semiconductor device package, semiconductor apparatus, and methods for manufacturing the same

Method for manufacturing a mass-spring system

Microstructure and manufacturing method thereof

Polymers, methods of use thereof, and methods of decomposition thereof

Micro-mirror device package and method for fabricating the same

Micromechanical component and method for production thereof

Silicon substrate comprising positive etching profiles with a defined slope angle, and production method

Optical scanner package and method of manufacturing the same

Method for making fluid emitter orifice

Method for structuring of silicon substrates for microsystem technological device elements and associated silicon substrate

Micro-electro-mechanical system (MEMS) package having side double-sealing member and method of manufacturing the same

Systems and methods for three-dimensional lithography and nano-indentation

System and method of fabricating micro cavities