ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TRANSDUCER DEVICES

CONNECTION LINE STRUCTURE AND FORMING METHOD THEREOF

METHOD FOR FORMING SEMICONDUCTOR STRUCTURE

Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices

Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices

Semiconductor structure and method for forming the same

MEMS device and method for making the same

Anchor structure for reducing temperature-based error

Suspended microelectromechanical system (MEMS) devices

Method for manufacturing MEMS microphone

Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices

Force sensor with MEMS-based device and force touching member

Tunable nanotextured materials

Manufacturing method for semiconductor structure

Microelectromechanical component

Semiconductor structure and manufacturing method for the same

MEMS microphone and method for manufacturing the same

Method of fabricating a MEMS and/or NEMS structure comprising at least two elements suspended from a support at different distances from said support

Micromechanical component and method for producing same

MEMS sensor with side port and method of fabricating same

Combined-blade open flow path device and joined body thereof

Method for obtaining at least one structure approximating a sought structure by reflow

Nanochannel device with three dimensional gradient by single step etching for molecular detection

MEMS capacitive pressure sensors

MEMS capacitive pressure sensors

MEMS capacitive pressure sensors and fabrication method thereof

Method for etching a complex pattern

Method of manufacturing an electromechanical transducer

HIGH AREA STACKED LAYERED METALLIC STRUCTURES AND RELATED METHODS

Semiconductor device

Method for the production of three-dimensional microstructures

PROTUBERANT STRUCTURE AND METHOD FOR MAKING THE SAME

FLOW PATH DEVICE

Process for eliminating delamination between amorphous silicon layers

MICROFLUID CONTROL DEVICE AND METHOD OF MANUFACTURING THE SAME

Semiconductor device having a base, a cavity, a diaphragm, and a substrate

Micromechanical component having a rear volume

METHOD FOR THE PRODUCTION OF MULTI-STEPPED SUBSTRATE

MICROFLUIDIC CIRCUIT ELEMENT COMPRISING MICROFLUIDIC CHANNEL WITH NANO INTERSTICES AND FABRICATION METHOD THEREOF

MICRO-NANO FLUIDIC BIOCHIP FOR ASSAYING BIOLOGICAL SAMPLE

CHANNEL FOR CAPILLARY FLOW, BIOSENSOR DEVICE AND METHOD FOR FORMING AN OBJECT HAVING A CHANNEL FOR CAPILLARY FLOW

Integrated flow cell with semiconductor oxide tubing

CAPACITOR MICROPHONE CHIP, CAPACITOR MICROPHONE, AND MANUFACTURING METHOD THEREOF

Systems and methods for fabricating an out-of-plane MEMS structure

Process for eliminating delamination between amorphous silicon layers

Method for fabricating a shadow mask in a trench of a microelectronic or micromechanical structure