MICRO SCANNING MIRROR

MEMS PRESSURE SENSOR BUILT USING THE BEOL METAL LAYERS OF A SOLID-STATE SEMICONDUCTOR PROCESS

Resonant sensor using MEMS resonator, and detection method by resonant sensor

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP

MICROELECTROMECHANICAL INFRARED SENSING DEVICE AND FABRICATION METHOD THEREOF

Method and system for fabricating a MEMS device

ELECTROSTATICALLY GATED NANOFLUIDIC MEMBRANES FOR CONTROL OF MOLECULAR TRANSPORT

FLEXIBLE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER ARRAYS

MEMS CHIP

Microelectromechanical infrared sensing device and fabrication method thereof

Method and system for fabricating a MEMS device

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME

MEMS MICROPHONE AND METHOD FOR FABRICATING THE SAME

Diaphragm assembly with non-uniform pillar distribution

Dual-layer micro-ribbon MEMS light modulator

Bottom electrode via structures for micromachined ultrasonic transducer devices

MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE

MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE

CANTILEVERED PIEZOELECTRIC MICROELECTROMECHANICAL SYSTEMS MICROPHONE

PIEZOELECTRIC MICROPHONE WITH ENHANCED ANCHOR

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

MICRO-ELECTRONIC NON-LANDING MIRROR SYSTEM

Micro-electromechanical system package having movable platform

Microelectromechanical systems device

Method for lithography process

Micromechanical component for a sensor device or microphone device

SENSOR

Micromechanical component for a sensor device having a capacitor sealing structure

MEMS CHIP AND ELECTRIC DEVICE

Micro-electro-mechanical system (MEMS) vibration sensor and fabricating method thereof

PIEZOELECTRIC ACTUATOR STACK WITH TAPERED SIDEWALL

MEMS device with enhanced membrane structure and method of forming the same

CMUT transducer with motion-stopping structure and CMUT transducer forming method

Semiconductor structure and method for forming the same

MEMS device and method for making the same

Reduced noise MEMS device with force feedback

MULTI FREQUENCY ACOUSTIC EMISSION MICROMACHINED TRANSDUCERS FOR NON-DESTRUCTIVE EVALUATION OF STRUCTURAL HEALTH

MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF

PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY

Electrostatic device, electrostatic device intermediate body and production method

MICROFLUIDIC CHIP

MICRO-FLUIDIC CHIP, LIBRARY PREPARATION CHIP AND METHOD FOR CONTROLLING AND DRIVING DROPLET

Microelectromechanical system and process of making it

Channel for decreasing damping asymmetry

Piezoelectric anti-stiction structure for microelectromechanical systems

Micro-electro-mechanical-system structures and applications thereof

SCALABLE SYSTEMS AND METHODS FOR AUTOMATED BIOSYSTEM ENGINEERING

MEMS phase shifter including a substrate with a coplanar waveguide signal structure formed thereon and electrically insulated from a metal film bridge

MEMS die and MEMS-based sensor

Sensor

Anti-stiction enhancement of ruthenium contact

Acoustic transduction unit, manufacturing method thereof and acoustic transducer

Transducer component, manufacturing method thereof, and transducer

MEMS device, assembly comprising the MEMS device, and method of operating the MEMS device

Robust method for gyroscope drive amplitude measurement

MEMS device with a TMD structure

Passive micromechanical counter

DUAL ELECTRODE ELECTROADHESION AND DUST MITIGATION/CLEANING SYSTEM

Sensor and electronic device

Micromechanical component for a sensor device

DIGITAL MICROFLUIDICS DEVICE WITH DROPLET PROCESSING COMPONENTS

CMOS-MEMS humidity sensor

MEMS element and electrical circuit

Flexible electrode and preparation method thereof

Capacitance gap measurement

Phase shifter in which at least some of first sub-electrodes are short-circuited together and connected to a same connection portion

Stacked electrostatic actuator

MEMS DEVICE WITH MEANDERING ELECTRODES

MEMS acoustic sensor

MEMS acoustic sensor and assembly

Triple-membrane MEMS device

Dual micro-electro mechanical system and manufacturing method thereof

MEMS device with electrodes and a dielectric

MEMS device with electrodes and a dielectric

COMB-DRIVEN MEMS RESONANT SCANNER WITH FULL-CIRCUMFERENTIAL RANGE AND LARGE OUT-OF-PLANE TRANSLATIONAL DISPLACEMENT

Pulse train excitation for capacitive micromachined ultrasonic transducer

Mems sensor for sensing deformation by breaking contact between two electrodes

Modification to rough polysilicon using ion implantation and silicide

ELECTRODE LAYER PARTITIONING

MICROMECHANICAL SENSOR ELEMENT

MEMS device and manufacturing method thereof

Microfluidic devices with electrodes formed as physically separated sections of microchannel side walls

Gas sensor and manufacturing method thereof

Low hysteresis and flexible pressure sensitive composite

MEMS ACTUATOR AND MEMS ACTUATOR ARRAY WITH A PLURALITY OF MEMS ACTUATORS

MICRO-FLUIDIC CHIP, LIQUID LOADING METHOD THEREOF AND MICRO-FLUIDIC SYSTEM

MEMS actuator element and MEMS actuator array with a plurality of MEMS actuator elements

Semiconductor structure and manufacturing method thereof

Electrode configuration for tilting micro-electro-mechanical systems mirror

Sensor with integrated heater

Micromechanical structure and micromechanical sensor

CASCADABLE MEMS LOGIC DEVICE BASED ON MODES ACTIVATION

Micromechanical sensor device and corresponding production method

NEUROMORPHIC MICRO-ELECTRO-MECHANICAL-SYSTEM DEVICE

Artificial intelligence-based analog sensors and wearable devices incorporating the same

Microelectromechanical sensor device with improved stability to stress

MEMS sensor including a diaphragm and method for manufacturing a MEMS sensor

Piezoelectric micromachined ultrasonic transducer and method of fabricating the same

Electrical component

FORMATION OF SELF-ASSEMBLED MONOLAYER FOR ULTRASONIC TRANSDUCERS

SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE

MEMS sensor and method for manufacturing a MEMS sensor including improved time reliable reinforcement structure

Micromechanical structure and method of providing the same

Micromechanical structure, micromechanical system and method of providing a micromechanical structure

Method of manufacturing MEMS vibration element and MEMS vibration element

MEMS display device with an etch-stop-layer

Micro-pump fluidic strategy for fabricating perovskite microwire array-based devices on semiconductor platforms and method

Piezoelectric actuator provided with a deformable structure having improved mechanical properties and fabrication method thereof

Intrinsic-stress self-compensated microelectromechanical systems transducer

Capacitive microphone with shaped electrode

Multiple layer electrode transducers

MEMS nanotube based thermal neutron detector

MEMS-Sensor

Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure

NANOPORE ARRAY WITH ELECTRODE CONNECTORS PROTECTED FROM ELECTROSTATIC DISCHARGE

Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections

Slotted MEMS force sensor

Structure of micro-electro-mechanical-system microphone and method for fabricating the same

Piezoelectric MEMS microphone

Vehicle key and method of manufacturing the same

Micromechanical component for a sensor device and manufacturing method for a micromechanical component for a sensor device

MEMS capacitor microphone

Microelectromechanical structure with bonded cover

Sensor device and method of fabrication

Electrode arrangement for a micro-electro-mechanical system including tapered electrode structures

Contoured electrode for capacitive micromachined ultrasonic transducer

Micromechanical pressure sensor device including a diaphragm system and corresponding manufacturing method

Micro-electro-mechanical system (MEMS) thermal sensor

MEMS device comprising a membrane and an actuator

MEMS microphone with integrated resistor heater

MEMS Microphone

Acoustic transducers with a low pressure zone and diaphragms having a pressure sensor

Hybrid ultrasonic transducer and method of forming the same

MEMS device and manufacturing method of the same

Active stiction recovery

MEMS capacitive microphone

Force feedback actuator for a MEMS transducer

Microfluidic device with integrated micro-structured electrodes and methods thereof

PRESSURE SENSORS AND METHOD FOR FORMING A MEMS PRESSURE SENSOR

MEMS device manufacturing method and mems device

MEMS device

Structure of micro-electro-mechanical-system microphone

Optical device

Optical device

Dual micro-electro mechanical system and manufacturing method thereof

Accelerometer contact microphones and methods thereof

MEMS element with increased density

Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and Microelectrode Structures

Method of making a piezoelectric MEMS diaphragm microphone

Computation devices and artificial neurons based on nanoelectromechanical systems

DETECTION SYSTEM AND METHOD FOR PRODUCING SAME

Piezoelectric microelectromechanical resonator device and corresponding manufacturing process

Waterproof MEMS button device, input device comprising the MEMS button device and electronic apparatus

Sharp, vertically aligned nanowire electrode arrays, high-yield fabrication and intracellular recording

Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle

Hybrid ultrasonic transducer and method of forming the same

MEMS acoustic sensor

Method of making ohmic contact on low doped bulk silicon for optical alignment

Method of making ohmic contact on low doped bulk silicon for optical alignment

MEMS device with enhanced membrane structure and method of forming the same

Piezoelectric anti-stiction structure for microelectromechanical systems

Sensor package having a movable sensor

Semiconductor MEMS structure

MEMS element

Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure

Integrated structure of mems microphone and air pressure sensor and fabrication method thereof

Piezoelectric MEMS diaphragm microphone

Surface micromechanical element and method for manufacturing the same

MEMS microphone

Piezoelectric type and capacitive type combined MEMS microphone

SEALED BONDED STRUCTURES AND METHODS FOR FORMING THE SAME

Physical quantity sensor, electronic device, and vehicle

Methods for packaging a microelectromechanical systems device

Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element

MEMS microphone and method of manufacturing the same

HIGH SURFACE AREA ELECTRODE FOR ELECTROCHEMICAL SENSOR

Bottom electrode via structures for micromachined ultrasonic transducer devices

SEGMENTED GETTER OPENINGS FOR MICROMACHINED ULTRASOUND TRANSDUCER DEVICES

Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process

MEMS device and method for producing the same

OPTICALLY TRANSPARENT MICROMACHINED ULTRASONIC TRANSDUCER (CMUT)

Modification to rough polysilicon using ion implantation and silicide

Adaptive cavity thickness control for micromachined ultrasonic transducer devices

Bi-layer metal electrode for micromachined ultrasonic transducer devices

Structure forming method and device

MEMS device

Semiconductor manufacturing method and structure thereof

Method for manufacturing MEMS microphone

Charge pump systems, devices, and methods

Gas sensor, sensor array, and manufacturing method thereof

Slotted MEMS force sensor

Water proofing and water detection schemes for MEMS-based environmental sensing devices

Charge pump systems, devices, and methods

MEMS component and production method for a MEMS component

MEMS device with optimized geometry for reducing the offset due to the radiometric effect

Method for manufacturing MEMS microphone

MEMS device with movable stage

Method of controlling placement of micro-objects

Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics

MEMS device having a tiltable suspended structure controlled by electromagnetic actuation

Microelectromechanical systems packages and methods for packaging a microelectromechanical systems device

Capacitive micro structure

MEMS accelerometric sensor having high accuracy and low sensitivity to temperature and aging

Sensor package having a movable sensor

Ultrasonic transducer, manufacturing method thereof, and ultrasonic imaging device

MEMS device comprising a membrane and an actuator

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF MANUFACTURING THE SAME

Piezoelectric MEMS microphone

Getter technology for micromachined ultrasonic transducer cavities

Microfluidic device, method of using microfluidic device and micro total analysis system

CMOS-MEMS structure and method of forming the same

Fence structure to prevent stiction in a MEMS motion sensor

3D stack configuration for 6-axis motion sensor

MEMS sensor

Haptic actuators fabricated by roll-to-roll processing

Silicon carbide microelectromechanical structure, device, and method

MEMS microphone system with low pressure gap and back volume

MEMS device with continuous looped insert and trench

Micro-electro-mechanical system (MEMS) thermal sensor

Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates

Method of making ohmic contact on low doped bulk silicon for optical alignment

High performance sealed-gap capacitive microphone

Linearized micromechanical sensor

Sensor with integrated heater

Encapsulated microelectromechanical structure

Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections

Methods for increasing aspect ratios in comb structures

FORCE SENSOR AND MANUFACTURE METHOD THEREOF

MEMS devices and processes

Planar cavity MEMS and related structures, methods of manufacture and design structures

Planar cavity MEMS and related structures, methods of manufacture and design structures

Planar cavity mems and related structures, methods of manufacture and design structures

Device with a suspended membrane having an increased amplitude of displacement

MEMS or NEMS device with stacked stop element

MEMS transducer system for pressure and acoustic sensing

Micromechanical z-inertial sensor

CMOS-MEMS integrated device without standoff in MEMS

MEMS and method of manufacturing the same

Microelectromechanical transducer

MEMS sensor compensation for off-axis movement

Micro-mechanical sensor and method for manufacturing a micro-electro-mechanical sensor

Method for manufacturing low contact resistance semiconductor structure

Force sensor and manufacture method thereof

High temperature capacitive MEMS pressure sensor

Planar cavity MEMS and related structures, methods of manufacture and design structures

Repulsive-attractive-force electrostatic actuator

Method for producing an integrated circuit pointed element comprising etching first and second etchable materials with a particular etchant to form an open crater in a project

Device for transmitting a movement and a force between two zones that are insulated from one another

Sensor package having a movable sensor

MEMS DEVICES AND PROCESSES

Adhesive silicon oxynitride film

Insulated sensors

Hybrid diamond-polymer thin film sensors and fabrication method

Gyroscope sensitivity calibration

Sensitivity compensation for capacitive MEMS device

MEMS-component

MEMS-sensor

Charge pump systems, devices, and methods

MEMS capacitive pressure sensors in fully depleted semiconductor on insulator (FDSOI)

MEMS accelerometer anti-reflective and reflector coatings

Optical accelerometers for use in navigation grade environments

Membrane components and method for forming a membrane component

Semiconductor MEMS structure

Electrostatic device

Planar cavity MEMS and related structures, methods of manufacture and design structures

Manufacturing method of sensor package

System and method for forming a biological microdevice

OPTICAL SYSTEM WITH DEFORMABLE MEMS OPTICAL ELEMENT

Planar cavity MEMS and related structures, methods of manufacture and design structures

Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device

Micro-electro-mechanical device with ion exchange polymer

MEMS component and mobile device comprising the MEMS component

Micromechanical component for a pressure sensor device

Planar cavity MEMS and related structures, methods of manufacture and design structures

MEMS microphone

Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections

Physical quantity sensor, electronic device, and mobile body

Planar cavity MEMS and related structures, methods of manufacture and design structures

Reflective device

Actuator plate partitioning and control devices and methods

Fabrication of microfluidic chips having electrodes level with microchannel walls

Electrochemical gas sensor constructed with MEMS fabrication technology

Method of depositing electrodes and electrolyte on microelectromechanical system electrochemical sensors

MOx-based gas sensor and manufacturing method thereof

Substrate assembly and related methods

Digital microfluidic systems and methods for droplet manipulation

Surface micromechanical element and method for manufacturing the same

Rough anti-stiction layer for MEMS device

MEMS microphone system and method

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

Levitated motor-actuator with parallel dipole line trap system

Analyte sensor package with dispense chemistry and microfluidic cap

MEMS DEVICES AND PROCESSES

Water proofing and water detection schemes for MEMS-based environmental sensing devices

MEMS sensor with dual pendulous proof masses

MEMS device

MEMS microphone system

MEMS component and production method for a MEMS component

Droplet control and detection device, operating method thereof, and microfluidic device

MEMS microphone